Device package and methods for the fabrication and testing thereof
Provided are methods of forming sealed via structures. One method involves: (a) providing a semiconductor substrate having a first surface and a second surface opposite the first surface; (b) forming a layer on the first surface of the substrate; (c) etching a via hole through the substrate from the second surface to the layer, the via hole having a first perimeter at the first surface; (d) forming an aperture in the layer, wherein the aperture has a second perimeter within the first perimeter; and (e) providing a conductive structure for sealing the via structure. Also provided are sealed via structures, methods of detecting leakage in a sealed device package, sealed device packages, device packages having cooling structures, and methods of bonding a first component to a second component.
1. A method of hermetically sealing a micro-optical device package to permit leak detection, comprising:
providing a substrate having hermetically sealed conductive vias disposed therethrough;
attaching an active optical element to the substrate with the optical element disposed in electrical communication with the hermetically sealed conductive vias;
placing a lid over the active optical element and the substrate;
sealing the lid to the substrate to provide the sealed micro-optical device package, the sealed micro-optical device package including a sealed volume between the substrate and the lid having a pressure above atmospheric pressure such that a wall of the lid has a measurable outward deflection; and
measuring the deflection of the wall after sealing the micro-optical device package.
2. The method according to claim 1 , wherein the step of measuring comprises measuring deflection with an interferometer.
3. The method according to claim 1 , wherein the lid is optically transparent to light in the visible portion of the spectrum.
4. The method according to claim 1 , wherein the step of providing a sealed micro-optical device package comprises sealing the package with an inert gas disposed within the sealed volume.