QE approach by double-side, multi absorption structure
The present disclosure relates to an integrated chip that has a light sensing element arranged within a substrate. An absorption enhancement structure is arranged along a back-side of the substrate, and an interconnect structure is arranged along a front-side of the substrate. A reflection structure includes a dielectric structure and a plurality of semiconductor pillars that matingly engage the dielectric structure. The dielectric structure and semiconductor pillars are arranged along the front-side of the substrate and are spaced between the light sensing element and the interconnect structure. The plurality of semiconductor pillars and the dielectric structure are collectively configured to reflect incident light that has passed through the absorption enhancement structure and through the light sensing element back towards the light sensing element before the incident light strikes the interconnect structure.
1. A method of forming an image sensor integrated chip, comprising:
performing a first etching process on a first side of a substrate to define a plurality of protrusions along the first side of the substrate;
forming a first dielectric material to engage the protrusions and establish an absorption enhancement structure along the first side of the substrate;
performing a second etching process on a second side of the substrate to define a plurality of semiconductor pillars along the second side of the substrate;
forming a material, which has a refractive index that differs from a refractive index of the substrate, surrounding the plurality of semiconductor pillars to establish a reflective structure; and
forming a light sensing element in the substrate between the first side of the substrate and the second side of the substrate.
2. The method of claim 1 , wherein forming of the material comprises depositing or growing a second dielectric material to contact sidewalls of the plurality of semiconductor pillars to establish the reflective structure.
3. The method of claim 2 , further comprising:
planarizing a surface of the second dielectric material; and
forming an interconnect structure along the planarized surface of the second dielectric material, the interconnect structure including a plurality of metal lines disposed in an interconnect dielectric structure.
4. The method of claim 1 , further comprising:
forming an antireflective coating lining sidewalls of the plurality of protrusions.
5. The method of claim 1 , further comprising:
forming a color filter element over the absorption enhancement structure; and
forming a microlens structure over the color filter element.
6. The method of claim 1 , wherein each of the plurality of protrusions is cone-shaped or pyramid shaped, and wherein each of the plurality of semiconductor pillars is cone-frustum shaped or pyramid-frustum shaped.
7. A method of forming an image sensor integrated chip, comprising:
forming an absorption enhancement structure along a back-side of a semiconductor substrate;
forming a light sensing element in the semiconductor substrate between a front-side of the semiconductor substrate and the back-side of the semiconductor substrate;
performing a first etching process on the front-side of the semiconductor substrate to leave a plurality of semiconductor pillars extending outward from a depressed portion of the front-side of the substrate;
forming a first dielectric material, which has a refractive index that differs from a refractive index of the semiconductor substrate, along the depressed portion of the front-side of the substrate to surround each of the plurality of semiconductor pillars and thereby establish a reflective structure;
planarizing a surface of the first dielectric material;
forming an interconnect structure along the planarized surface of the first dielectric material, the interconnect structure including a plurality of metal lines disposed in an interconnect dielectric structure;
forming a color filter element along the back-side of the semiconductor substrate;
forming a microlens structure adjacent to the color filter element, the microlens structure being spaced apart from the reflective structure by the color filter element;
prior to forming the color filter element and the microlens structure, performing a second etching process on the back-side of the semiconductor substrate to define a plurality of protrusions along the back-side of the semiconductor substrate; and
forming a second dielectric material to engage the plurality of protrusions and establish the absorption enhancement structure along the back-side of the semiconductor substrate.
8. The method of claim 7 , further comprising:
forming an antireflective coating lining inner sidewalls and bottom surface of a trench structure and lining a plurality of protrusions.
9. The method of claim 7 , wherein each of the plurality of protrusions is cone-shaped or pyramid shaped, and wherein each of the plurality of semiconductor pillars is cone-frustum shaped or pyramid-frustum shaped.
10. The method of claim 7 , wherein each of the semiconductor pillars is circular or has rounded corners as viewed from above and exhibit equal cross-sectional widths as one another and nearest neighbors of the semiconductor pillars exhibit equal spacing between neighboring sidewalls.
11. A method, comprising:
forming an absorption enhancement structure along a back-side of a substrate;
forming a reflection structure comprising a dielectric structure and a plurality of semiconductor pillars that matingly engage the dielectric structure, wherein the dielectric structure and semiconductor pillars are arranged along a front-side of the substrate;
forming a light sensing element arranged within the substrate between the absorption enhancement structure and the reflection structure; and
forming an interconnect structure arranged along the front-side of the substrate and spaced apart from the absorption enhancement structure by the light sensing element; and
wherein the plurality of semiconductor pillars and the dielectric structure are collectively configured to reflect incident light that has passed through the absorption enhancement structure and through the light sensing element back towards the light sensing element before the incident light strikes the interconnect structure.
12. The method of claim 11 , wherein the plurality of semiconductor pillars are each in a shape of a cone, frustum cone, pyramid, frustum pyramid, cylinder, cube, or box.
13. The method of claim 11 , wherein the plurality of semiconductor pillars are circular, square, or square-like with rounded corners, as viewed from above.
14. The method of claim 11 , wherein the absorption enhancement structure comprises a non-planar surface comprising a plurality of protrusions defining a plurality of depressions between adjacent protrusions.
15. The method of claim 14 , wherein each of the plurality of protrusions is cone shaped or pyramid shaped, and wherein each of the plurality of semiconductor pillars is cone-frustum shaped or pyramid-frustum shaped.
16. The method of claim 11 , wherein first and second semiconductor pillars of the plurality of semiconductor pillars are nearest neighbors to one another and each has a corresponding semiconductor pillar width as measured between their respective outer sidewalls.
17. The method of claim 16 , wherein the first and second semiconductor pillars are spaced apart by a trench spacing, and wherein the trench spacing between the first and second semiconductor pillars is the same as a trench spacing for all nearest neighbor semiconductor pillars under the light sensing element.
18. The method of claim 17 , wherein the semiconductor pillar width is approximately a factor of two larger than the trench spacing.
19. The method of claim 11 , wherein a cross-sectional width of a semiconductor pillar as measured at the front-side of the substrate is equal to a cross-sectional width of a bottommost surface of a depression, such that the semiconductor pillars and depressions are inverted relative to one another and have cross-sections that are congruous.