IP Library Granted Patent US 10,141,499
Granted Patent B1
US 10,141,499 · App. 15/859,379 · Granted Nov 27, 2018

Perpendicular magnetic tunnel junction device with offset precessional spin current layer

Inventors: Manfred Ernst Schabes (Saratoga, CA); Mustafa Michael Pinarbasi (Morgan Hill, CA); Bartlomiej Adam Kardasz (Pleasanton, CA)
Assignee: Spin Transfer Technologies, Inc.
H01L43/02G11C11/161H01F10/329H01F10/3254H01F10/3272H01F10/3286H01L27/222H01L43/08H01L43/10H01L43/12
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Quick Facts
Patent No.
US 10,141,499
App. No.
15/859,379
Granted
Nov 27, 2018
Kind
B1
Abstract

A magnetoresistive random-access memory (MRAM) is disclosed. The MRAM device includes a perpendicular magnetic tunnel junction device having a reference layer, a free layer, and a precessional spin current magnetic layer. The precessional spin current magnetic layer has a central axis that is offset from a central axis of the free layer. The device is designed to provide control over the injection of stray fields and the electronic coupling between the precessional spin current magnetic layer and the free layer. Switching speed, switching current, and thermal barrier height for the device can be adjusted. The off-center design may be used to adjust the location of the stray-field injection in the free layer.

Claims (33)

1. A magnetic device, comprising:

a first synthetic antiferromagnetic structure in a first plane having a magnetization vector that is perpendicular to the first plane and having a fixed magnetization direction;

an antiferromagnetic coupling layer in a second plane and disposed above the first synthetic antiferromagnetic structure;

a second synthetic antiferromagnetic structure in a third plane and disposed over the antiferromagnetic coupling layer;

a magnetic reference layer in a fourth plane and disposed over the second synthetic antiferromagnetic structure, the magnetic reference layer having a magnetization vector that is perpendicular to the fourth plane and having a fixed magnetization direction;

a non-magnetic tunnel barrier layer in a fifth plane and disposed over the magnetic reference layer;

a free magnetic layer having a first diameter and disposed in a sixth plane over the non-magnetic tunnel barrier layer, the free magnetic layer having a magnetization vector that is perpendicular to the sixth plane and having a magnetization direction that can switch between a first magnetization direction to a second magnetization direction, the magnetic reference layer, the non-magnetic tunnel barrier layer and the free magnetic layer forming a magnetic tunnel junction; and

a precessional spin current magnetic layer having a second diameter that is less than the first diameter and a center that is offset relative to a center of the free magnetic layer, the precessional spin current magnetic layer disposed in a seventh plane that is physically separated from the free magnetic layer and coupled to the free magnetic layer by a filter coupling layer that may induce ferromagnetic or antiferromagnetic coupling between the free magnetic layer and the filter layer.

2. The magnetic device of claim 1 , wherein the second diameter is in the range of 5 nm to 100 nm.

3. The magnetic device of claim 1 , wherein a ratio of the second diameter to the first diameter is in the range of 0.2 to 0.9.

4. The magnetic device of claim 1 , wherein the precessional spin current magnetic layer is formed from Co x Fe y B z , where y is in the range 40% to 70%, z is in the range 18% to 21%, and x+y+z=100%.

5. The magnetic device of claim 1 , wherein the precessional spin current magnetic layer has a circular shape.

6. The magnetic device of claim 1 , wherein the precessional spin current magnetic layer has a non-circular shape.

7. The magnetic device of claim 1 , wherein an axis of the precessional spin current magnetic layer is offset from an axis of the free layer by an offset distance, and wherein a ratio of the offset distance to the first diameter is in the range of 0 to 0.4.

8. A magnetic device, comprising:

a magnetic reference layer in a first plane, the magnetic reference layer having a magnetization vector that is perpendicular to the first plane and having a fixed magnetization direction;

a non-magnetic tunnel barrier layer in a second plane and disposed over the magnetic reference layer;

a free magnetic layer having a first diameter and disposed in a third plane over the non-magnetic tunnel barrier layer, the free magnetic layer having a magnetization vector that is perpendicular to the third plane and having a magnetization direction that can switch between a first magnetization direction to a second magnetization direction, the magnetic reference layer, the non-magnetic tunnel barrier layer and the free magnetic layer forming a magnetic tunnel junction; and

a precessional spin current magnetic layer having a second diameter that is less than the first diameter and a center that is offset relative to a center of the free magnetic layer, the precessional spin current magnetic layer disposed in a fourth plane that is physically separated from the free magnetic layer and coupled to the free magnetic layer by a filter coupling layer that may induce ferromagnetic or antiferromagnetic coupling between the free magnetic layer and the filter layer.

9. The magnetic device of claim 8 , wherein the second diameter is in the range of 5 nm to 100 nm.

10. The magnetic device of claim 8 , wherein a ratio of the second diameter to the first diameter is in the range of 0.2 to 0.9.

11. The magnetic device of claim 8 , wherein the precessional spin current magnetic layer is formed from Co x Fe y B z , where y is in the range 40% to 70%, z is in the range 18% to 21%, and x+y+z=100%.

12. The magnetic device of claim 8 , wherein the precessional spin current magnetic layer has a circular shape.

13. The magnetic device of claim 8 , wherein the precessional spin current magnetic layer has a non-circular shape.

14. The magnetic device of claim 8 , wherein an axis of the precessional spin current magnetic layer is offset from an axis of the free magnetic layer by an offset distance, and wherein a ratio of the offset distance to the first diameter is in the range of 0 to 0.4.

15. A method for manufacturing a magnetic device comprising the steps of:

providing a magnetic tunnel junction including a magnetic reference layer, a non-magnetic tunnel barrier layer, and a free magnetic layer;

depositing a filter coupling layer over the free magnetic layer;

depositing a precessional spin current magnetic layer over the filter coupling layer;

forming a partial pillar that includes the precessional spin current magnetic layer;

depositing a hard mask layer over the precessional spin current magnetic layer;

forming a pillar that includes the precessional spin current magnetic layer, the filter coupling layer, the free magnetic layer, the non-magnetic tunnel barrier layer, and the magnetic reference layer such that the precessional spin current magnetic layer has a central axis that is offset from a central axis of the free magnetic layer; and

depositing an electrical contact layer over the precessional spin current layer.

Assignments (4)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 11, 2021
From: SPIN (ASSIGNMENT FOR BENEFIT OF CREDITORS), LLC
To: INTEGRATED SILICON SOLUTION, (CAYMAN) INC.
Reel/Frame 057473/0319 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 20, 2021
From: SPIN MEMORY, INC.
To: SPIN (ASSIGNMENT FOR THE BENEFIT OF CREDITORS), LLC
Reel/Frame 056927/0038 →
CHANGE OF NAME Recorded Jan 15, 2019
From: SPIN TRANSFER TECHNOLOGIES, INC.
To: SPIN MEMORY, INC.
Reel/Frame 048075/0550 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 8, 2018
From: SCHABES, MANFRED ERNST; PINARBASI, MUSTAFA MICHAEL; KARDASZ, BARTLOMIEJ ADAM
To: SPIN TRANSFER TECHNOLOGIES, INC.
Reel/Frame 045743/0441 →