Photoelectric conversion apparatus and photoelectric conversion system
A photoelectric conversion apparatus includes a first semiconductor layer having a photoelectric conversion element, a second semiconductor layer including circuitry for processing a signal based on a charge obtained by the photoelectric conversion element, a first wiring structure electrically connected to the first semiconductor layer, a second wiring structure electrically connected to the second semiconductor layer, and a coupling part that couples the first wiring structure to the second wiring structure. In a plan view, the apparatus includes a pixel region having the photoelectric conversion element, and a peripheral region located between the pixel region and an outer edge of the photoelectric conversion apparatus. The first wiring structure includes, in the peripheral region, a first conductive part having a mesh-shaped part. The first conductive part is connected to a pad facing outside the photoelectric conversion apparatus.
1 . A photoelectric conversion apparatus, comprising:
a first semiconductor layer having a photoelectric conversion element;
a second semiconductor layer including circuitry for processing a signal based on a charge obtained by the photoelectric conversion element;
a first wiring structure electrically connected to the first semiconductor layer;
a second wiring structure electrically connected to the second semiconductor layer; and
a coupling part that couples the first wiring structure to the second wiring structure,
wherein in a plan view relative to a boundary between the first semiconductor layer and the first wiring structure, the photoelectric conversion apparatus includes:
a pixel region having the photoelectric conversion element; and
a peripheral region located between the pixel region and an outer edge of the photoelectric conversion apparatus, and
wherein the first wiring structure includes, in the peripheral region, a first conductive part having a mesh-shaped part, and
the first conductive part is connected to a pad facing outside the photoelectric conversion apparatus.
2 . The photoelectric conversion apparatus according to claim 1 ,
wherein the first wiring structure further includes, in the pixel region, a second conductive part having a mesh-shaped part.
3 . The photoelectric conversion apparatus according to claim 2 ,
wherein a pitch of a mesh in the first conductive part is greater than a pitch of a mesh in the second conductive part.
4 . The photoelectric conversion apparatus according to claim 2 ,
wherein the first conductive part and the second conductive part are included in a same wiring layer.
5 . The photoelectric conversion apparatus according to claim 2 ,
wherein the first wiring structure includes:
a first wiring layer having the first conductive part and the second conductive part; and
a second wiring layer,
wherein the second wiring layer further includes, in the pixel region, a third conductive part having a mesh-shaped part.
6 . The photoelectric conversion apparatus according to claim 5 ,
wherein a pitch of a mesh of the third conductive part is equal to a pitch of a mesh of the second conductive part.
7 . The photoelectric conversion apparatus according to claim 4 ,
wherein the first wiring structure does not include another wiring layer between the first semiconductor layer and a wiring layer including the first conductive part and the second conductive part.
8 . The photoelectric conversion apparatus according to claim 2 ,
wherein the first conductive part and the second conductive part are separated from each other.
9 . The photoelectric conversion apparatus according to claim 1 ,
wherein a plurality of openings forming a mesh are formed in the first conductive part, and
a distance between an outer edge of the first conductive part and the plurality of openings is greater than a distance between two adjacent openings among the plurality of openings.
10 . The photoelectric conversion apparatus according to claim 1 ,
wherein the first semiconductor layer includes, in the peripheral region, a charge discharge part that collects a charge of the first semiconductor layer, and
the first conductive part is connected to the charge discharge part.
11 . The photoelectric conversion apparatus according to claim 1 ,
wherein a potential is supplied to the first conductive part.
12 . The photoelectric conversion apparatus according to claim 1 ,
wherein in the plan view, the first conductive part surrounds the pixel region.
13 . The photoelectric conversion apparatus according to claim 1 ,
wherein the photoelectric conversion element includes an avalanche photodiode.
14 . The photoelectric conversion apparatus according to claim 1 ,
wherein the first semiconductor layer includes a first semiconductor region constituting a photodiode and a second semiconductor region to which a charge produced by the photodiode is transferred.
15 . A photoelectric conversion system comprising:
the photoelectric conversion apparatus according to claim 1 ; and
a signal processing unit that processes a signal output by the photoelectric conversion apparatus.