Package structure containing chip structure with inclined sidewalls
A package structure is provided. The package structure includes a chip structure having opposite surfaces with different widths. The chip structure has an inclined sidewall between the opposite surfaces. The package structure also includes a protective layer laterally surrounding the chip structure.
1 . A package structure, comprising:
a chip structure having opposite surfaces with different widths, wherein the chip structure has an inclined sidewall between the opposite surfaces, the chip structure has a first side region, a second side region, and a corner region, the first side region and the second side region meet at the corner region, the chip structure has a first inclined sidewall in the first side region, the chip structure has a second inclined sidewall in the corner region, and the first inclined sidewall is steeper than the second inclined sidewall, wherein in a top view, the corner region has a rounded profile, the first side region has a first substantially straight-line profile and extends towards the corner region along a first direction, the second side region has a second substantially straight-line profile and extends towards the corner region along a second direction, and the second direction is perpendicular to the first direction; and
a protective layer laterally surrounding the chip structure.
2 . The package structure as claimed in claim 1 , further comprising:
a second chip structure below the chip structure, wherein the second chip structure has inclined sidewalls.
3 . The package structure as claimed in claim 2 , further comprising:
a third chip structure laterally spaced apart from the chip structure, wherein the protective layer laterally surrounds the third chip structure.
4 . The package structure as claimed in claim 3 , wherein the third chip structure has inclined sidewalls.
5 . The package structure as claimed in claim 4 , wherein the second chip structure extends across a portion of the chip structure and a portion of the third chip structure.
6 . The package structure as claimed in claim 2 , further comprising:
a redistribution structure between the chip structure and the second chip structure, wherein conductive features of the redistribution structure comprise a plurality of conductive vias, and each of the conductive vias shrinks along a direction towards the chip structure.
7 . The package structure as claimed in claim 1 , wherein the chip structure further has a vertical sidewall connecting a bottom edge of the inclined sidewall.
8 . A package structure, comprising:
a chip structure over a redistribution structure, wherein the chip structure has an inclined sidewall, the inclined sidewall is at an acute angle to a vertical, the vertical is a direction perpendicular to a main surface of the chip structure, and the acute angle is in a range from about 12 degrees to about 45 degrees, wherein the chip structure has a first side region, a second side region, and a corner region, the first side region and the second side region meet at the corner region, the chip structure has a first inclined sidewall in the first side region, the chip structure has a second inclined sidewall in the corner region, and the first inclined sidewall is steeper than the second inclined sidewall, wherein in a top view, the corner region has a rounded profile, the first side region has a first substantially straight-line profile and extends towards the corner region along a first direction, the second side region has a second substantially straight-line profile and extends towards the corner region along a second direction, and the second direction is perpendicular to the first direction; and
a protective layer over the redistribution structure, wherein the protective layer surrounds the chip structure.
9 . The package structure as claimed in claim 8 , wherein in the top view, the chip structure has a second corner region, a third corner region, and a fourth corner region, and the second corner region, the third corner region, and the fourth corner region have rounded profiles.
10 . The package structure as claimed in claim 8 , wherein the protective layer is in direct contact with the inclined sidewall of the chip structure.
11 . The package structure as claimed in claim 8 , wherein the chip structure further has a vertical sidewall connecting a bottom edge of the inclined sidewall.
12 . The package structure as claimed in claim 8 , further comprising a second chip structure over the redistribution structure and surrounded by the protective layer, wherein the second chip structure is wider than the chip structure, the second chip structure has a second inclined sidewall, the second inclined sidewall is at a second acute angle to the vertical, and the second acute angle of the second chip structure is greater than the acute angle of the chip structure.
13 . A package structure, comprising:
a chip structure over a redistribution structure, wherein the chip structure has a front side and a back side opposite to the front side, and the front side and the bottom side have different widths, wherein the chip structure has a first side region, a second side region, and a corner region, the first side region and the second side region meet at the corner region, the chip structure has a first inclined sidewall in the first side region, the chip structure has a second inclined sidewall in the corner region, and the first inclined sidewall is steeper than the second inclined sidewall, wherein in a top view, the corner region has a curved profile, the first side region has a first substantially straight-line profile and extends towards the corner region along a first direction, the second side region has a second substantially straight-line profile and extends towards the corner region along a second direction, and the second direction is perpendicular to the first direction; and
a protective layer over the redistribution structure, wherein the protective layer surrounds the chip structure.
14 . The package structure as claimed in claim 13 , wherein the chip structure has a sidewall connecting the front side and the back side, and the sidewall comprises at least one inclined portion.
15 . The package structure as claimed in claim 13 , wherein the sidewall is a curved sidewall.
16 . The package structure as claimed in claim 6 , further comprising:
a circuit substrate bonded to the redistribution structure, wherein the second chip structure is between the redistribution structure and the circuit substrate.
17 . The package structure as claimed in claim 16 , wherein a bottommost surface of the second chip structure is vertically between a topmost surface of the circuit substrate and a lower surface of the circuit substrate.
18 . The package structure as claimed in claim 13 , wherein the redistribution structure has a plurality of conductive features and a plurality of polymer-containing layers surrounding the conductive features, the conductive features of the redistribution structure comprise a plurality of conductive vias, and each of the conductive vias gradually shrinks along a direction towards the chip structure.
19 . The package structure as claimed in claim 13 , further comprising:
a circuit substrate bonded to the redistribution structure through a plurality of solder bumps;
a second chip structure bonded to the redistribution structure, wherein the circuit substrate laterally surrounds a lower portion of the second chip structure; and
an underfill material laterally surrounding the solder bumps and the second chip structure, wherein the circuit substrate laterally surrounds a lower portion of the underfill material.
20 . The package structure as claimed in claim 1 , further comprising:
a redistribution structure, wherein the chip structure and the protective layer are over the redistribution structure, the chip structure is in direct contact with a conductive feature of the redistribution structure, and the chip structure is in direct contact with an insulating layer of the redistribution structure.