Die-attach method to compensate for thermal expansion
In sonic examples, a method includes pre-stressing a flange, heating the flange to a die-attach temperature, and attaching a die to the flange at the die-attach temperature using a die-attach material. In some examples, the flange includes a metal material, the die-attach temperature may be at least two hundred degrees Celsius, and the die-attach material may include solder and/or an adhesive. In some examples, the method includes cooling the semiconductor die and metal flange to a room temperature after attaching the semiconductor die to the metal flange at the die-attach temperature using a die-attach material.
1. A method comprising:
pre-stressing a flange that is not attached to any die;
heating the flange to a die-attach temperature; and
attaching a die to the pre-stressed flange at the die-attach temperature using a die-attach material, wherein the pre-stressing of the flange is maintained during attaching the die to the pre-stressed flange.
2. The method of claim 1 , wherein pre-stressing the flange comprises clamping the flange in a first direction.
3. The method of claim 2 , wherein clamping the flange comprises hindering expansion of the flange in the first direction.
4. The method of claim 1 , wherein pre-stressing the flange comprises positioning the flange in a fixture.
5. The method of claim 4 , wherein positioning the flange in the fixture comprises positioning the flange in a fixture that hinders expansion of the flange in a first direction and in a second direction.
6. The method of claim 1 , further comprising cooling the die and pre-stressed flange to a room temperature after attaching the die to the pre-stressed flange at the die-attach temperature using a die-attach material.
7. The method of claim 1 ,
wherein pre-stressing the flange comprises pre-stressing a copper flange; and
wherein attaching the die comprises attaching a semiconductor die to the pre-stressed flange at the die-attach temperature using the die-attach material.
8. The method of claim 1 ,
wherein heating the flange to the die-attach temperature comprises heating the flange to at least two hundred degrees Celsius; and
wherein attaching the die to the pre-stressed flange at the die-attach temperature using the die-attach material comprises attaching the die to the pre-stressed flange at least two hundred degrees Celsius using the die-attach material.
9. The method of claim 1 , wherein attaching the die to the pre-stressed flange at the die-attach temperature using the die-attach material comprises attaching the die to the pre-stressed flange at the die-attach temperature using solder or an adhesive.
10. The method of claim 1 ,
wherein pre-stressing the flange comprises pre-stressing the flange while heating the flange to the die-attach temperature, and
wherein heating the flange to the die-attach temperature while pre-stressing the flange comprises pre-stressing the flange.
11. The method of claim 1 , wherein the pre-stressing is maintained during attaching the die to the pre-stressed flange to compensate for stress between the die and the flange during attaching the die to the pre-stressed flange.
12. The method of claim 1 , wherein the die comprises gallium nitride material.
13. The method of claim 1 , wherein the die comprises silicon carbide material.
14. A device comprising a die, die-attach material, and a flange, wherein the device is prepared by a process comprising the steps of:
pre-stressing the flange that is not attached to any die;
heating the flange to a die-attach temperature; and
attaching the die to the pre-stressed flange at the die-attach temperature using the die- attach material, wherein the pre-stressing is maintained during attaching the die to the pre- stressed flange.
15. The device of claim 14 , wherein pre-stressing the flange comprises positioning the flange in a fixture.
16. The device of claim 14 ,
wherein pre-stressing the flange comprises pre-stressing a copper flange; and
wherein attaching the die comprises attaching a semiconductor die to the pre-stressed flange at the die-attach temperature using the die-attach material.
17. The device of claim 14 ,
wherein pre-stressing the flange comprises pre-stressing the flange while heating the flange to the die-attach temperature, and
wherein heating the flange to the die-attach temperature while pre-stressing the flange comprises pre-stressing the flange.
18. A method comprising:
pre-stressing a metal flange that is not attached to any semiconductor die;
heating the metal flange to a die-attach temperature of at least two hundred degrees Celsius;
attaching a semiconductor die to the pre-stressed metal flange at the die-attach temperature using solder or an adhesive, wherein the pre-stressing of the metal flange is maintained during attaching the semiconductor die to the pre-stressed metal flange; and
cooling the semiconductor die and pre-stressed metal flange to a room temperature after attaching the semiconductor die to the pre-stressed metal flange at the die-attach temperature using the solder or adhesive.
19. The method of claim 18 , wherein pre-stressing the metal flange comprises clamping the metal flange in a first direction to hinder expansion of the metal flange in the first direction.
20. The method of claim 18 , wherein pre-stressing the metal flange comprises positioning the metal flange in a fixture.