IP Library Granted Patent US 9,773,976
Granted Patent B2
US 9,773,976 · App. 15/385,605 · Granted Sep 26, 2017

Transistors and methods of forming transistors

Inventors: Kamal M. Karda (Boise, ID); Gurtej S. Sandhu (Boise, ID)
Assignee: Micron Technology, Inc.
H01L45/1206H01L23/535H01L27/228H01L27/2454H01L43/02H01L43/10H01L45/142H01L45/143
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Quick Facts
Patent No.
US 9,773,976
App. No.
15/385,605
Granted
Sep 26, 2017
Kind
B2
Abstract

Some embodiments include a transistor having a drain region and a source region. A conductive gate is between the source and drain regions. First channel material is between the gate and the source region. The first channel material is spaced from the gate by one or more insulative materials. Second channel material is between the first channel material and the source region, and directly contacts the source region. The first and second channel materials are transition metal chalcogenide. One of the source and drain regions is a hole reservoir region and the other is an electron reservoir region. Tunnel dielectric material may be between the first and second channel materials.

Claims (65)

1. A transistor comprising:

a source region and a drain region; one of the source and drain regions being a hole reservoir region and the other being an electron reservoir region;

a gate between the source and drain regions;

first channel material between the gate and the source region; the first channel material being spaced from the gate by gate dielectric material; the gate dielectric material comprising silicon dioxide;

second channel material between the first channel material and the source region, the second channel material being spaced from the first channel material by tunnel dielectric material; and

wherein the first and second channel materials are transition metal dichalcogenide and/or transition metal trichalcogenide, and are different compositions relative to one another.

2. The transistor of claim 1 wherein the source and drain regions are the hole reservoir region and the electron reservoir region, respectively.

3. The transistor of claim 1 wherein the source and drain regions are the electron reservoir region and the hole reservoir region, respectively.

4. The transistor of claim 1 wherein the tunnel dielectric material comprises one or more oxides.

5. The transistor of claim 1 wherein the first channel material directly contacts the drain region.

6. The transistor of claim 1 wherein the first channel material does not directly contact the drain region.

7. The transistor of claim 1 wherein one of the first and second channel materials comprises a sulfide and the other comprises a selenide.

8. The transistor of claim 1 wherein one of the first and second channel materials comprises molybdenum sulfide and the other comprises tungsten selenide.

9. A transistor comprising:

a source region and a drain region; one of the source and drain regions being a hole reservoir region and the other being an electron reservoir region;

a gate between the source and drain regions;

first channel material between the gate and the source region; the first channel material being spaced from the gate by gate dielectric material;

second channel material between the first channel material and the source region, the second channel material being spaced from the first channel material by tunnel dielectric material;

wherein the first channel material does not directly contact the drain region; and

wherein an interconnect material extends from the drain region to the first channel material, the interconnect material comprising semiconductor material.

10. The transistor of claim 9 wherein the first and second channel materials are different compositions relative to one another.

11. The transistor of claim 9 wherein the first and second channel materials are transition metal dichalcogenide and/or transition metal trichalcogenide, and are different compositions relative to one another.

12. The transistor of claim 9 wherein the interconnect material comprises one or both of silicon and germanium; and wherein the interconnect material has no more than 1×10 14 atoms/cm 3 of conductivity-enhancing impurity therein.

13. The transistor of claim 12 wherein the interconnect material comprises silicon.

14. The transistor of claim 12 wherein the interconnect material comprises germanium.

15. The transistor of claim 12 wherein the interconnect material comprises silicon and germanium.

16. A memory array, comprising:

a plurality of transistors; each of the transistors comprising:

a source region spaced from a drain region; the source being a hole reservoir region and the drain region being an electron reservoir region;

a gate between the source and drain regions;

first channel material between the gate and the source region; the first channel material being spaced from the gate by gate dielectric material;

second channel material between the first channel material and the source region, the second channel material being spaced from the first channel material by tunnel dielectric material; and

the first and second channel materials being transition metal dichalcogenide and/or transition metal trichalcogenide, and being different compositions relative to one another; and

memory cells coupled with the source regions of each of the transistors.

