Semiconductor structure with airgap
A field effect transistor (FET) with an underlying airgap and methods of manufacture are disclosed. The method includes forming an amorphous layer at a predetermined depth of a substrate. The method further includes forming an airgap in the substrate under the amorphous layer. The method further includes forming a completely isolated transistor in an active region of the substrate, above the amorphous layer and the airgap.
1. A method, comprising:
forming a lateral undercut in a bulk substrate;
forming an airgap from the lateral undercut in the bulk substrate under an active region of a transistor; and
forming the transistor over the airgap, wherein the transistor is formed as a completely isolated transistor.
2. The method of claim 1 , wherein the lateral undercut is formed by etching with XeF 2 chemistry.
3. The method of claim 1 , wherein the forming of the lateral undercut in the bulk substrate starts at a bottom of a deep trench structure.
4. The method of claim 3 , further comprising completely filling the deep trench structure with material to form the airgap from the lateral undercut in the bulk substrate under an active region.
5. The method of claim 3 , further comprising sidewalls of the deep trench structure, wherein sidewall structures are on the sidewalls and the material is formed directly on the sidewall structures.
6. The method of claim 5 , wherein the material is polysilicon material deposited within the at least one deep trench structure.
7. The method of claim 5 , wherein the sidewall structures are on vertical portions of the at least one deep trench structure.
8. The method of claim 7 , wherein the sidewall structures comprise depositing oxide within the deep trench structure and removing of the oxide from a bottom surface of the deep trench structure to expose the bulk substrate.
9. The method of claim 8 , wherein the sidewall structures are formed prior to forming the lateral undercut in the bulk substrate.
10. The method of claim 9 , further comprising removing residual material of the sidewall structures from a surface of a substrate material on the bulk substrate.
11. The method of claim 1 , wherein a location of the airgap is directly under a transistor channel of the transistor.
12. The method of claim 11 , wherein the airgap is in contact with the transistor channel.
13. The method of claim 11 , wherein the airgap is in contact with source and drains regions of the transistor.