Structure and method to improve FAV RIE process margin and electromigration
A method of forming fully aligned vias in a semiconductor device, the method including forming a first level interconnect line embedded in a first interlevel dielectric (ILD), selectively depositing a dielectric on the first interlevel dielectric, laterally etching the selectively deposited dielectric, depositing a dielectric cap layer and a second level interlevel dielectric on top of the first interlevel dielectric, and forming a via opening.
1. A semiconductor device, comprising:
a first interlevel dielectric (ILD) having a trench:
the trench having an upper portion and a lower portion,
the upper portion having sidewalls, and
the upper portion being wider than the lower portion;
a first level interconnect line filling the lower portion of the trench;
a dielectric cap layer with a first portion disposed on the first ILD and a second portion disposed on the sidewalls of the upper portion of the trench as vertical spacers;
a second level ILD on the first portion of dielectric cap layer overlying the first ILD;
a second level interconnect line; and
conductive material forming a via connecting the first and second level interconnect lines, the conductive material filling a first region of the via between the vertical spacers and extending along the vertical length of the vertical spacers.
2. The semiconductor device according to claim 1 ,
wherein a width of the via in the upper portion of the trench is substantially equal to a width of the lower portion of the trench.
3. The semiconductor device according to claim 1 ,
wherein the via comprises a second region extending through the second interlevel dielectric, and
wherein the first region is aligned within the first interconnect line by virtue of the vertical spacer in the recess.
4. The semiconductor device according to claim 1 , wherein the first level interconnect line is one of a plurality of first level interconnect lines wherein at least one other of the plurality of first level interconnect lines does not extend to a corresponding via opening in a region immediately adjacent to the via.
5. A semiconductor device, comprising:
a first level interconnect line formed in a first interlevel dielectric (ILD);
a dielectric formed on the first interlevel dielectric;
a dielectric cap layer formed on the dielectric;
a second level interlevel dielectric formed over the first interlevel dielectric; and
a via defined by the second interlevel dielectric, the dielectric, and the dielectric cap layer, wherein a portion of the dielectric cap layer is provided as vertical spacers formed on the dielectric and extending vertically along one or more sidewalls of the dielectric to self-align a lower portion of the via with the first level interconnect line, the lower-portion of the via filling the region between and extending along the vertical length of the vertical spacers.