Methods of forming high aspect ratio openings and methods of forming high aspect ratio features
View Patent ↗Methods of forming high aspect ratio openings. The method comprises removing a portion of a dielectric material at a temperature less than about 0° C. to form at least one opening in the dielectric material. The at least one opening comprises an aspect ratio of greater than about 30:1. A protective material is formed in the at least one opening and on sidewalls of the dielectric material at a temperature less than about 0° C. Methods of forming high aspect ratio features are also disclosed, as are semiconductor devices.
1. A method of forming high aspect ratio openings, comprising:
removing a portion of a dielectric material at a temperature less than about 0° C. to form at least one opening in the dielectric material, the at least one opening comprising an aspect ratio of greater than about 30:1; and
forming a protective material in the at least one opening and on sidewalls of the dielectric material in the absence of a plasma and at a temperature between about −100° C. and about −40° C.
2. The method of claim 1 , wherein forming a protective material in the at least one opening and on sidewalls of the dielectric material in the absence of a plasma comprises forming the protective material using atomic layer deposition (ALD) or molecular layer deposition (MLD).
3. The method of claim 1 , wherein removing a portion of a dielectric material comprises exposing the dielectric material to an etch composition comprising at least one etch gas, at least one additive gas, and at least one protective material precursor.
4. The method of claim 3 , wherein exposing the dielectric material to an etch composition comprises exposing the dielectric material to a plasma comprising the etch composition.
5. The method of claim 1 , wherein forming a protective material in the at least one opening and on sidewalls of the dielectric material comprises forming the protective material in the at least one opening comprising an aspect ratio of greater than about 80:1.
6. The method of claim 1 , wherein forming a protective material in the at least one opening and on sidewalls of the dielectric material comprises forming the protective material in the at least one opening comprising an aspect ratio of greater than about 90:1.
7. The method of claim 1 , wherein forming a protective material in the at least one opening and on sidewalls of the dielectric material comprises forming the protective material in the at least one opening comprising an aspect ratio of greater than about 100:1.
8. The method of claim 1 , wherein forming a protective material in the at least one opening and on sidewalls of the dielectric material comprises conformally forming the protective material.
9. The method of claim 1 , wherein forming a protective material in the at least one opening and on sidewalls of the dielectric material comprises forming the protective material comprising an insulative organic polymer, a conductive organic polymer, a boron-containing material, a sulfur-containing material, or a metal.
10. The method of claim 1 , wherein forming a protective material in the at least one opening and on sidewalls of the dielectric material comprises reacting at least one protective material precursor of an etch composition with the dielectric material.
11. The method of claim 1 , further comprising forming a feature in the at least one opening.
12. The method of claim 1 , wherein removing a portion of a dielectric material at a temperature less than about 0° C. and forming a protective material in the at least one opening and on sidewalls of the dielectric material in the absence of a plasma and at a temperature between about −100° C. and about −40° C. comprises conducting the removing at the temperature of less than about 0° C., and the forming at the temperature between about −100° C. and about −40° C. of an electrostatic chuck upon which a substrate comprising the dielectric material and protective material is positioned.
13. The method of claim 1 , wherein removing a portion of a dielectric material at a temperature less than about 0° C. to form at least one opening in the dielectric material comprises forming the at least one opening at a temperature of less than about −40° C.
14. The method of claim 1 , wherein removing a portion of a dielectric material at a temperature less than about 0° C. to form at least one opening comprises forming the at least one opening at a temperature of less than about −60° C.
15. The method of claim 1 , wherein forming a protective material comprises forming the protective material at a pressure between about 1 mTorr and about 100 mTorr.
16. The method of claim 1 , wherein forming a protective material in the at least one opening and on sidewalls of the dielectric material comprises forming the protective material using an organic solvent or organosilane that exhibits a melting point below 0° C.
17. The method of claim 16 , wherein forming the protective material using an organic solvent or organosilane comprises forming the protective material using the organic solvent or organosilane selected from the group consisting of acetone, acetonitrile, 1-butanol, diethylether, ethylacetate, and tetrahydrofuran, and an organosilane having a functional group as a ligand to a silicon atom.
18. The method of claim 1 , wherein forming a protective material in the at least one opening and on sidewalls of the dielectric material comprises forming the protective material using at least one material selected from the group consisting of ortho-carborane (C 2 B 10 H 12 ), boron tribromide (BBr 3 ), carbon disulfide (CS 2 ), dithienylmethane (C 4 H 3 S), hydrogen sulfide (H 2 S), disulfur dichloride (S 2 C 12 ), fluorodisulfane (SF 2 ), sulfur dibromide (SBr 2 ), sulfur tetrabromide (SBr 4 ), sulfur monobromide (S 2 Br 2 ), dibromohexasulfate (Br 2 S 6 ), aluminum chloride (AlCl 3 ), iridium hexafluoride (IrF 6 ), tungsten tetrafluoride (WF 4 ), tungsten dibromide (WBr 2 ), germanium tetrachloride (GeCl 4 ), germanium tetrafluoride (GeF 4 ), ruthenium tetroxide (RuO 4 ), and a transition metal parylene-based polymer.