IP Library Granted Patent US 10,672,976
Granted Patent B2
US 10,672,976 · App. 15/445,260 · Granted Jun 2, 2020

Precessional spin current structure with high in-plane magnetization for MRAM

Inventors: Mustafa Michael Pinarbasi (Morgan Hill, CA); Bartlomiej Adam Kardasz (Pleasanton, CA)
Assignee: Spin Memory, Inc.
H01L43/08H01L43/10H01L43/12
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Quick Facts
Patent No.
US 10,672,976
App. No.
15/445,260
Granted
Jun 2, 2020
Kind
B2
Abstract

A magnetoresistive random-access memory (MRAM) is disclosed. MRAM device has a magnetic tunnel junction stack having a significantly improved performance of the free layer in the magnetic tunnel junction structure. The MRAM device utilizes a precessional spin current (PSC) magnetic layer in conjunction with a perpendicular MTJ where the in-plane magnetization direction of the PSC magnetic layer is free to rotate. The precessional spin current magnetic layer is constructed with a material having a face centered cubic crystal structure, such as permalloy.

Claims (36)

1. A magnetic device, comprising

a first synthetic antiferromagnetic structure in a first plane, the synthetic antiferromagnetic structure including a magnetic reference layer, the magnetic reference layer having a magnetization vector that is perpendicular to the first plane and having a fixed magnetization direction;

a non-magnetic tunnel barrier layer in a second plane and disposed over the magnetic reference layer, the second plane being parallel to the first plane;

a free magnetic layer in a third plane and disposed over the non-magnetic tunnel barrier layer, the third plane being parallel to the second plane, the free magnetic layer having a magnetization vector that is perpendicular to the third plane and having a magnetization direction that can precess from a first magnetization direction to a second magnetization direction, the magnetic reference layer, the non-magnetic tunnel barrier layer and the free magnetic layer forming a magnetic tunnel junction;

a non-magnetic spacer in a fourth plane and disposed over the free magnetic layer, the fourth plane being parallel to the third plane, the non-magnetic spacer comprising MgO;

a precessional spin current magnetic layer in a fifth plane that is physically separated from the free magnetic layer and coupled to the free magnetic layer by the non-magnetic spacer, the fifth plane being parallel to the fourth plane, the precessional spin current magnetic layer having a magnetization vector with a magnetization component in the fifth plane, wherein the magnetization component in the fifth plane can freely rotate in any magnetic direction in the fifth plane, the precessional spin current magnetic layer comprising an Fe layer, an Ru layer and a face centered cubic crystal (fcc) structure layer, the Fe layer being disposed over the non-magnetic spacer, the Ru layer being disposed over the Fe layer, and the face centered cubic crystal structure layer being disposed over the Ru layer;

a capping layer in a sixth plane and disposed over the precessional spin current magnetic layer;

wherein electrical current is directed through the capping layer, the precessional spin current magnetic layer, the non-magnetic spacer, the free magnetic layer, the non-magnetic tunnel barrier layer, and the magnetic reference layer, wherein electrons of the electrical current are aligned in the magnetic direction of the precessional spin current magnetic layer; and

wherein the magnetization direction of the precessional spin current magnetic layer is free to follow precession of the magnetization direction of the free magnetic layer, thereby causing spin transfer torque to assist switching of the magnetization vector of the free magnetic layer.

2. The magnetic device of claim 1 wherein the magnetization direction of the magnetization vector of the precessional spin current magnetic layer is in the fifth plane.

3. The magnetic device of claim 1 wherein the magnetization direction of the precessional spin current magnetic layer has a magnetization component in the fifth plane which can freely rotate in the fifth plane.

4. The magnetic device of claim 1 wherein the material having the face centered cubic (fcc) crystal structure is permalloy comprising nickel (Ni) and iron (Fe).

5. The magnetic structure of claim 1 , wherein the capping layer comprises a layer of TaN.

6. The magnetic structure of claim 1 wherein the precessional spin current magnetic layer further comprises a CoFeB layer, the CoFeB layer being disposed over the Fe layer, and the face centered cubic crystal structure layer being disposed over the CoFeB layer.

7. The magnetic structure of claim 6 , wherein the material having the face centered cubic crystal structure is permalloy comprising nickel (Ni) and iron (Fe).

8. The magnetic structure of claim 7 , wherein the capping layer comprises a layer of TaN.

9. The magnetic structure of claim 1 wherein the precessional spin current magnetic layer further comprises a first CoFeB layer, and a second CoFeB layer, the first CoFeB layer being disposed over the Fe layer, the face centered cubic crystal structure layer being disposed over the first CoFeB layer, and the second CoFeB layer being disposed over the face centered cubic crystal structure layer.