17. The memory array of claim 16 wherein the memory cells are phase change memory cells.

18. The memory array of claim 16 wherein the memory cells are RRAM cells.

19. The memory array of claim 16 wherein the memory cells are magnetic RAM cells.

20. The memory array of claim 16 wherein the memory cells are conductive bridging RAM cells.

21. The memory array of claim 16 wherein the second channel material of each of the transistors is directly against the source region of each of the transistors.

22. The memory array of claim 16 wherein the first channel material of each of the transistors directly contacts the drain region of each of the transistors.

23. The memory array of claim 16 wherein the first channel material of each of the transistors does not directly contact the drain region each of the transistors.

24. The memory array of claim 23 wherein of each of the transistors includes an interconnect material which extends from the drain region of each of the transistors to the first channel material of each of the transistors; wherein the interconnect material comprises semiconductor material.

25. The memory array of claim 24 wherein the interconnect material of each of the transistors comprises one or both of silicon and germanium; and wherein the interconnect material of each of the transistors has no more than 1×10 14 atoms/cm 3 of conductivity-enhancing impurity therein.

26. The memory array of claim 25 wherein the interconnect material of each of the transistors comprises silicon.

27. The memory array of claim 25 wherein the interconnect material of each of the transistors comprises germanium.

28. The memory array of claim 25 wherein the interconnect material of each of the transistors comprises silicon and germanium.

29. The memory array of claim 25 being a first memory array within a first tier of a three-dimensional architecture; and wherein the three-dimensional architecture includes a second tier over said first tier; the second tier having a second memory array.

30. A memory array, comprising:

a plurality of transistors; each of the transistors comprising:

a source region spaced from a drain region; the source being a hole reservoir region and the drain region being an electron reservoir region;

a gate between the source and drain regions;

first channel material between the gate and the source region; the first channel material being spaced from the gate by gate dielectric material;

second channel material between the first channel material and the source region, the second channel material being spaced from the first channel material by tunnel dielectric material; and

the first and second channel materials being transition metal dichalcogenide and/or transition metal trichalcogenide, and being different compositions relative to one another; and

charge-storage devices coupled with the source regions of each of the transistors.

31. The memory array of claim 30 wherein the charge-storage devices are capacitors.

32. The memory array of claim 30 wherein the second channel material of each of the transistors is directly against the source region of each of the transistors.

33. The memory array of claim 30 wherein the first channel material of each of the transistors directly contacts the drain region of each of the transistors.

34. The memory array of claim 30 wherein the first channel material of each of the transistors does not directly contact the drain region of each of the transistors.

35. The memory array of claim 34 wherein an interconnect material extends from the drain region of each of the transistors to the first channel material of each of the transistors; wherein the interconnect material of each of the transistors comprises semiconductor material.

36. The memory array of claim 35 wherein the interconnect material of each of the transistors comprises one or both of silicon and germanium; and wherein the interconnect material of each of the transistors has no more than 1×10 14 atoms/cm 3 of conductivity-enhancing impurity therein.

37. The memory array of claim 36 wherein the interconnect material of each of the transistors comprises silicon.

38. The memory array of claim 36 wherein the interconnect material of each of the transistors comprises germanium.

39. The memory array of claim 36 wherein the interconnect material of each of the transistors comprises silicon and germanium.

40. The memory array of claim 30 being a first memory array within a first tier of a three-dimensional architecture; and wherein the three-dimensional architecture includes a second tier over said first tier; the second tier having a second memory array.

Assignments (4)
RELEASE OF SECURITY INTEREST Recorded Nov 12, 2019
From: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
Reel/Frame 051028/0001 →
RELEASE OF SECURITY INTEREST Recorded Oct 9, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 050695/0825 →
SECURITY INTEREST Recorded Jul 13, 2018
From: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 047540/0001 →
SUPPLEMENT NO. 3 TO PATENT SECURITY AGREEMENT Recorded Feb 10, 2017
From: MICRON TECHNOLOGY, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 041675/0105 →
Continuity (3)
Continuation 15003679 · Jan 21, 2016
Continuation 14516396 · Oct 16, 2014
Related Publication 20170104155A1 · Apr 13, 2017