Plasma etching method
In the plasma etching method, a sample is placed on a stage in a chamber. A first gas is introduced into the chamber. Electric field is supplied within the chamber to plasma is generated from the first gas. A first RF power of a first frequency, which is for generating a bias voltage in the sample for etching the sample with radicals which are generated in the plasma while the plasma is generated, is supplied to the stage. A second gas is introduced from a position in outer periphery of a surface of the stage, on which the sample is placed. A second RF power of a second frequency higher than the first frequency and capable of generating plasma from the second gas above the stage that allows radicals generated in the plasma generated from the second gas to be supplied in the outer periphery, is supplied to the stage.
1. A plasma etching method comprising steps of:
placing a sample on a stage that is disposed in a decompression chamber and equipped with a dielectric ring-shaped member arranged on an upper portion of the stage, the sample being placed on the upper surface of the stage inside the dielectric ring-shaped member;
introducing a first gas into the decompression chamber;
supplying electric field into the decompression chamber, through a dielectric window member which is disposed above the stage from outside the decompression chamber, and generating plasma from the first gas in an upper portion of an inside space of the decompression chamber;
supplying a first RF power of a first frequency that is capable of generating a bias voltage in the sample for etching the sample to an electrode inside the stage that is disposed opposing the dielectric window member;
introducing a second gas from a position of the stage in an outer periphery of the sample placed on the upper surface of the stage; and
supplying a second RF power of a second frequency that is higher than the first frequency to the electrode.
2. The plasma etching method according to claim 1 , wherein the second RF power is capable of generating plasma from the second gas in a lower portion of the inside space of the decompression chamber above the stage that causes radicals to be generated in the plasma generated from the second gas.
3. The plasma etching method according to claim 2 , wherein the plasma from the second gas is generated by using a lateral electric field supplied by the second RF power which is generated in a ring-shaped region at the outer periphery of the surface of the sample inside the decompression chamber.
4. The plasma etching method according to claim 1 , wherein the second gas includes oxygen or fluorocarbon.
5. The plasma etching method according to claim 1 , wherein the second gas is supplied from a position within ⅕ of a diameter of the sample from an outermost periphery of the sample.
6. The plasma etching method according to claim 3 , wherein the second gas includes oxygen or fluorocarbon.
7. The plasma etching method according to claim 3 , wherein the second gas is supplied from a position within ⅕ of a diameter of the sample from an outermost periphery of the sample.
8. The plasma etching method according to claim 1 , wherein:
the second gas is introduced via introduction holes;
openings of the introduction holes are arranged at a pitch A along a circumferential direction of the sample on the sample stage and at a distance B from the outermost periphery of the sample; and
A/B is 1 or lower.