Multilayer build processes and devices thereof
A process to form devices may include forming a seed layer on and/or over a substrate, modifying a seed layer selectively, forming an image-wise mold layer on and/or over a substrate and/or electrodepositing a first material on and/or over an exposed conductive area. A process may include selectively applying a temporary patterned passivation layer on a conductive substrate, selectively forming an image-wise mold layer on and/or over a substrate, forming a first material on and/or over at least one of the exposed conductive areas and/or removing a temporary patterned passivation layer. A process may include forming a sacrificial image-wise mold layer on a substrate layer, selectively placing one or more first materials in one or more exposed portions of a substrate layer, forming one or more second materials on and/or over a substrate layer and/or removing a portion of a sacrificial image-wise mold layer.
1. A method of forming a three-dimensional multilayer electromagnetic microdevice by a sequential build process, comprising:
depositing a plurality of layers over a substrate, wherein the layers comprise one or more of a conductive material and a sacrificial material thereby forming a multilayer microstructure above the substrate, the microstructure having one or more walls comprised of a plurality of layers of the conductive material, the walls defining at least one cavity in a top layer of the multilayer microstructure furthest from the substrate, the at least one cavity having the sacrificial disposed therein;
removing the sacrificial material from the at least one cavity and thereafter providing a magnetic microstructural element comprising a magnetic material within the at least one cavity; and thereafter
continuing the build process by depositing a plurality of layers of the conductive and sacrificial materials over the top layer and the magnetic material to provide the multilayer electromagnetic microdevice.
2. The method of forming a three-dimensional microstructure according to claim 1 , wherein the at least one cavity in the top layer includes a plurality of cavities in the top layer, and wherein a selected cavity includes a material different from the magnetic material.
3. The method of forming a three-dimensional microstructure according to claim 2 , wherein material in the selected cavity comprises a metal.
4. The method of forming a three-dimensional microstructure according to claim 1 , wherein the sacrificial material comprises a dielectric material.
5. The method of forming a three-dimensional microstructure according to claim 1 , wherein the sacrificial material comprises an insulative material.
6. The method of forming a three-dimensional microstructure according to claim 1 , wherein the walls comprise windings.
7. The method of forming a three-dimensional microstructure according to claim 1 , wherein the magnetic material comprises one or more of nickel iron and cobalt iron.
8. The method of forming a three-dimensional microstructure according to claim 1 , wherein the multilayer electromagnetic microdevice comprises a multi-turn inductor.
9. The method of forming a three-dimensional microstructure according to claim 1 , wherein the multilayer electromagnetic microdevice comprises a double multi-turn inductor.
10. The method of forming a three-dimensional microstructure according to claim 1 , wherein the step of disposing a plurality of layers comprises providing a seed layer and selectively applying a patterned passivation layer over the seed layer to expose a first portion of the seed layer and to block a second portion of the seed layer.
11. The method of forming a three-dimensional microstructure according to claim 10 , comprising selectively removing the exposed first portion of the seed layer.
12. The method of forming a three-dimensional microstructure according to claim 1 , wherein for a selected layer strata, the layers of sacrificial and conductive materials within the strata have the same height in a direction normal to the selected layer.
13. The method of forming a three-dimensional microstructure according to claim 1 , wherein the magnetic material comprises a ferrite.
14. The method of forming a three-dimensional microstructure according to claim 1 , wherein the walls comprise a plurality of windings disposed in spaced apart relation to define a winding cavity, and wherein the magnetic material comprises a magnetic core that extends through the winding cavity.
15. The method of forming a three-dimensional microstructure according to claim 1 , wherein a selected layer comprises a metal, a magnetic material, and a non-magnetic material.
16. The method of forming a three-dimensional microstructure according to claim 1 , wherein a selected layer comprises at least a portion of the cavity and two or more different conductive materials.
17. The method of forming a three-dimensional microstructure according to claim 1 , comprising removing the sacrificial material after the step of continuing the build process.
18. The method of forming a three-dimensional microstructure according to claim 1 , wherein the multilayer electromagnetic microdevice comprises a non-reciprocal microwave device.
19. The method of forming a three-dimensional microstructure according to claim 18 , wherein the non-reciprocal microwave device is one or more of a circulator, an isolator, and a phase shifter.
20. The method of forming a three-dimensional microstructure according to claim 1 , comprising providing on the substrate an active device operably connected to the multilayer electromagnetic microdevice.