Peripheral logic circuits under DRAM memory arrays
View Patent ↗Various embodiments comprise methods and related apparatuses formed from those methods for placing at least portions of peripheral circuits under a DRAM memory array, where the peripheral circuits are used to control an operation of the DRAM memory array. In an embodiment, a memory apparatus includes a DRAM memory array and at least one peripheral circuit formed under the DRAM memory array, where the at least one peripheral circuit includes at least one circuit type selected from sense amplifiers and sub-word line drivers. Additional apparatuses and methods are also disclosed.
1. A method, comprising:
forming at least, one peripheral circuit; and
forming a DRAM memory array over the at least one peripheral circuit, the at least one peripheral circuit configured to control an operation of the DRAM memory array, wherein forming the DRAM memory array includes:
forming an access transistor over the at least one peripheral circuit;
forming a digit line over the access transistor and coupled to the access transistor and the at least one peripheral circuit;
forming a wordline over the access transistor and coupled to the access transistor and the at least one peripheral circuit; and
forming a capacitor structure over the digit line and the wordline and coupled to the access transistor;
wherein forming the at least one peripheral circuit includes forming a first level of conductive line under the access transistor and coupled to the access transistor, and forming a second level of conductive line under the access transistor and between the access transistor and the first level of conductive line, the second level of conductive line coupled to the first level of conductive line, and wherein the peripheral circuit comprises sense amplifiers and sub-word line drivers; and
staggering the sense amplifiers and the sub-word line drivers by an approximately half-core length, the core length being a characteristic dimension of at least, one side of the DRAM memory array.
2. The method of claim 1 , wherein the at least one peripheral circuit is CMOS based.
3. The method of claim 1 , further comprising staggering associated word lines and digit lines.
4. The method of claim 1 , further comprising routing pitch interconnects between memory cores without punching through either wordline or digit line contacts.
5. The method of claim 1 , further comprising routing pitch interconnects between memory cores without using interconnect layers formed above the DRAM memory array.
6. The method of claim 1 , further comprising forming column decode circuitry next to a corresponding sense amplifier circuit.
7. The method of claim 1 , further comprising forming interconnect layers from tungsten.
8. The method of claim 1 , further comprising forming all pitch cells under the DRAM memory array.
9. The method of claim 1 , further comprising forming all pitch cells under the DRAM memory array without staggering the pitch cells.
10. A memory apparatus, comprising:
a DRAM memory array; and
at least one peripheral circuit formed under the DRAM memory array, the at least one peripheral circuit being configured to control an operation of the DRAM memory array, the DRAM memory array including:
an access transistor located over the at least one peripheral circuit;
a first digit line located over the access transistor and coupled to the access transistor and the at least one peripheral circuit;
a wordline located over the access transistor and coupled to the access transistor and the at least one peripheral circuit;
a capacitor structure located over the first digit line and the wordline and couple to the access transistor;
wherein the at least one peripheral circuit includes a first level of conductive line under the access transistor and coupled to the access transistor, and a second level of conductive line under the access transistor and between the access transistor and the first level of conductive line, the second level of conductive line coupled to the first level of conductive line; and
a second digit line located over the access transistor and coupled to the second level of conductive line; and
the peripheral circuit comprises sense amplifiers and sub-word line drivers, the sense amplifiers and the sub-word line drivers staggered by an approximately half-core length, the core length being a characteristic dimension of at least one side of the DRAM memory array.
11. The memory apparatus of claim 10 , wherein the at least one peripheral circuit includes a refresh circuit.
12. The memory apparatus of claim 10 , wherein the at least one peripheral circuit includes a pre-charge circuit.
13. The memory apparatus of claim 10 , wherein the at, least one peripheral circuit includes a column address circuit.
14. The memory apparatus of claim 10 , wherein the at least one peripheral circuit includes a row/column repair circuit.
15. The memory apparatus of claim 10 , wherein the at least one peripheral circuit includes a row-column control circuit.
16. The memory apparatus of claim 10 , wherein the at, least one peripheral circuit includes a test mode circuit.
17. The memory apparatus of claim 10 , wherein the at least one peripheral circuit includes data driver circuits.
18. The memory apparatus of claim 10 , wherein the at least one peripheral circuit includes analog circuits.
19. A memory apparatus, comprising:
a DRAM memory array; and
at least one peripheral circuit formed under the DRAM memory array, the at least one peripheral circuit including at least one circuit type selected from sense amplifiers and sub-word line drivers, the DRAM memory array including:
an access transistor located over the at least one peripheral circuit;
a digit line located over the access transistor and coupled to the access transistor and the at least one peripheral circuit;
a wordline located over the access transistor and coupled to the access transistor and the at least one peripheral circuit; and
a capacitor structure located over the digit line and the wordline and couple to the access transistor; and
wherein the at least one peripheral circuit includes a first level of conductive line under the access transistor and coupled to the access transistor, and a second level of conductive line under the access transistor and between the access transistor and the first level of conductive line, the second level of conductive line coupled to the first level of conductive line; and
a second digit line located over the access transistor and coupled to the second level of conductive line and
the peripheral circuit comprises sense amplifiers and sub-word line drivers, the sense amplifiers and the sub-word line drivers staggered by an approximately half-core length, the core length being a characteristic dimension of at least one side of the DRAM memory array.