Method of forming a magnetic head
A method of forming a magnetic head includes forming a read sensor stripe, depositing an electronic lapping guide (ELG) layer over the substrate in an ELG region, forming a backside edge of a read sensor by patterning the read sensor stripe in a first patterning step, forming a backside insulator layer and a rear bias magnetic material portion over the backside edge of the read sensor, forming a backside edge of an ELG by patterning the ELG layer in the ELG region in a second patterning step, simultaneously forming a front side edge of the read sensor and a front side edge of the ELG, and lapping the read sensor and the ELG to provide an air bearing surface of a read sensor. The physical stripe height offset can be determined for each flash field by correlating device conductance and ELG conductance.
1. A method of forming a magnetic head, comprising:
depositing a sensor layer stack including at least one free layer over a substrate in a sensor region;
patterning the sensor layer stack to form a read sensor stripe;
depositing an electronic lapping guide (ELG) layer over the substrate in an ELG region;
forming a backside edge of a read sensor by patterning the read sensor stripe in a first patterning step;
forming a backside insulator layer and a rear bias magnetic material portion over the backside edge of the read sensor;
forming a backside edge of an ELG by patterning the ELG layer in the ELG region in a second patterning step that is different from the first patterning step;
simultaneously forming a front side edge of the read sensor and a front side edge of the ELG by patterning the read sensor stripe and the ELG layer; and
lapping the read sensor and the ELG to provide an air bearing surface of a read sensor employing the ELG to control a final stripe height of the read sensor.
2. The method of claim 1 , wherein:
the backside edge of the ELG is offset from the backside edge of the read sensor by a physical stripe height offset distance along a direction that is perpendicular to the backside edges of the ELG and the read sensor; and
the backside edge of the ELG is located farther away from the air bearing surface than the backside edge of the read sensor is from the air bearing surface.
3. The method of claim 2 , wherein each of the first patterning step and the second patterning step is performed employing multiple flash fields on the substrate to form plurality of read sensors and ELG's, wherein the stripe height offset distance varies from flash field to flash field due to lithographic overlay variations between the first and second patterning steps.
4. The method of claim 3 , further comprising forming a plurality of test devices within each flash field, wherein the plurality of test devices includes different design stripe heights.
5. The method of claim 4 , further comprising:
determining a physical stripe height offset by measuring electrical characteristics of the plurality of test devices for each flash field; and
lapping read sensors and ELGs, for each flash field, employing the physical stripe height offset for the respective flash field to provide a target stripe height for each of the read sensors of product devices.
6. The method of claim 5 , wherein the physical stripe height offset is measured by correlating measured device conductance of the respective read sensors and conductance of the respective ELGs for the plurality of test devices for each flash field.
7. The method of claim 1 , wherein the read sensor stripe comprises a dual ferromagnetic free layer stripe, and further comprising forming respective pairs of magnetic bias material portions on either side of the read sensor stripe.
8. The method of claim 7 , further comprising:
applying and patterning a first photoresist layer over the at least one pair of magnetic bias material portions and over a portion of the read sensor stripe located between the at least one pair of magnetic bias material portions; and
ion milling regions of the at least one pair of magnetic bias material portions and the read sensor stripe that are not covered by the first photoresist layer, wherein the backside edge of the read sensor comprises sidewalls of remaining portions of the at least one pair of magnetic bias material portions and the read sensor stripe.
9. The method of claim 1 , further comprising:
forming a backside insulating layer on the backside edge of the read sensor; and
forming a rear bias magnetic material portion including a hard magnetic material on a sidewall of the backside insulating layer.
10. The method of claim 1 , wherein:
the first patterning step is performed by applying an patterning a first photoresist layer over the read sensor stripe and the ELG layer, wherein an opening is provided in the first photoresist layer, and the backside edge of the read sensor is formed underneath an edge of the first photoresist layer; and
the second patterning step is performed by applying an patterning a second photoresist layer over the sensor layer and the ELG layer, wherein the backside edge of the ELG is formed underneath an edge of the second photoresist layer.
11. The method of claim 10 , wherein:
the patterned second photoresist layer covers an entirety of the sensor region; and
the second patterning step is performed after the first patterning step.
12. The method of claim 11 , wherein the patterned first photoresist layer includes an opening in the ELG region.
13. The method of claim 12 , further comprising:
forming a recess cavity within the ELG layer concurrently with formation of the backside edge of the read sensor within an area of the opening;
forming a continuous insulating material layer on the backside edge of the read sensor and within the recess cavity; and
depositing and patterning a hard magnetic material over the continuous insulating material layer;
wherein a rear bias magnetic material portion is formed on a sidewall of a remaining portion of the continuous insulating material layer adjacent to the backside edge of the read sensor and a sacrificial magnetic material portion is formed in the ELG region.
14. The method of claim 13 , further comprising removing the sacrificial magnetic material portion from the ELG region during the second patterning step.
15. The method of claim 10 , wherein:
the second patterning step is performed prior to the first patterning step; and
the first photoresist layer as patterned covers an entirety of the ELG region.
16. The method of claim 1 , further comprising depositing at least one dielectric material on the backside edge of the ELG and on the front side edges of the read sensor and of the ELG.
17. The method of claim 16 , wherein:
the at least one dielectric material layer comprises a first dielectric material and a second dielectric material;
the first dielectric material is deposited on the backside edge of the ELG; and
the second dielectric material is deposited on the front side edges of the read sensor and of the ELG.
18. The method of claim 17 , further comprising patterning a portion of the first dielectric material, wherein:
a remaining portion of the first dielectric material contacts the backside edge of the ELG; and
the second dielectric material is deposited on the remaining portion of the first dielectric material and on sidewalls of the ELG that extend along a direction perpendicular to directions of the backside edge and the front side edge of the ELG.
19. The method of claim 18 , the first dielectric material is patterned during a patterning step, wherein the second dielectric material is deposited on the remaining portion of the first dielectric material.
20. The method of claim 1 , further comprising:
forming a first magnetic shield over the substrate, wherein the sensor layer stack is formed over the first magnetic shield;
forming a dielectric isolation layer over the substrate, wherein the ELG layer is formed over the dielectric isolation layer; and
forming a second magnetic shield over the read sensor,
wherein portions of the first and second magnetic shields are lapped during formation of the air bearing surface.