Three dimensional semiconductor memory device in which a channel layer has a stacked structure including an outer semiconductor layer and a doped inner semiconductor layer

1. A semiconductor memory device comprising:

a stacked body in which insulating layers and electrode films are alternately stacked;

a pillar member arranged in a memory hole that is disposed in the stacked body in a thickness direction; and

a semiconductor layer provided below the pillar member, wherein

the pillar member has a structure in which a memory film and a channel layer are stacked in order from a side of the stacked body,

the channel layer has a stacked structure that includes an outer channel semiconductor layer, an intermediate layer made of an insulating material, and an inner channel semiconductor layer, from a side of the memory film, and both of the outer channel semiconductor layer and the inner channel semiconductor layer are electrically connected to the semiconductor layer, and

the inner channel semiconductor layer is doped with an impurity.

2. The semiconductor memory device according to claim 1 , wherein the outer channel semiconductor layer has a thickness larger than zero and equal to or smaller than 0.5T, where T denotes a thickness of the channel layer.

3. The semiconductor memory device according to claim 1 , wherein the impurity has a concentration lower than an inversion layer concentration of the outer channel semiconductor layer.

4. The semiconductor memory device according to claim 1 , wherein the impurity has a concentration of 1×10 18 cm −3 or less.

5. The semiconductor memory device according to claim 1 , wherein the impurity is an N-type impurity.

6. The semiconductor memory device according to claim 5 , wherein the N-type impurity is P or As.

7. The semiconductor memory device according to claim 6 , wherein the outer channel semiconductor layer is not doped with the N-type impurity.

8. The semiconductor memory device according to claim 1 , wherein the intermediate layer is made of an insulating material having a relative dielectric constant lower than 3.9.

9. The semiconductor memory device according to claim 8 , wherein the intermediate layer is made of fluorine-containing silicon oxide, carbon-containing silicon oxide, borazine-based polymer, porous SiO 2 , or air.

10. The semiconductor memory device according to claim 1 , wherein the memory film has a structure in which a block insulating film, a charge accumulation film, and a tunnel insulating film are stacked in order from the side of the stacked body.

11. The semiconductor memory device according to claim 10 , wherein the pillar member has a structure in which the channel layer, the tunnel insulating film, the charge accumulation film, and the block insulating film are stacked in order on a side surface of a pillar-shaped insulating layer.

12. A semiconductor memory device comprising:

a stacked body in which insulating layers and electrode films are alternately stacked;

a pillar member arranged in a memory hole that is disposed in the stacked body in a thickness direction; and

a semiconductor layer provided below the pillar member, wherein

the pillar member has a structure in which a memory film and a channel layer are stacked in order from a side of the stacked body,

the channel layer has a stacked structure that includes an outer channel semiconductor layer, an intermediate layer made of an insulating material, and an inner channel semiconductor layer, from a side of the memory film, and both of the outer channel semiconductor layer and the inner channel semiconductor layer are electrically connected to the semiconductor layer,

the intermediate layer is made of an insulating material having a relative dielectric constant lower than 3.9, and

the intermediate layer is made of fluorine-containing silicon oxide, carbon-containing silicon oxide, borazine-based polymer, porous SiO 2 , or air.