IP Library Granted Patent US 10,319,426
Granted Patent B2
US 10,319,426 · App. 15/590,863 · Granted Jun 11, 2019

Semiconductor structures, memory cells and devices comprising ferroelectric materials, systems including same, and related methods

Inventors: Albert Liao (Boise, ID); Wayne I. Kinney (Emmett, ID); Yi Fang Lee (Boise, ID); Manzar Siddik (Boise, ID)
Assignee: Micron Technology, Inc.
G11C11/221G11C11/2297H01L27/11507H01L27/11509H01L28/55
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Quick Facts
Patent No.
US 10,319,426
App. No.
15/590,863
Granted
Jun 11, 2019
Kind
B2
Abstract

A semiconductor structure includes an electrode, a ferroelectric material adjacent the electrode, the ferroelectric material comprising an oxide of at least one of hafnium and zirconium, the ferroelectric material doped with bismuth, and another electrode adjacent the ferroelectric material on an opposite side thereof from the first electrode. Related semiconductor structures, memory cells, semiconductor devices, electronic systems, and related methods are disclosed.

Claims (44)

1. A semiconductor structure, comprising:

an electrode;

another electrode; and

a ferroelectric material between the electrode and the another electrode and comprising an oxide of at least one of hafnium and zirconium, the oxide doped with bismuth, wherein the ferroelectric material further comprises magnesium and comprises between about 0.3 part and about 10.0 parts of bismuth and magnesium for every about 100 parts of hafnium and zirconium.

2. The semiconductor structure of claim 1 , wherein the ferroelectric material comprises hafnium bismuth oxide.

3. The semiconductor structure of claim 1 , wherein the ferroelectric material comprises bismuth at between about 3.0 atomic percent and about 5.0 atomic percent of the ferroelectric material based on non-oxygen atoms of the ferroelectric material.

4. The semiconductor structure of claim 1 , wherein the ferroelectric material comprises bismuth at between about 0.3 atomic percent and about 1.0 atomic percent of the ferroelectric material based on non-oxygen atoms of the ferroelectric material.

5. The semiconductor structure of claim 1 , wherein the ferroelectric material further comprises at least one of yttrium, strontium, niobium, tantalum, lanthanum, gadolinium, vanadium, phosphorus, potassium, scandium, ruthenium, selenium, calcium, barium, aluminum, arsenic, indium, and silicon.

6. The semiconductor structure of claim 1 , wherein the ferroelectric material comprises a uniform concentration of bismuth throughout a thickness thereof.

7. The semiconductor structure of claim 1 , wherein the ferroelectric material has an orthorhombic crystal structure.

8. The semiconductor structure of claim 1 , wherein the oxide of at least one of hafnium and zirconium comprises hafnium zirconate (HfZrO 4 ), the hafnium zirconate doped with bismuth.

9. The semiconductor structure of claim 1 , wherein the ferroelectric material comprises zirconium bismuth oxide.

10. The semiconductor structure of claim 1 , wherein an atomic percent of bismuth in the ferroelectric material exhibits a gradient.

11. The semiconductor structure of claim 1 , wherein the ferroelectric material has a thickness between about 10 Å and about 200 Å.

12. The semiconductor structure of claim 1 , wherein the ferroelectric material comprises hafnium zirconium bismuth oxide.

13. A semiconductor device, comprising:

an array of memory cells, each memory cell of the array of memory cells comprising a capacitor coupled to a conductive material in contact with a source region or a drain region, the capacitor comprising:

a first electrode and a second electrode; and

a ferroelectric material between the first electrode and the second electrode, the ferroelectric material comprising:

hafnium oxide, zirconium oxide, or a combination thereof;

bismuth; and

magnesium,

wherein the ferroelectric material comprises between about 0.3 part and about 10.0 parts of bismuth and magnesium for every about 100 parts of hafnium and zirconium.

14. The semiconductor device of claim 13 , wherein the first electrode overlies a base material and further comprising another ferroelectric material comprising hafnium oxide, zirconium oxide, or a combination thereof over the base material, the another ferroelectric material doped with bismuth over the base material.

15. The semiconductor device of claim 14 , further comprising a gate electrode overlying the another ferroelectric material over the base material.

16. The semiconductor device of claim 14 , wherein the another ferroelectric material comprises bismuth at between about 0.1 atomic percent and about 0.3 atomic percent of the another ferroelectric material based on non-oxygen atoms of the another ferroelectric material.

17. The semiconductor device of claim 14 , wherein the another ferroelectric material further comprises at least one of aluminum and magnesium.

18. A method of forming a semiconductor structure, the method comprising:

forming an electrode;

forming a ferroelectric material comprising bismuth, magnesium, and at least one of hafnium oxide and zirconium oxide over the electrode, wherein the ferroelectric material comprises between about 0.3 part and about 10.0 part bismuth and magnesium for every about 100 parts of hafnium and zirconium; and

forming another electrode over the ferroelectric material.

19. The method of claim 18 , wherein forming a ferroelectric material comprises forming hafnium bismuth oxide.

20. The method of claim 18 , wherein forming a ferroelectric material comprises forming the ferroelectric material to comprise between about 1.0 atomic percent and about 3.0 atomic percent bismuth based on non-oxygen atoms of the ferroelectric material.

21. The method of claim 18 , wherein forming a ferroelectric material comprises forming the ferroelectric material to exhibit an orthorhombic crystal structure.

22. An electronic system, comprising:

a processor;

a memory array operably coupled to the processor, the memory array comprising memory cells, each memory cell of the array of memory cells comprising a capacitor operably coupled to a conductive material in contact with a source region or a drain region, the capacitor comprising:

a first electrode;

a ferroelectric material adjacent to the first electrode and comprising:

hafnium oxide, zirconium oxide, or a combination thereof;

bismuth; and

magnesium, wherein the ferroelectric material comprises between about 0.3 part and about 10.0 parts of bismuth and magnesium for every about 100 parts of hafnium and zirconium; and

a second electrode adjacent the ferroelectric material on an opposite side thereof from the first electrode; and

a power supply in operable communication with the processor.

Assignments (7)
RELEASE OF SECURITY INTEREST Recorded Nov 12, 2019
From: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
Reel/Frame 051028/0001 →
RELEASE OF SECURITY INTEREST Recorded Oct 10, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 050700/0535 →
RELEASE OF SECURITY INTEREST Recorded Jul 20, 2018
From: U.S. BANK NATIONAL ASSOCIATION, AS AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 046597/0393 →
SECURITY INTEREST Recorded Jul 13, 2018
From: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 047540/0001 →
SUPPLEMENT NO. 5 TO PATENT SECURITY AGREEMENT Recorded Aug 8, 2017
From: MICRON TECHNOLOGY, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 043482/0776 →
SUPPLEMENT NO. 5 TO PATENT SECURITY AGREEMENT Recorded Aug 8, 2017
From: MICRON TECHNOLOGY, INC.
To: U.S. BANK NATIONAL ASSOCIATION
Reel/Frame 043483/0686 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 9, 2017
From: LIAO, ALBERT; KINNEY, WAYNE I.; LEE, YI FANG; SIDDIK, MANZAR
To: MICRON TECHNOLOGY, INC.
Reel/Frame 042308/0556 →
Continuity (1)
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