Manufacturing method of semiconductor device including oxide semiconductor
The semiconductor device includes a first insulating layer, a second insulating layer, an oxide semiconductor layer, and first to third conductive layers. The first conductive layer and the second conductive layer are connected to the oxide semiconductor layer. The second insulating layer includes a region in contact with the oxide semiconductor layer, and the third conductive layer includes a region in contact with the second insulating layer. The oxide semiconductor layer includes first to third regions. The first region and the second region are separated from each other, and the third region is located between the first region and the second region. The third region and the third conductive layer overlap with each other with the second insulating layer located therebetween. The first region and the second region include a region having a higher carbon concentration than the third region.
1. A method for manufacturing a semiconductor device, comprising the steps of:
forming an oxide semiconductor layer over a substrate;
forming a first insulating film over the oxide semiconductor layer;
forming a conductive film over the first insulating film;
forming a resist mask over the conductive film;
selectively etching the conductive film and the first insulating film using the resist mask to form a stack comprising a first insulating layer and a conductive layer and to expose a first region of the oxide semiconductor layer and a second region of the oxide semiconductor layer;
adding an impurity to the first region of the oxide semiconductor layer and the second region of the oxide semiconductor layer by plasma treatment to form oxygen vacancies in the first region of the oxide semiconductor layer and the second region of the oxide semiconductor layer;
removing the resist mask after adding the impurity;
forming a second insulating film comprising hydrogen over the first region of the oxide semiconductor layer and the second region of the oxide semiconductor layer, the first insulating layer, and the conductive layer; and
making the hydrogen diffuse from the second insulating film to the first region of the oxide semiconductor layer and the second region of the oxide semiconductor layer, to lower resistances of the first region of the oxide semiconductor layer and the second region of the oxide semiconductor layer.
2. The method for manufacturing a semiconductor device according to claim 1 ,
wherein the impurity is one or more elements selected from phosphorus, arsenic, antimony, boron, aluminum, silicon, nitrogen, helium, neon, argon, krypton, xenon, indium, fluorine, chlorine, titanium, zinc, and carbon.
3. The method for manufacturing a semiconductor device according to claim 1 ,
wherein the second insulating film comprising hydrogen is a nitride insulating film.
4. A method for manufacturing a semiconductor device, comprising the steps of:
forming an oxide semiconductor layer over a substrate;
forming a first insulating film over the oxide semiconductor layer;
forming a conductive film over the first insulating film;
forming a resist mask over the conductive film;
selectively etching the conductive film and the first insulating film using the resist mask to expose a first region of the oxide semiconductor layer and a second region of the oxide semiconductor layer;
performing plasma treatment on the first region of the oxide semiconductor layer and the second region of the oxide semiconductor layer;
removing the resist mask after performing plasma treatment; and
forming a second insulating film comprising hydrogen over and in contact with the first region of the oxide semiconductor layer and the second region of the oxide semiconductor layer,
the method further comprising the step of forming a third insulating film comprising oxygen over the second insulating film.
5. The method for manufacturing a semiconductor device according to claim 4 , further comprising the step of performing a heating treatment after forming the third insulating film.