Planarization of semiconductor packages and structures resulting therefrom

1. A method comprising:

encapsulating a semiconductor die in an encapsulant, wherein the encapsulant comprises a filler;

planarizing the encapsulant, wherein planarizing the encapsulant exposes a hollow core of the filler;

depositing a polymer material on the encapsulant, wherein depositing the polymer material comprises filling the hollow core with the polymer material;

planarizing the polymer material; and

forming a metallization pattern on the polymer material, wherein the metallization pattern electrically connects a die connector of the semiconductor die to a conductive feature disposed outside of the semiconductor die.

2. The method of claim 1 , wherein forming the metallization pattern comprises forming the metallization pattern in physical contact with the polymer material.

3. The method of claim 2 , further comprising:

patterning a first opening through the polymer material to expose the die connector of the semiconductor die; and

patterning a second opening through the polymer material to expose the conductive feature, wherein forming the metallization pattern comprises forming portions of the metallization pattern in the first opening and the second opening.

4. The method of claim 3 , wherein patterning the first opening and patterning the second opening is performed prior to planarizing the polymer material.

5. The method of claim 1 further comprising prior to depositing the polymer material, recessing the die connector of the semiconductor die below a top surface of the encapsulant.

6. A method comprising:

disposing a first integrated circuit die adjacent a second integrated circuit die;

encapsulating the first integrated circuit die and the second integrated circuit die in a molding compound, the molding compound comprising a plurality of fillers;

planarizing the molding compound to expose a first die connector of the first integrated circuit die and a second die connector of the second integrated circuit die, planarizing the molding compound defining a plurality of depressions at a top surface of the molding compound;

depositing a polymer material over the molding compound, the polymer material being disposed in the plurality of depressions at the top surface of the molding compound;

planarizing the polymer material; and

forming a metallization pattern over the polymer material, the metallization pattern electrically connecting the first die connector to the second die connector.

7. The method of claim 6 , wherein forming the metallization pattern comprises forming the metallization pattern in contact with the polymer material.

8. The method of claim 6 further comprising patterning the first die connector and the second die connector below a top surface of the molding compound.

9. A method comprising:

encapsulating a die in a molding compound, the die comprising a die connector, and the molding compound comprising a filler;

planarizing the molding compound to expose the die connector, planarizing the molding compound further exposing a hollow core of the filler;

depositing a polymer material over the die and in the hollow core;

planarizing the polymer material; and

forming a metallization pattern over the polymer material and electrically connected to the die connector.

10. The method of claim 9 , wherein planarizing the polymer material leaves a residue at a top surface of the polymer material, and wherein forming the metallization pattern comprises disposing the residue between the metallization pattern and the polymer material.

11. The method of claim 10 , wherein planarizing the polymer material comprises using a chemical slurry, and wherein the residue comprises a component of the chemical slurry.

12. The method of claim 9 further comprising recessing the die connector to a level below a top surface of the molding compound before depositing the polymer material.

13. The method of claim 12 , wherein forming the metallization pattern comprises forming a portion of the metallization pattern at the level below the top surface of the molding compound.

14. The method of claim 9 further comprising after planarizing the polymer material, patterning an opening through the polymer material to expose the die connector.

15. The method of claim 9 , wherein a planarity of a top surface of the polymer material is greater than a planarity of a top surface of the molding compound after planarizing the polymer material.