Annular vertical Si etched channel MOS devices
A switching device, according to one embodiment, includes: a cylindrical pillar gate contact, an annular cylindrical channel which encircles a portion of the cylindrical pillar gate contact, an annular cylindrical oxide layer which encircles a portion of the annular cylindrical channel, and a source contact tab which encircles a portion of the annular cylindrical channel toward a first end of the annular cylindrical channel. Other systems are also described in additional embodiments herein which provide various different switching devices having improved components including improved annular cylindrical channel structures, improved source contacts, and/or improved cylindrical pillar gate contacts. These improved systems and components thereof may be implemented in vertical annular transistor structures in comparison to conventional surface transistor structures.
1. A switching device, comprising:
a cylindrical pillar gate contact;
an annular cylindrical channel which encircles a portion of the cylindrical pillar gate contact;
an annular cylindrical oxide layer which encircles a portion of the annular cylindrical channel;
a source contact tab which encircles a portion of the annular cylindrical channel toward a first end of the annular cylindrical channel; and
a magnetic tunnel junction sensor stack electrically coupled to a second end of the annular cylindrical channel.
2. The switching device as recited in claim 1 , wherein the first end of the annular cylindrical channel serves as a source terminal, wherein a second end of the annular cylindrical channel serves as a drain terminal, wherein the first end of the annular cylindrical channel is opposite the second end of the annular cylindrical channel.
3. The switching device as recited in claim 1 , wherein the annular cylindrical channel includes silicon.
4. The switching device as recited in claim 1 , wherein the source contact tab includes a silicided material.
5. The switching device as recited in claim 1 , wherein the annular cylindrical channel includes n+ and/or p+ doped material.
6. The switching device as recited in claim 5 , wherein the doped material includes doped polysilicon.
7. The switching device as recited in claim 1 , wherein annular cylindrical channel includes an electrically conductive, non-magnetic material, wherein the cylindrical pillar gate contact includes an electrically conductive, non-magnetic material.
8. The switching device as recited in claim 1 , wherein an effective cell size of the switching device is 16F 2 , wherein F is the minimum feature size associated with technology used to fabricate the switching device.