Ultrasonic bonding jig, ultrasonic bonding method, and bonding structure
An ultrasonic bonding jig includes: a plurality of protrusions; and a planar portion among protrusions formed among base ends of the protrusions. The protrusions have side surfaces of tapered surfaces, the side surfaces being positioned in a vibration direction. At the tapered surfaces, an inclination of a tangent at distal ends of the protrusions, with respect to the vibration direction, is larger than an inclination of a tangent at the base ends of the protrusions, with respect to the vibration direction.
1. An ultrasonic bonding jig comprising:
a plurality of protrusions; and
a planar portion arranged among the plurality of protrusions at base ends of the plurality of protrusions, wherein
the planar portion has a flat surface that covers a continuous area between the base ends of the protrusions,
the plurality of protrusions have side surfaces that are tapered, at least one of the side surfaces being aligned in a direction orthogonal to a direction in which another of the side surfaces is aligned,
an inclination of a tangent of the side surface directly adjacent to a distal end of each of the plurality of protrusions, with respect to the planar portion, is larger than an inclination of a tangent of the side surface directly adjacent to the base end of each of the plurality of protrusions, with respect to the planar portion, the inclination varying in uncurved stages between the distal end and the planar portion of each of the plurality of protrusions, and
the side surfaces directly adjacent to the distal end of each of the plurality of protrusions are aligned perpendicular with respect to the planar portion.
2. The ultrasonic bonding jig according to claim 1 , wherein
the side surfaces of the plurality of protrusions have rectangular cross-sections.
3. The ultrasonic bonding jig according to claim 1 , wherein
the distal ends of the plurality of protrusions are flat.