IP Library Granted Patent US 10,388,864
Granted Patent B2
US 10,388,864 · App. 15/684,081 · Granted Aug 20, 2019

Transistors and methods of forming transistors

Inventors: Kamal M. Karda (Boise, ID); Gurtej S. Sandhu (Boise, ID); Chandra Mouli (Boise, ID)
Assignee: Micron Technology, Inc.
H01L45/1206H01L21/02532H01L23/535H01L27/115H01L27/228H01L27/2454H01L29/12H01L29/267H01L29/66666H01L29/66969H01L29/66977H01L29/7827H01L29/78618H01L29/78642H01L29/78681H01L29/78696H01L43/02H01L43/10H01L45/142H01L45/143H01L21/02568
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 10,388,864
App. No.
15/684,081
Granted
Aug 20, 2019
Kind
B2
Abstract

Some embodiments include a transistor having a drain region and a source region. A conductive gate is between the source and drain regions. First channel material is between the gate and the source region. The first channel material is spaced from the gate by one or more insulative materials. Second channel material is between the first channel material and the source region, and directly contacts the source region. The first and second channel materials are transition metal chalcogenide. One of the source and drain regions is a hole reservoir region and the other is an electron reservoir region. Tunnel dielectric material may be between the first and second channel materials.

Claims (31)

1. A transistor comprising:

a source region and a drain region;

a channel material between the source and drain regions, with said channel material comprising molybdenum and sulfur; and

wherein the channel material is spaced from the drain region by an interconnecting region, and wherein said interconnecting region comprises one or both of silicon and germanium.

2. The transistor of claim 1 wherein the interconnecting region comprises germanium and has no more than 1×10 14 atoms/cm 3 of conductivity-enhancing impurity therein.

3. A transistor comprising:

a source region and a drain region;

a pair of channel regions between the source and drain regions; and

one channel region of said pair of channel regions comprising molybdenum and sulfur; the other channel region of said pair of channel regions comprising tungsten and selenium.

4. The transistor of claim 3 wherein said other channel region directly contacts the drain region.

5. The transistor of claim 3 wherein said other channel region is spaced from the drain region by an interconnecting region.

6. The transistor of claim 5 wherein the interconnecting region comprises semiconductor material.

7. The transistor of claim 5 wherein the interconnecting region comprises germanium and has no more than 1×10 14 atoms/cm 3 of conductivity-enhancing impurity therein.

8. The transistor of claim 3 wherein said one channel region comprises MoS 2 .

9. The transistor of claim 3 wherein said other channel region comprises WSe 2 .

10. The transistor of claim 3 wherein said one channel region comprises MoS 2 , and wherein said other channel region comprises WSe 2 .

11. A transistor comprising:

a source region and a drain region;

a gate between the source and drain regions;

first channel material between the gate and the source region; the first channel material being spaced from the gate by gate dielectric material;

second channel material between the first channel material and the source region, the second channel material being spaced from the first channel material by tunnel dielectric material, the tunnel dielectric material comprising one or more of hafnium oxide, aluminum oxide, zirconium oxide and silicon oxide; and

wherein the first and second channel materials are different from one another; with one of the first and second channel materials comprising sulfur, and the other of the first and second channel materials comprising selenium.

12. The transistor of claim 11 wherein said one of the first and second channel materials comprises molybdenum.

13. The transistor of claim 11 wherein said other of the first and second channel materials comprises tungsten.

14. The transistor of claim 11 wherein said one of the first and second channel materials comprises molybdenum and said other of the first and second channel materials comprises tungsten.

15. The transistor of claim 14 wherein said one of the first and second channel materials is the first channel material.

16. The transistor of claim 14 wherein said one of the first and second channel materials is the second channel material.

17. The transistor of claim 11 wherein the source and drain regions are an electron reservoir region and a hole reservoir region, respectively.

18. The transistor of claim 11 wherein the tunnel dielectric material comprises one or more oxides.

19. The transistor of claim 11 wherein the first channel material directly contacts the drain region.

20. The transistor of claim 11 wherein the first channel material does not directly contact the drain region.

Assignments (6)
RELEASE OF SECURITY INTEREST Recorded Nov 12, 2019
From: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
Reel/Frame 051028/0001 →
RELEASE OF SECURITY INTEREST Recorded Oct 10, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 050709/0838 →
RELEASE OF SECURITY INTEREST Recorded Jul 20, 2018
From: U.S. BANK NATIONAL ASSOCIATION, AS AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 046597/0333 →
SECURITY INTEREST Recorded Jul 13, 2018
From: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 047540/0001 →
SUPPLEMENT NO. 6 TO PATENT SECURITY AGREEMENT Recorded Nov 1, 2017
From: MICRON TECHNOLOGY, INC.
To: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 044348/0253 →
SUPPLEMENT NO. 6 TO PATENT SECURITY AGREEMENT Recorded Nov 1, 2017
From: MICRON TECHNOLOGY, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
Reel/Frame 044653/0333 →
Continuity (4)
Continuation 15385605 · Dec 20, 2016
Continuation 15003679 · Jan 21, 2016
Continuation 14516396 · Oct 16, 2014
Related Publication 20170373247A1 · Dec 28, 2017