Semiconductor structure for preventing row hammering issue in DRAM cell and method for manufacturing the same
A semiconductor structure for preventing row hammering issue in DRAM cell is provided in the present invention. The structure includes a trench with a gate dielectric, an n-type work function metal layer, a TiN layer conformally formed within, and a buried word line filled in the trench.
1. A semiconductor structure for preventing row hammering issue in DRAM cell, comprising:
a substrate;
a plurality of trenches comprising a first trench and a second trench;
a gate dielectric conformally disposed on said trenches, respectively;
a work function metal layer conformally on and directly contacting said gate dielectric;
a shallow trench isolation, said shallow trench isolation includes an upper portion and a lower portion, said lower portion is disposed on said first trench, and said upper portion is disposed on said lower portion; and
a plurality of buried word lines, each buried word line of said buried word lines disposed on said work function metal layer, respectively;
wherein said first trench is deeper than said second trench, said work function metal layer comprises materials of titanium and titanium nitride, and a ratio of said titanium nitride to said titanium in said work function metal layer gradually increases from a side of said work function metal layer adjacent to said gate dielectric to another side of said work function metal layer adjacent to said each buried word line; said lower portion of said shallow trench isolation directly contacts and covers around entire perimeter surface of said first trench, said upper portion of said shallow trench isolation has a top surface being higher than a bottom surface of said second trench, and has a different material composition from said lower portion of said shallow trench isolation, a thickness of said lower portion is thicker at bottom than at sidewalls thereof, and said top surface of said upper portion of said shallow trench isolation has a convexly-curved shape; said gate dielectric being conformally disposed on said lower portion and said upper portion of said shallow trench isolation in said first trench, and an entire top surface of said buried word line is flat.
2. The semiconductor structure for preventing row hammering issue in DRAM cell of claim 1 , wherein a width of said lower portion of said shallow trench isolation is same as a width of said first trench.
3. The semiconductor structure for preventing row hammering issue in DRAM cell of claim 1 , further comprising a hard mask on said buried word line.
4. The semiconductor structure for preventing row hammering issue in DRAM cell of claim 3 , wherein a material of said hard mask is silicon nitride.
5. The semiconductor structure for preventing row hammering issue in DRAM cell of claim 1 , wherein said work function metal layer is an n-type work function metal layer.
6. The semiconductor structure for preventing row hammering issue in DRAM cell of claim 1 , wherein a material of said gate dielectric is chosen from HfO 2 , HfSiO 4 , HfSiON, Al 2 O 3 , La 2 O 3 , Ta 2 O 5 , Y 2 O 3 , ZrO 2 , SrTiO 3 , ZrSiO 4 , HfZrO 4 , SrBi 2 Ta 2 O 9 (SBT), PbZr x Ti 1-x O 3 (PZT), Ba x Sr 1-x TiO 3 (BST), or any combination thereof.
7. The semiconductor structure for preventing row hammering issue in DRAM cell of claim 1 , wherein a material of said buried word line is chosen from Cu, Al, W, TiAl, CoWP, or any combination thereof.