10. The magnetic structure of claim 9 , wherein the material having the face centered cubic crystal structure is permalloy comprising nickel (Ni) and iron (Fe).

11. The magnetic structure of claim 10 , wherein the capping layer comprises a layer of TaN.

12. The magnetic structure of claim 10 , wherein the capping layer comprises a layer of MgO.

13. The magnetic structure of claim 10 , wherein the capping layer comprises a layer Ru.

14. A magnetic device, comprising

a first synthetic antiferromagnetic structure in a first plane, the synthetic antiferromagnetic structure including a magnetic reference layer, the magnetic reference layer having a magnetization vector that is perpendicular to the first plane and having a fixed magnetization direction;

a non-magnetic tunnel barrier layer in a second plane and disposed over the magnetic reference layer, the second plane being parallel to the first plane;

a free magnetic layer in a third plane and disposed over the non-magnetic tunnel barrier layer, the third plane being parallel to the second plane, the free magnetic layer having a magnetization vector that is perpendicular to the third plane and having a magnetization direction that can precess from a first magnetization direction to a second magnetization direction, the magnetic reference layer, the non-magnetic tunnel barrier layer and the free magnetic layer forming a magnetic tunnel junction;

a non-magnetic spacer in a fourth plane and disposed over the free magnetic layer, the fourth plane being parallel to the third plane, the non-magnetic spacer comprising MgO;

a precessional spin current magnetic layer in a fifth plane that is physically separated from the free magnetic layer and coupled to the free magnetic layer by the non-magnetic spacer, the fifth plane being parallel to the fourth plane, the precessional spin current magnetic layer having a magnetization vector with a magnetization component in the fifth plane, wherein the magnetization component in the fifth plane can freely rotate in any magnetic direction in the fifth plane, the precessional spin current magnetic layer comprising an Fe layer, and a NiFe layer, wherein the NiFe layer is the material having the face centered cubic crystal structure, the Fe layer being disposed over the non-magnetic spacer, the NiFe layer being disposed over the Fe layer, and the precessional spin current magnetic layer further comprising a third layer being disposed over the NiFe layer;

a capping layer in a sixth plane and disposed over the precessional spin current magnetic layer;

wherein electrical current is directed through the capping layer, the precessional spin current magnetic layer, the non-magnetic spacer, the free magnetic layer, the non-magnetic tunnel barrier layer, and the magnetic reference layer, wherein electrons of the electrical current are aligned in the magnetic direction of the precessional spin current magnetic layer; and

wherein the magnetization direction of the precessional spin current magnetic layer is free to follow precession of the magnetization direction of the free magnetic layer, thereby causing spin transfer torque to assist switching of the magnetization vector of the free magnetic layer.

15. The magnetic structure of claim 14 wherein the third layer comprises CoFeB.

16. The magnetic device of claim 1 wherein the precessional spin current magnetic layer is magnetically coupled to the free magnetic layer.

17. The magnetic device of claim 1 wherein the precessional spin current magnetic layer is electronically coupled to the free magnetic layer.

18. The magnetic device of claim 1 wherein precession of the precessional spin current magnetic layer is synchronized to precession of the free magnetic layer.

19. The magnetic device of claim 1 wherein the precessional spin current magnetic layer has a rotation frequency greater than zero.

20. The magnetic device of claim 1 wherein the free magnetic layer has an effective magnetic anisotropy such that its easy magnetization axis points away from the perpendicular direction and forms an angle with respect to its perpendicular plane.

Assignments (5)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 11, 2021
From: SPIN (ASSIGNMENT FOR BENEFIT OF CREDITORS), LLC
To: INTEGRATED SILICON SOLUTION, (CAYMAN) INC.
Reel/Frame 057473/0319 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 20, 2021
From: SPIN MEMORY, INC.
To: SPIN (ASSIGNMENT FOR THE BENEFIT OF CREDITORS), LLC
Reel/Frame 056927/0038 →
CHANGE OF NAME Recorded Jan 15, 2019
From: SPIN TRANSFER TECHNOLOGIES, INC.
To: SPIN MEMORY, INC.
Reel/Frame 048075/0550 →
SECURITY INTEREST Recorded Jun 16, 2017
From: SPIN TRANSFER TECHNOLOGIES, INC.
To: SILICON VALLEY BANK
Reel/Frame 042981/0819 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 28, 2017
From: PINARBASI, MUSTAFA MICHAEL; KARDASZ, BARTLOMIEJ ADAM
To: SPIN TRANSFER TECHNOLOGIES, INC.
Reel/Frame 041401/0881 →
Continuity (1)
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