IP Library Granted Patent US 10,770,405
Granted Patent B2
US 10,770,405 · App. 15/609,206 · Granted Sep 8, 2020

Thermal interface material having different thicknesses in packages

Inventors: Sung-Hui Huang (Dongshan Township, TW); Da-Cyuan Yu (Hsinchu, TW); Kuan-Yu Huang (Taipei, TW); Pai Yuan Li (Hsinchu, TW); Hsiang-Fan Lee (Hsinchu, TW)
Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
H01L23/562H01L21/486H01L21/4853H01L21/4857H01L21/4882H01L21/563H01L21/565H01L23/3114H01L23/3128H01L23/3135H01L23/3675H01L23/3733H01L23/3736H01L23/3737H01L23/49822H01L23/49827H01L23/49838H01L24/32H01L24/83H01L25/0655H01L25/18H01L25/50H01L23/367H01L24/16H01L24/73H01L24/97H01L2224/13147H01L2224/13155H01L2224/16225H01L2224/16227H01L2224/26175H01L2224/32225H01L2224/73204H01L2224/73253H01L2224/83385H01L2224/83951H01L2224/92225H01L2924/00014H01L2924/10158H01L2924/15174H01L2924/15311H01L2924/165H01L2924/16152H01L2924/181H01L2924/18161H01L2924/35121
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Quick Facts
Patent No.
US 10,770,405
App. No.
15/609,206
Granted
Sep 8, 2020
Kind
B2
Abstract

A package includes a package component, a device die over and bonded to the package component, a metal cap having a top portion over the device die, and a thermal interface material between and contacting the device die and the metal cap. The thermal interface material includes a first portion directly over an inner portion of the device die, and a second portion extending directly over a corner region of the device die. The first portion has a first thickness. The second portion has a second thickness greater than the first thickness.

Claims (46)

1. A package comprising:

a first package component;

a device die over and bonded to the first package component;

a metal cap comprising a top portion over the device die;

a thermal interface material between and contacting the device die and the metal cap, wherein the thermal interface material comprises:

a first portion directly over an inner portion of the device die, wherein the first portion has a first thickness; and

a second portion, wherein an entirety of the second portion is directly over, and overlaps, an outer portion of the device die, wherein the second portion has a second thickness greater than the first thickness, and the first thickness and the second thickness are measured in a direction orthogonal to a major top surface of the device die; and

an encapsulating material encircling the device die, wherein the second portion of the thermal interface material having the second thickness further extends directly over an additional portion of the encapsulating material.

2. The package of claim 1 , wherein the metal cap comprises a recess extending from a bottom surface of the top portion of the metal cap into the top portion of the metal cap, wherein an upper part of the second portion of the thermal interface material is in the recess.

3. The package of claim 2 , wherein the metal cap further comprises a ring portion under and connected to the top portion, wherein the recess extends laterally to the ring portion.

4. The package of claim 2 , wherein the metal cap further comprises a ring portion under and connected to the top portion, wherein the recess is laterally spaced apart from the ring portion.

5. The package of claim 1 , wherein the device die comprises a substrate, and a corner area of the substrate is recessed as a recess, and wherein a lower part of the second portion of the thermal interface material is in the recess.

6. The package of claim 1 , wherein the second portion of the thermal interface material contacts the device die to form an interface, and at least a portion of the interface is parallel to or in a same plane as the major top surface of the device die.

7. The package of claim 1 , wherein the second portion of the thermal interface material having the second thickness has a continuously curved inner edge.

8. The package of claim 1 , wherein the second portion has continuously varying thicknesses, with portions of the thermal interface material closer to a center of the top portion of the metal cap being thinner than portions farther away from the center.

9. The package of claim 1 , wherein the second portion of the thermal interface material comprises a part higher than the first portion.

10. The package of claim 1 , wherein the first portion and the second portion of the thermal interface material have planar surfaces that are parallel to each other.

11. A package comprising:

a stack comprising:

an interposer;

a first device die and a second device die over and bonded to the interposer;

a package substrate underlying and bonded to the interposer; and

an encapsulating material encircling each of the first device die and the second device die;

a metal cap comprising:

a top portion; and

a skirt portion underlying and connected to the top portion;

an adhesive adhering the skirt portion to the package substrate; and

a thermal interface material comprising:

a planar portion having a substantially uniform thickness; and

a protruding portion protruding up or down from the planar portion, wherein the protruding portion overlaps a corner portion of the stack.

12. The package of claim 11 , wherein the thermal interface material comprises four protruding portions, each overlapping a corner of the stack, wherein the four protruding portions are discrete from each other.

13. The package of claim 11 , wherein the protruding portion protrudes up to extend into a recess of the top portion of the metal cap.

14. The package of claim 11 , wherein the protruding portion protrudes down to extend into a recess of the stack.

15. The package of claim 11 , wherein the protruding portion overlaps a peripheral portion of the stack, and the peripheral portion forms a full ring.

16. The package of claim 11 further comprising an additional protruding portion protruding up or down, wherein the additional protruding portion overlaps a gap between the first device die and the second device die.

17. A package comprising:

a package substrate;

an interposer over and bonded to the package substrate;

a device die over and bonded to the interposer;

a metal cap comprising:

a top portion over the device die, wherein the top portion comprises a plurality of recesses, each recessing from a bottom surface of the top portion into the top portion; and

a skirt portion encircling the device die and the interposer therein, wherein the skirt portion is adhered to the package substrate, and the skirt portion comprises four side portions; and

a thermal interface material between and contacting the device die and the metal cap, wherein the thermal interface material extends into the plurality of recesses of the top portion of the metal cap.

18. The package of claim 17 , wherein substantially an entirety of a bottom surface of the top portion of the metal cap other than the plurality of recesses is planar.

19. The package of claim 17 , wherein the plurality of recesses has depths greater than about 10 μm.

20. The package of claim 17 , wherein each of the plurality of recesses has an inner edge facing a center of the top portion of the metal cap, and the inner edge is curved.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 5, 2024
From: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED
To: PARABELLUM STRATEGIC OPPORTUNITIES FUND LLC
Reel/Frame 068326/0474 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 30, 2017
From: HUANG, SUNG-HUI; YU, DA-CYUAN; HUANG, KUAN-YU; LI, PAI YUAN; LEE, HSIANG-FAN
To: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
Reel/Frame 042875/0270 →
Continuity (1)
Related Publication 20180350754A1 · Dec 6, 2018
Cited By (3)
US 12,199,008 US 12,224,224 US 12,538,852