Methods for forming interconnect assemblies with probed bond pads
An interconnect assembly includes a bond pad and an interconnect structure configured to electrically couple an electronic structure to the bond pad. The interconnect structure physically contacts areas of the bond pad that are located outside of a probe contact area that may have been damaged during testing. Insulating material covers the probe contact area and defines openings spaced apart from the probe contact area. The interconnect structure extends through the openings to contact the bond pad.
1. A method of manufacturing an assembly, comprising:
disposing material onto a bond pad of a semiconductor structure to cover a probe mark at a probe contact area of the bond pad;
forming a first opening and a second opening in the material, wherein the first opening and the second opening are spaced apart from one another and the probe mark is directly between the first and second openings; and
forming an interconnect structure that extends through the first opening and the second opening to couple the interconnect structure to the bond pad.
2. The method of claim 1 , further comprising contacting the probe contact area of the bond pad with a probe pin before disposing the material onto the bond pad.
3. The method of claim 1 , further comprising coupling a semiconductor die to the interconnect structure to electrically couple the semiconductor die to the bond pad of the semiconductor structure.
4. The method of claim 1 , further comprising:
disposing passivation material onto the bond pad; and
removing at least a portion of the passivation material to expose the bond pad before disposing the material onto the bond pad.
5. The method of claim 1 , further comprising forming the bond pad which is electrically coupled to a through-silicon via of the semiconductor structure before disposing the material onto the bond pad.
6. The method of claim 1 wherein forming the interconnect structure comprises forming a pillar including a base, an upper portion, and an intermediate portion between the base and the upper portion.
7. The method of claim 1 wherein a portion of the material is underlying the interconnect structure and covers the probe mark.
8. The method of claim 1 wherein the interconnect structure physically contacts only areas of the bond pad spaced apart from the probe mark.
9. The method of claim 1 , further comprising testing the semiconductor structure using a probe configured to physically contact the probe contact area.
10. The method of claim 1 , further comprising physically damaging, via a probing instrument, an exposed surface of the bond pad.
11. The method of claim 1 wherein the material covers the entire probe mark.
12. A method of manufacturing an assembly, comprising:
physically contacting a bond pad of a semiconductor structure with a probe pin such that the probe pin produces a probe mark along the bond pad;
disposing material onto the bond pad to cover the probe mark;
forming a first opening and a second opening in the material, wherein the first opening and the second opening are spaced apart from the probe mark; and
forming an interconnect structure that extends through the first opening and the second opening to couple the interconnect structure to the bond pad, wherein a section of the material is located directly between the interconnect structure and the probe mark.
13. The method of claim 12 wherein disposing the material onto the bond pad includes:
disposing passivation material onto the bond pad; and
removing at least a portion of the passivation material to expose the bond pad before disposing the material onto the bond pad.
14. The method of claim 12 wherein the material disposed on the bond pad covers the entire probe mark.
15. The method of claim 12 , further comprising:
disposing passivation material onto the bond pad; and
removing at least a portion of the passivation material before disposing the material onto the bond pad.
16. The method of claim 12 wherein the probe mark is directly between the first and second openings.
17. The method of claim 12 wherein the entire probe mark is spaced apart from areas of the bond pad physically contacted by the interconnect structure.
18. The method of claim 12 , further comprising removing material from the bond pad to expose the bond pad before forming the probe mark.
19. The method of claim 12 , further comprising testing the semiconductor structure using a probe configured to physically contact the bond pad.
20. The method of claim 12 , wherein forming the interconnect structure comprises forming a pillar including a base, an upper portion, and an intermediate portion between the base and the upper portion.