Imaging device
Provided is an imaging device including a substrate; a pixel array in which pixels are arranged in a two-dimensional manner on the substrate, each pixel including a photoelectric conversion unit that accumulates charges generated from an incident light, a charge holding unit that holds the charges transferred from the photoelectric conversion unit, and an amplification unit that receives the charges transferred from the charge holding unit; and a light-shielding portion arranged to cover at least the charge holding unit. The photoelectric conversion unit and the charge holding unit in each pixel are aligned in a first direction in a top view orthogonal to the substrate. The charge holding units of the neighboring pixels are aligned in a second direction intersecting the first direction in the top view. The light-shielding portion extends in the second direction and over the charge holding units, and covers a region between the charge holding units.
1. An imaging device comprising:
a substrate;
a pixel array in which a plurality of pixels are arranged in a two-dimensional manner on the substrate, wherein each of the pixels includes a photoelectric conversion unit configured to accumulate charges generated from an incident light, a charge holding unit configured to hold the charges transferred from the photoelectric conversion unit, and an amplification unit having an input node that receives the charges transferred from the charge holding unit; and
a light-shielding portion arranged to cover at least the charge holding unit,
wherein the photoelectric conversion unit and the charge holding unit included in one of the pixels are aligned in a first direction in a top view from a direction orthogonal to the substrate,
wherein a plurality of the charge holding units of the plurality of the pixels that are adjacent to each other are aligned in a second direction intersecting the first direction in the top view, and
wherein the light-shielding portion extends in the second direction and over the plurality of the charge holding units, and covers a region between the plurality of the charge holding units,
wherein each of the pixels further includes a plurality of contacts that connect electrodes provided to the substrate and a wiring layer formed above the substrate,
wherein the plurality of contacts are formed in a region between the plurality of the charge holding units aligned in the first direction in the top view, and
wherein the light-shielding portion includes a part extending in the first direction and provided between the photoelectric conversion unit and the plurality of contacts.
2. The imaging device according to claim 1 , wherein the wiring layer is arranged to cover the charge holding unit.
3. The imaging device according to claim 1 , wherein the light-shielding portion has first openings each formed in a region in which the photoelectric conversion unit is formed and second openings each formed in a region in which the plurality of contacts are formed in the top view.
4. The imaging device according to claim 3 , wherein the plurality of contacts included in one of the pixels are aggregated under corresponding one of the second openings.
5. The imaging device according to claim 1 ,
wherein an element isolation region that electrically isolate the photoelectric conversion unit and the charge holding unit from each other is arranged in the pixel array, and
wherein the element isolation region is formed of a material that restricts a light entering the charge holding unit.
6. The imaging device according to claim 5 , wherein the element isolation region is an impurity diffusion region forming PN junction isolation.
7. The imaging device according to claim 1 , wherein the pixel array is shaped in a rectangle having longer sides and shorter sides, and
wherein the second direction is parallel to the longer sides.
8. The imaging device according to claim 1 , wherein each of the pixels includes a plurality of the charge holding units, and
wherein the plurality of the charge holding units are arranged to be aligned in the second direction in the top view.
9. The imaging device according to claim 1 , wherein each of the pixels includes a plurality of the charge holding units, and
wherein the plurality of the charge holding units are arranged to be aligned in the first direction interposing the photoelectric conversion unit in the top view.
10. The imaging device according to claim 1 , wherein a readout circuit unit configured to read out charges generated in the photoelectric conversion unit as an electrical signal is arranged in a region between the plurality of the photoelectric conversion units aligned in the second direction in the top view.
11. The imaging device according to claim 1 , wherein the light-shielding portion is continuous from one end of the pixel array to another end of the pixel array to cover a plurality of the charge holding units that form a column in the second direction.
12. The imaging device according to claim 1 ,
wherein each of the pixels further includes a transistor comprising a gate electrode and transferring charges from the photoelectric conversion unit to the charge holding unit, and
wherein a gap of two of the charge holding units of the plurality of the charge holding units that are adjacent to each other in the top view is smaller than a width of the gate electrode of the transistor.
13. An imaging system comprising:
the imaging device according to claim 1 ; and
a signal processing unit configured to process a signal output from the pixels of the imaging device.
14. A mobile apparatus comprising:
the imaging device according to claim 1 ;
a distance information acquisition unit configured to acquire distance information of a distance to an object from parallax images based on a signal from the imaging device; and
a mobile apparatus control unit configured to control the mobile apparatus based on the distance information.
15. An imaging device comprising:
a substrate;
a pixel array in which a plurality of pixels are arranged in a two-dimensional manner on the substrate, wherein each of the pixels includes a photoelectric conversion unit configured to accumulate charges generated from an incident light, a charge holding unit configured to hold the charges transferred from the photoelectric conversion unit, and an amplification unit having an input node that receives the charges transferred from the charge holding unit; and
a light-shielding portion arranged to cover at least the charge holding unit,
wherein the photoelectric conversion unit and the charge holding unit included in one of the pixels are aligned in a first direction in a top view from a direction orthogonal to the substrate,
wherein a plurality of the charge holding units of the plurality of the pixels that are adjacent to each other are aligned in a second direction intersecting the first direction in the top view,
wherein the light-shielding portion extends in the second direction and over the plurality of the charge holding units, and covers a region between the plurality of the charge holding units,
wherein an element isolation region that electrically isolate the photoelectric conversion unit and the charge holding unit from each other is arranged in the pixel array,
wherein the element isolation region is formed of a material that restricts a light entering the charge holding unit, and
wherein the element isolation region is an impurity diffusion region forming PN junction isolation.
16. The imaging device according to claim 15 ,
wherein each of the pixels further includes a plurality of contacts that connect electrodes provided to the substrate and a wiring layer formed above the substrate,
wherein the plurality of contacts are formed in a region between the plurality of the charge holding units aligned in the first direction in the top view, and
wherein the light-shielding portion includes a part extending in the first direction and provided between the photoelectric conversion unit and the plurality of contacts.
17. The imaging device according to claim 15 , wherein the light-shielding portion has first openings each formed in a region in which the photoelectric conversion unit is formed and second openings each formed in a region in which the plurality of contacts are formed in the top view.
18. The imaging device according to claim 17 , wherein the plurality of contacts included in one of the pixels are aggregated under corresponding one of the second openings.
19. The imaging device according to claim 15 , wherein the pixel array is shaped in a rectangle having longer sides and shorter sides, and
wherein the second direction is parallel to the longer sides.