Memory including a selector switch on a variable resistance memory cell
View Patent ↗Embodiments include but are not limited to apparatuses and systems including memory having a memory cell including a variable resistance memory layer, and a selector switch in direct contact with the memory cell, and configured to facilitate access to the memory cell. Other embodiments may be described and claimed.
1. A method comprising:
forming a sealing layer on a portion of a selector switch and a portion of a memory cell;
forming a plurality of dielectric layers in contact with a portion of the memory cell;
forming a conductive plug in contact with and disposed on a portion of a surface of the sealing layer; and
forming a diffusion barrier in contact with a pair of sidewalls of the conductive plug.
2. The method of claim 1 , further comprising:
forming the selector switch in contact with and disposed on the portion of the memory cell.
3. The method of claim 2 , wherein forming the selector switch further comprises:
forming a first metal layer; and
forming a first non-silicon-based semiconductor layer in contact with an upper surface of the first metal layer.
4. The method of claim 3 , wherein forming the selector switch further comprises:
forming a second metal layer; and
forming a second non-silicon-based semiconductor layer disposed between the first non-silicon-based semiconductor layer and the second metal layer.
5. The method of claim 4 , wherein the second non-silicon-based semiconductor layer is in contact with an upper surface of the first non-silicon-based semiconductor layer and a lower surface of the second metal layer.
6. The method of claim 1 , further comprising:
forming an upper electrode layer;
forming a variable resistance memory layer in contact with a lower surface of the upper electrode layer; and
forming a lower electrode layer in contact with a lower surface of the variable resistance memory layer,
wherein the variable resistance memory layer is disposed between the upper electrode layer and the lower electrode layer.
7. The method of claim 1 , wherein forming the sealing layer further comprises:
forming the sealing layer on a surface and at least one sidewall of the selector switch and at least one sidewall of the memory cell.
8. The method of claim 1 , wherein a portion of each dielectric layer of the plurality of dielectric layers is in contact with a portion of the sealing layer.
9. A memory array comprising:
a plurality of memory cells, each memory cell of the plurality coupled with a corresponding bit line and a corresponding word line;
a plurality of selector switches, each selector switch of the plurality in contact with a corresponding memory cell of the plurality;
a sealing layer in contact with an upper surface and a pair of sidewalls of each of the selector switches and a pair of sidewalls of each of the memory cells;
a plurality of conductive plugs, each conductive plug of the plurality in contact with a corresponding memory cell of the plurality and disposed on a portion of the sealing layer; and
a plurality of diffusion barriers, each diffusion barrier in contact with a corresponding conductive plug of the plurality.
10. The memory array of claim 9 , wherein each selector switch of the plurality comprises a first metal layer and a first non-silicon-based semiconductor layer in contact with an upper surface of the first metal layer.
11. The memory array of claim 10 , wherein each selector switch of the plurality comprises a second metal layer and a second non-silicon-based semiconductor layer disposed between the first non-silicon-based semiconductor layer and the second metal layer.
12. The memory array of claim 9 , wherein each conductive plug of the plurality is configured to pass electrical current between a corresponding selector switch and a corresponding word line.
13. The memory array of claim 9 , further comprising:
a second plurality of memory cells, each memory cell of the second plurality coupled with a corresponding second bit line and a corresponding second word line;
a second plurality of selector switches, each selector switch of the second plurality in contact with a corresponding memory cell of the second plurality;
a second sealing layer in contact with an upper surface and a pair of sidewalls of each of the selector switches of the second plurality and a pair of sidewalls of each of the memory cells of the second plurality,
wherein each memory cell of the plurality is at a first level of the memory array and each memory cell of the second plurality is at a second level of the memory array.
14. The memory array of claim 9 , further comprising:
a plurality of second conductive plugs, each second conductive plug in contact with a lower surface of a corresponding memory cell of the second plurality, wherein the second conductive plugs are configured to pass electrical current between the corresponding memory cell of the second plurality and a corresponding second bit line.
15. A method for forming a memory device, comprising:
forming a sealing layer on a surface and a pair of sidewalls of a selector switch and a pair of sidewalls of a memory cell;
forming a conductive plug in contact with and disposed on a portion of a surface of the sealing layer; and
forming a diffusion barrier in contact with a pair of sidewalls of the conductive plug.
16. The method of claim 15 , further comprising:
forming the selector switch on a portion of the memory cell, wherein the sealing layer is formed after the memory cell and the selector switch.
17. The method of claim 16 , wherein the selector switch is in contact with and disposed on the portion of the memory cell.
18. The method of claim 15 , wherein the conductive plug is in contact with and disposed on an upper surface of the sealing layer.
19. The method of claim 15 , further comprising:
forming a second conductive plug in contact with a lower surface of the memory cell; and
forming a second diffusion barrier in contact with a pair of sidewalls of the second conductive plug.
20. The method of claim 15 , wherein the conductive plug comprises a first metal material and the second conductive plug comprises a second metal material different from the first metal material.