Semiconductor structure, electrode structure and method of forming the same
A semiconductor structure includes an N th metal layer, a diffusion barrier layer over the N th metal layer, a first deposition of bottom electrode material over the diffusion barrier layer, a second deposition of bottom electrode material over the first deposition of bottom electrode material, a magnetic tunneling junction (MTJ) layer over the second deposition of bottom electrode material, a top electrode over the MTJ layer; and an (N+1) th metal layer over the top electrode; wherein the diffusion barrier layer and the first deposition of bottom electrode material are laterally in contact with a dielectric layer, the first deposition of bottom electrode material spacing the diffusion barrier layer and the second deposition of bottom electrode material apart, and N is an integer greater than or equal to 1. An associated electrode structure and method are also disclosed.
1. An electrode structure, comprising:
a diffusion barrier layer over and coupled to a metal layer; and
an electrode over the diffusion barrier layer, a bottom surface of the electrode is uneven and a center region of the bottom surface is higher than an outer region of the bottom surface;
wherein the diffusion barrier layer and the electrode are disposed in a dielectric layer, and a top surface of the diffusion barrier layer is lower than a top surface of the dielectric layer, and a portion of the electrode and a portion of the diffusion barrier layer form a tapered structure; and
the top surface of the diffusion barrier layer is lower than the top surface of the dielectric layer by about 100 angstroms to about 300 angstroms.
2. The electrode structure of claim 1 , wherein the electrode structure is a bottom electrode of a magnetic random access memory (MRAM) cell.
3. The electrode structure of claim 1 , wherein the tapered structure tapering toward the metal layer.
4. The electrode structure of claim 1 , wherein the diffusion barrier layer includes metal nitride materials.
5. The electrode structure of claim 4 , wherein the diffusion barrier layer includes tantalum nitride (TaN).
6. The electrode structure of claim 1 , wherein the electrode includes titanium nitride (TiN).
7. The electrode structure of claim 1 , wherein the dielectric layer includes a silicon carbide (SiC) layer.
8. The electrode structure of claim 1 , wherein the dielectric layer includes a silicon-rich oxide (SRO) layer.
9. An electrode structure, comprising:
a metal layer;
a dielectric layer over the metal layer;
a diffusion barrier layer disposed in the dielectric layer, wherein the diffusion barrier layer is over and coupled to the metal layer; and
a first deposition of electrode material over the diffusion barrier layer;
a second deposition of electrode material over the first deposition of electrode material;
wherein the diffusion barrier layer and the first deposition of electrode material are laterally in contact with the dielectric layer, the first deposition of electrode material spacing the diffusion barrier layer and the second deposition of electrode material apart;
a top surface of the diffusion barrier layer is uneven and a center region of the top surface is higher than an outer region of the top surface; and
wherein the top surface of the diffusion barrier layer is lower than the top surface of the dielectric layer by about 100 angstroms to about 300 angstroms.
10. The electrode structure of claim 9 , wherein the first deposition of electrode material and the second deposition of electrode material together form a bottom electrode of a magnetic random access memory (MRAM) cell.
11. The electrode structure of claim 9 , wherein the first deposition of electrode material and a portion of the diffusion barrier layer form a tapered structure tapering toward the metal layer.
12. The electrode structure of claim 9 , wherein the diffusion barrier layer includes metal nitride materials.
13. The electrode structure of claim 12 , wherein the diffusion barrier layer includes tantalum nitride (TaN).
14. The electrode structure of claim 9 , wherein the first deposition of electrode material and the second deposition of electrode material includes titanium nitride (TiN).
15. The electrode structure of claim 9 , wherein the dielectric layer includes a silicon carbide (SiC) layer.
16. The electrode structure of claim 9 , wherein the dielectric layer includes a silicon-rich oxide (SRO) layer.
17. An electrode structure, comprising:
a metal layer;
a dielectric layer over the metal layer;
a diffusion barrier layer over and coupled to the metal layer; and
a protection layer over the dielectric layer;
a bottom electrode over the diffusion barrier layer;
wherein a lower portion of the bottom electrode and the diffusion barrier layer are disposed in the dielectric layer and laterally in contact with the dielectric layer, and an upper portion of the bottom electrode is disposed in the protection layer and laterally in contact with the protection layer; and
a top surface of the diffusion barrier layer is uneven and a center region of the top surface is higher than an outer region of the top surface.
18. The electrode structure of claim 17 , wherein the diffusion barrier layer includes tantalum nitride (TaN).
19. The electrode structure of claim 17 , wherein the bottom electrode includes titanium nitride (TiN).
20. The electrode structure of claim 17 , wherein the dielectric layer includes a silicon carbide (SiC) layer.