Contact structure and formation thereof
A semiconductor device and methods of formation are provided. A semiconductor device includes an annealed cobalt plug over a silicide in a first opening of the semiconductor device, wherein the annealed cobalt plug has a repaired lattice structure. The annealed cobalt plug is formed by annealing a cobalt plug at a first temperature for a first duration, while exposing the cobalt plug to a first gas. The repaired lattice structure of the annealed cobalt plug is more regular or homogenized as compared to a cobalt plug that is not so annealed, such that the annealed cobalt plug has a relatively increased conductivity or reduced resistivity.
1. A semiconductor device, comprising:
a silicide;
a metal layer;
a first dielectric layer overlying the silicide, wherein:
a trench is defined by the first dielectric layer, and
a width of the trench is less than a width of the silicide;
a glue layer in the trench and in contact with a surface of the first dielectric layer and a first surface of the silicide, wherein the metal layer is spaced apart from the glue layer by the first dielectric layer; and
a cobalt plug in the trench and over the silicide, wherein the glue layer is between the silicide and the cobalt plug.
2. The semiconductor device of claim 1 , wherein:
the first dielectric layer comprises a first portion on a first side of the trench and a second portion on a second side of the trench, and
the glue layer extends from a surface of the first portion of the first dielectric layer to a surface of the second portion of the first dielectric layer.
3. The semiconductor device of claim 2 , wherein the cobalt plug is disposed between the first portion of the first dielectric layer and the second portion of the first dielectric layer.
4. The semiconductor device of claim 1 , wherein the cobalt plug is in contact with a surface of the glue layer.
5. The semiconductor device of claim 1 , wherein the glue layer is a titanium nitride layer.
6. The semiconductor device of claim 1 , comprising:
a second dielectric layer, wherein the second dielectric layer is spaced apart from the first dielectric layer by the metal layer.
7. The semiconductor device of claim 6 , wherein the metal layer is in contact with a second surface of the silicide.
8. The semiconductor device of claim 7 , wherein the first surface of the silicide and the second surface of the silicide are a same surface.
9. The semiconductor device of claim 1 , wherein a sidewall of the silicide is in contact with a substrate disposed under the silicide.
10. The semiconductor device of claim 1 , wherein the glue layer has a homogenous composition.
11. The semiconductor device of claim 1 , comprising:
a second dielectric layer, wherein a sidewall of the second dielectric layer is spaced apart from a sidewall of the first dielectric layer by the metal layer.
12. The semiconductor device of claim 11 , wherein a top surface of the second dielectric layer is spaced apart from a bottom surface of the first dielectric layer by the metal layer.
13. A semiconductor device, comprising:
a silicide;
a first dielectric layer;
a metal layer in contact with the first dielectric layer and the silicide;
a glue layer in contact with the silicide;
a second dielectric layer between the metal layer and the glue layer; and
a cobalt plug over the silicide, wherein the glue layer is between the silicide and the cobalt plug.
14. The semiconductor device of claim 13 , wherein the metal layer is between the first dielectric layer and the glue layer.
15. The semiconductor device of claim 13 , wherein the glue layer is a titanium nitride layer.
16. The semiconductor device of claim 13 , wherein:
the second dielectric layer comprises a first portion and a second portion, and
the glue layer extends from a surface of the first portion of the second dielectric layer to a surface of the second portion of the second dielectric layer.
17. The semiconductor device of claim 13 , wherein the cobalt plug is in contact with the glue layer.
18. The semiconductor device of claim 13 , wherein the glue layer is between the cobalt plug and the second dielectric layer.
19. A semiconductor device, comprising:
a silicide;
a metal layer;
a first dielectric layer;
a glue layer in contact with the silicide, wherein the first dielectric layer is between the metal layer and the glue layer; and
a cobalt plug over the silicide, wherein the glue layer is between the silicide and the cobalt plug and between the first dielectric layer and the cobalt plug.
20. The semiconductor device of claim 19 , wherein the metal layer is in contact with the silicide.