Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method
An apparatus for processing a substrate is disclosed. The apparatus includes a polishing section configured to polish a substrate, a transfer mechanism configured to transfer the substrate, and a cleaning section configured to clean and dry the polished substrate. The cleaning section has plural cleaning lines for cleaning plural substrates. The plural cleaning lines have plural cleaning modules and plural transfer robots for transferring the substrates.
1. A substrate processing module comprising:
a base;
a motor configured to rotate the base;
a plurality of substrate-support members supported by the base;
a spin cover secured to an upper surface of the base, the spin cover surrounding a substrate held by the substrate support members;
a first nozzle configured to supply IPA (isopropyl alcohol) vapor on a first face of the substrate; and
an IPA supplying unit configured to supply the IPA vapor to the first nozzle.
2. The substrate processing module according to claim 1 further comprising, at an upper part of the substrate processing module, a filter fan unit configured to supply clean air into the substrate processing module.
3. The substrate processing module according to claim 1 , wherein the spin cover is configured to rotate with the substrate held by the substrate support members, and a drain hole is formed in a bottom face of the spin cover.
4. The substrate processing module according to claim 1 further comprising a second nozzle and a third nozzle configured to supply cleaning liquid to the first face and a second face of the substrate, respectively.
5. The substrate processing module according to claim 1 further comprising a fourth nozzle configured to supply gas to a second face of the substrate.
6. The substrate processing module according to claim 1 , wherein the IPA supplying unit comprises:
a bubbling tank;
an IPA supply line configured to supply an IPA liquid to the bubbling tank;
a bubbler configured to create bubbles in the bubbling tank by supplying nitrogen gas to the IPA liquid in the bubbling tank.
7. The substrate processing module according to claim 6 , wherein the IPA supplying unit further comprises, around the bubbling tank, a water jacket configured to adjust temperature of the IPA liquid in the bubbling tank.
8. The substrate processing module according to claim 1 , wherein the first nozzle is movable with regard to the substrate.
9. A substrate processing method comprising:
rotating a substrate and supplying pure water;
stopping supplying the pure water;
rotating the substrate at a low speed and supplying IPA vapor and pure water on a first face of the substrate from a first nozzle and a second nozzle, respectively, and supplying pure water on a second face of the substrate;
moving the first nozzle and the second nozzle in a radial direction of the substrate.
10. The substrate processing method according to claim 9 , wherein upon rotating the substrate, a spin cover surrounding the substrate is rotated with the substrate.