Method of manufacturing an electronic device and electronic device manufactured thereby
An electronic device and a method of making an electronic device. As non-limiting examples, various aspects of this disclosure provide methods of making an electronic device, and electronic devices made thereby, that comprise forming first and second encapsulating materials, followed by further processing and the removal of the entire second encapsulating material.
1. A method of manufacturing an electronic device, the method comprising:
providing a substrate comprising:
a temporary carrier comprising a first carrier side and a second carrier side opposite the first carrier side; and
a permanent interposer comprising a first interposer side, and a second interposer side opposite the first interposer side and coupled to the first carrier side;
providing a semiconductor die comprising a first die side, a second die side opposite the first die side, and a plurality of lateral die sides extending between the first and second die sides;
permanently coupling the second die side to the first interposer side;
forming a first encapsulating material, wherein the first encapsulating material contacts at least the lateral die sides, laterally surrounds at least the entire lateral die sides, and covers at least the first interposer side;
forming a second encapsulating material, wherein the second encapsulating material covers at least a first side of the first encapsulating material;
after said forming the second encapsulating material, removing the temporary carrier from the substrate;
after said removing the temporary carrier from the substrate, forming an interconnection structure on the second interposer side; and
after said forming the interconnection structure, removing at least a portion of the second encapsulating material.
2. The method of claim 1 , wherein:
said forming the first encapsulating material comprises performing a first molding process utilizing a liquid molding material; and
said forming the second encapsulating material comprises performing a second molding process over the first encapsulating material utilizing a powdered molding material.
3. The method of claim 1 , wherein the first encapsulating material has a first maximum filler cut size, and the second encapsulating material has a second maximum filler cut size that is at least 25% higher than the first maximum filler cut size.
4. The method of claim 1 , wherein:
the first side of the first encapsulating material comprises apertures;
a portion of a second side of the second encapsulating material extends into the apertures of the first encapsulating material; and
a first side of the second encapsulating material, opposite the second side of the second encapsulating material, is planar.
5. The method of claim 1 , wherein the second encapsulating material only contacts the first encapsulating material at the first side of the first encapsulating material.
6. The method of claim 1 , wherein said forming an interconnection structure comprises:
forming a first dielectric layer directly on the second interposer side;
forming a conductive redistribution layer directly on the first dielectric layer; and
forming a second dielectric layer directly on the conductive redistribution layer.
7. The method of claim 1 , wherein said forming the interconnection structure comprises:
forming a first conductive ball on the second interposer side within a footprint of the semiconductor die; and
forming a second conductive ball on the second interposer side outside the footprint of the semiconductor die.
8. The method of claim 1 , wherein said removing at least a portion of the second encapsulating material comprises removing all of the second encapsulating material.
9. The method of claim 1 , wherein said removing at least a portion of the second encapsulating material comprises grinding the second encapsulating material.
10. A method of manufacturing an electronic device, the method comprising:
forming a reconstituted wafer, said forming comprising:
coupling a respective second side of each of a plurality of semiconductor dies to a first side of a substrate, wherein the substrate comprises a temporary carrier; and
forming a first encapsulating material, wherein:
the first encapsulating material covers at least lateral sides of each of the plurality of semiconductor dies and the first side of the substrate; and
in at least one cross-sectional plane orthogonal to the first side of the substrate, the first encapsulating material is the only material, other than any die underfill material, laterally directly between adjacent sides of the plurality of semiconductor dies;
forming a second encapsulating material on the reconstituted wafer, wherein the second encapsulating material covers at least a first side of the first encapsulating material;
after said forming the second encapsulating material, removing the temporary carrier; and
after said removing the temporary carrier, forming a respective interconnection structure on the respective second side of each of the plurality of semiconductor dies and on a second side of the first encapsulating material.
11. The method of claim 10 , comprising after said forming the interconnection structures, removing at least a portion of the second encapsulating material.
12. The method of claim 11 , wherein said removing at least a portion of the second encapsulating material comprises removing all of the second encapsulating material covering the first side of the first encapsulating material, and further comprising removing at least a portion of the first encapsulating material.
13. The method of claim 10 , comprising after said forming the interconnection structures, removing the second encapsulating material and a portion of the first encapsulating material by, at least in part, grinding the second encapsulating material and the portion of the first encapsulating material.
14. The method of claim 10 , wherein:
said forming the first encapsulating material comprises performing a first molding process utilizing a liquid molding compound; and
said forming the second encapsulating material comprises performing a second molding process over the first molding compound utilizing a powdered molding compound.
15. The method of claim 10 , comprising forming an underfill material, different from the first encapsulating material, between the semiconductor dies and the first side of the substrate.
16. The method of claim 10 , wherein said forming the interconnection structures comprises:
forming a first conductive ball on the respective second side of a first die of the plurality of semiconductor dies, and electrically coupled to the first die; and
forming a second conductive ball on the second side of the first encapsulating material outside a footprint of the semiconductor die, and electrically coupled to the first die.
17. A method of manufacturing an electronic device, the method comprising:
forming a first encapsulating material on a semiconductor die and a substrate, wherein:
the first encapsulating material comprises a first mold material that covers at least lateral sides of the semiconductor die and an upper side of the substrate, and
the semiconductor die does not protrude from a lower surface of the first mold material;
forming a second encapsulating material on the first encapsulating material, wherein within a footprint of the electronic device, the second encapsulating material covers only an upper side of the first encapsulating material; and
after said forming a first encapsulating material and said forming a second encapsulating material, further processing the electronic device,
wherein said further processing comprises forming one or more interconnection structures on a lower side of the semiconductor die and on the lower surface of the first encapsulating material.
18. The method of claim 17 , wherein:
a lower side of the first encapsulating material comprises the lower surface of the first encapsulating material; and
the lower side of the first encapsulating material is entirely planar.
19. The method of claim 17 , comprising after said further processing, removing only a first portion of the second encapsulating material, such that a second portion of the second encapsulating material remains part of the completed electronic device.
20. The method of claim 17 , wherein the one or more interconnection structures comprise conductive traces and conductive balls attached to the conductive traces.