Non-volatile semiconductor memory device and manufacturing method thereof
This non-volatile semiconductor memory device includes a memory cell array including NAND cell units formed in a first direction vertical to a surface of a semiconductor substrate. A local source line is electrically coupled to one end of the NAND cell unit formed on the surface of the substrate. The memory cell array includes: a laminated body where plural conductive films, which are to be control gate lines of memory cells or selection gate lines of selection transistors, are laminated sandwiching interlayer insulating films; a semiconductor layer that extends in the first direction; and an electric charge accumulating layer sandwiched between: the semiconductor layer and the conductive film. The local source line includes a silicide layer. The electric charge accumulating layer is continuously formed from the memory cell array to cover a peripheral area of the silicide layer.
1. A semiconductor memory device, comprising:
a substrate;
a plurality of electrode layers separately stacked in a first direction, the first direction crossing a surface of the substrate;
a semiconductor body extending in the first direction,
a memory portion provided between the semiconductor body and one of the plurality of electrode layers;
a conductive layer provided between the substrate and the plurality of electrode layers, the conductive layer being electrically connected to the semiconductor body; and
a source contact electrode extending in the first direction and connected to the conductive layer,
wherein the conductive layer includes a first film and a second film,
the first film is provided between the substrate and the second film,
the first film is directly connected to the second film, and
the first film includes silicon and metal.
2. The semiconductor memory device according to claim 1 , wherein the first film includes silicide of the silicon and the metal.
3. The semiconductor memory device according to claim 1 , wherein the second film includes silicon.
4. The semiconductor memory device according to claim 3 , wherein the second film further includes at least one impurity.
5. The semiconductor memory device according to claim 1 , wherein the conductive layer extends in a second direction, the second direction crossing the first direction.
6. The semiconductor memory device according to claim 5 , wherein the semiconductor body includes an end portion connected to the conductive layer, and
the source contact electrode includes an end portion connected to the conductive layer.
7. The semiconductor memory device according to claim 6 , wherein the end portion of the semiconductor body is connected to the second film.
8. The semiconductor memory device according to claim 6 , wherein the end portion of the source contact is connected to the first film.
9. A semiconductor memory device, comprising:
a substrate;
a plurality of electrode layers separately stacked in a first direction, the first direction crossing a surface of the substrate;
a semiconductor body extending in the first direction,
a memory portion provided between the semiconductor body and one of the plurality of electrode layers;
a conductive layer including silicon, the conductive layer being provided between the substrate and the plurality of electrode layers, the conductive layer being connected to the semiconductor body, the conductive layer extending in a second direction, the second direction crossing the first direction; and
a source contact electrode extending in the first direction and being connected to the conductive layer,
wherein the conductive layer includes a first portion and a second portion,
the first portion is provided between the substrate and the second portion, and
the first portion includes metal in addition to silicon.
10. The semiconductor memory device according to claim 9 , wherein the first portion includes silicide of the silicon and the metal.
11. The semiconductor memory device according to claim 9 , wherein the second portion further includes at least one impurity.
12. The semiconductor memory device according to claim 9 , wherein the semiconductor body includes an end portion connected to the conductive layer, and
the source contact electrode includes an end portion connected to the conductive layer.
13. The semiconductor memory device according to claim 12 , wherein the end portion of the semiconductor body is connected to the second portion of the conductive layer.
14. The semiconductor memory device according to claim 12 , wherein the end portion of the source contact is connected to the first portion of the conductive layer.