Cylindrical vertical SI etched channel 3D switching devices
A switching device, according to one embodiment, includes: a cylindrical pillar; an annular cylindrical oxide layer which encircles a portion of the cylindrical pillar; an annular cylindrical gate contact which encircles a portion of the annular cylindrical oxide layer; and a source contact which encircles a portion of the cylindrical pillar toward a first end of the cylindrical pillar. Other systems are also described in additional embodiments herein which provide various different switching devices having improved components including improved cylindrical gate contacts, improved source contacts, and/or improved drain contacts. These improved systems and components thereof may be implemented in vertical transistor structures which also include the aforementioned cylindrical pillar and cylindrical gate contact in comparison to conventional surface transistor structures.
1. A switching device, comprising:
a cylindrical pillar;
an annular cylindrical oxide layer which encircles a portion of the cylindrical pillar;
an annular cylindrical gate contact which encircles a portion of the annular cylindrical oxide layer; and
a source contact which encircles a portion of the cylindrical pillar toward a first end of the cylindrical pillar;
wherein a first end of the vertical cylindrical pillar serves as a source terminal, wherein a second end of the vertical cylindrical pillar serves as a drain terminal, wherein the first end of the vertical cylindrical pillar is opposite the second end of the vertical cylindrical pillar.
2. The switching device as recited in claim 1 , wherein the cylindrical pillar includes silicon.
3. The switching device as recited in claim 1 , wherein the source contact includes a silicided material.
4. The switching device as recited in claim 1 , wherein the annular cylindrical gate contact includes n+ and/or p+ doped material.
5. The switching device as recited in claim 4 , wherein the doped material includes doped polysilicon.
6. The switching device as recited in claim 1 , wherein a deposition thickness of the annular cylindrical gate contact is between about 200 angstroms (Å) and about 300 Å.
7. The switching device as recited in claim 1 , wherein the source contact includes a silicide material.
8. The switching device as recited in claim 1 , comprising:
a magnetic tunnel junction sensor stack electrically coupled to a second end of the cylindrical pillar.
9. The switching device as recited in claim 1 , wherein cylindrical pillar includes an electrically conductive, non-magnetic material, wherein the annular cylindrical gate contact includes an electrically conductive, non-magnetic material.
10. The switching device as recited in claim 1 , wherein an effective cell size of the switching device is 4F 2 , wherein F is the minimum feature size associated with technology used to fabricate the switching device.