Multi-chip modules formed using wafer-level processing of a reconstitute wafer
View Patent ↗Apparatuses and methods are described. This apparatus includes a bridge die having first contacts on a die surface being in a molding layer of a reconstituted wafer. The reconstituted wafer has a wafer surface including a layer surface of the molding layer and the die surface. A redistribution layer on the wafer surface includes electrically conductive and dielectric layers to provide conductive routing and conductors. The conductors extend away from the die surface and are respectively coupled to the first contacts at bottom ends thereof. At least second and third IC dies respectively having second contacts on corresponding die surfaces thereof are interconnected to the bridge die and the redistribution layer. A first portion of the second contacts are interconnected to top ends of the conductors opposite the bottom ends thereof in part for alignment of the at least second and third IC dies to the bridge die.
1. An apparatus for a microelectronic device, comprising:
a first integrated circuit die having first contacts on a die surface thereof in a molding layer of a reconstituted wafer having a wafer surface including a layer surface of the molding layer and the die surface of the first integrated circuit die;
a redistribution layer on the wafer surface including electrically conductive layers and dielectric layers to provide conductive routing and shortest path vertically oriented conductors, the conductors extending away from the die surface of the first integrated circuit die and respectively coupled to the first contacts at bottom ends of the conductors;
at least second and third integrated circuit dies respectively having second contacts on die surfaces thereof interconnected to the first integrated circuit die through the conductors of the redistribution layer;
a first portion of the second contacts of each of the at least second and third integrated circuit dies interconnected to top ends of the conductors opposite the bottom ends thereof, the top ends of the conductors in part for alignment of the at least second and third integrated circuit dies to the first integrated circuit die located below the redistribution layer; and
a second portion of the second contacts interconnected to one another through the conductive routing.
2. The apparatus according to claim 1 , wherein the molding layer is a first molding layer, the apparatus further comprising a second molding layer located on the at least second and third integrated circuit dies and in a space therebetween and further on the redistribution layer for unitization of the reconstituted wafer with the first integrated circuit die, the redistribution layer, and the at least second and third integrated circuit dies.
3. The apparatus according to claim 2 , wherein:
the layer surface of the first molding layer is a first layer surface;
the die surface of the first integrated circuit die is a first die surface thereof;
the dies surfaces of the at least second and third integrated circuit dies are respective first die surfaces thereof;
a second layer surface of the first molding layer opposite the first layer surface thereof is surfaced down to at least a second die surface of the first integrated circuit die opposite the first die surface thereof; and
a layer surface of the second molding layer is surfaced down to second die surfaces respectively of the at least second and third integrated circuit dies opposite the first dies surfaces thereof.
4. The apparatus according to claim 1 , wherein the molding layer is a first molding layer, the apparatus further comprising a second molding layer located on the at least second and third integrated circuit dies and in a space therebetween and further on a portion of the layer surface of the first molding layer for unitization of the reconstituted wafer with the first integrated circuit die, the redistribution layer, and the at least second and third integrated circuit dies.
5. The apparatus according to claim 4 , wherein:
the layer surface of the first molding layer is a first layer surface;
the die surface of the first integrated circuit die is a first die surface thereof;
the dies surfaces of the at least second and third integrated circuit dies are respective first die surfaces thereof;
a second layer surface of the first molding layer opposite the first layer surface thereof is surfaced down to at least a second die surface of the first integrated circuit die opposite the first die surface thereof; and
a layer surface of the second molding layer is surfaced down to second die surfaces respectively of the at least second and third integrated circuit dies opposite the first die surfaces thereof.
6. The apparatus according to claim 1 , wherein:
the layer surface of the first molding layer is a first layer surface; and
the redistribution layer is a first redistribution layer;
the apparatus further comprising:
a compliant layer on a second layer surface of the molding layer opposite the first layer surface;
through-mold vias extending through the compliant layer and the first molding layer to the first redistribution layer; and
an interconnect structure configured to provide an electrical interface from upper ends of the through-mold vias to lower ends thereof interconnected to the first redistribution layer, the interconnect structure being a package substrate or a second redistribution layer.
7. The apparatus according to claim 1 , wherein the layer surface of the molding layer is a first layer surface, the apparatus further comprising a second layer surface of the first molding layer opposite the first layer surface thereof and opposite the die surface of the first integrated circuit die surfaced down to a back-end of line stack of the first integrated circuit die.
8. An apparatus for a microelectronic device, comprising:
a first integrated circuit die having first contacts on a first die surface thereof in a first molding layer of a reconstituted wafer having a wafer surface including a first layer surface of the first molding layer and the first die surface of the first integrated circuit die;
a redistribution layer on the wafer surface including electrically conductive layers and dielectric layers to provide conductive routing and conductors, the conductors extending away from the first die surface of the first integrated circuit die and respectively coupled to the first contacts at bottom ends of the conductors;
at least second and third integrated circuit dies respectively having second contacts on first die surfaces thereof interconnected to the first integrated circuit die through the conductors of the redistribution layer;
a first portion of the second contacts of each of the at least second and third integrated circuit dies interconnected to top ends of the conductors opposite the bottom ends thereof, the top ends of the conductors in part for alignment of the at least second and third integrated circuit dies to the first integrated circuit die located below the redistribution layer;
a second portion of the second contacts interconnected to one another through the conductive routing;
a second molding layer located on the at least second and third integrated circuit dies and in a space therebetween and further on the redistribution layer for unitization of the reconstituted wafer with the first integrated circuit die, the redistribution layer, and the at least second and third integrated circuit dies;
a second layer surface of the first molding layer opposite the first layer surface thereof is surfaced down to at least a second die surface of the first integrated circuit die opposite the first die surface thereof; and
a layer surface of the second molding layer is surfaced down to second die surfaces respectively of the at least second and third integrated circuit dies opposite the first dies surfaces thereof.
9. An apparatus for a microelectronic device, comprising:
a first integrated circuit die having first contacts on a first die surface thereof in a first molding layer of a reconstituted wafer having a wafer surface including a first layer surface of the first molding layer and the first die surface of the first integrated circuit die;
a redistribution layer on the wafer surface including electrically conductive layers and dielectric layers to provide conductive routing and conductors, the conductors extending away from the first die surface of the first integrated circuit die and respectively coupled to the first contacts at bottom ends of the conductors;
at least second and third integrated circuit dies respectively having second contacts on first die surfaces thereof interconnected to the first integrated circuit die through the conductors of the redistribution layer;
a first portion of the second contacts of each of the at least second and third integrated circuit dies interconnected to top ends of the conductors opposite the bottom ends thereof, the top ends of the conductors in part for alignment of the at least second and third integrated circuit dies to the first integrated circuit die located below the redistribution layer;
a second portion of the second contacts interconnected to one another through the conductive routing;
a second molding layer located on the at least second and third integrated circuit dies and in a space therebetween and further on a portion of the first layer surface of the first molding layer for unitization of the reconstituted wafer with the first integrated circuit die, the redistribution layer, and the at least second and third integrated circuit dies;
a second layer surface of the first molding layer opposite the first layer surface thereof is surfaced down to at least a second die surface of the first integrated circuit die opposite the first die surface thereof; and
a layer surface of the second molding layer is surfaced down to second die surfaces respectively of the at least second and third integrated circuit dies opposite the first dies surfaces thereof.