Semiconductor package using cavity substrate and manufacturing methods

1. A semiconductor package, comprising:

a cavity substrate including:

a redistribution structure comprising a redistribution structure upper surface having a plurality of pads, a redistribution structure lower surface opposite the redistribution structure upper surface, and one or more redistribution structure sidewalls adjacent the redistribution structure upper surface and the redistribution structure lower surface; and

a cavity layer on the redistribution structure upper surface, the cavity layer comprising a cavity layer upper surface, a cavity layer lower surface opposite the cavity layer upper surface, one or more cavity layer sidewalls adjacent the cavity layer upper surface and the cavity layer lower surface, and a cavity in the cavity layer upper surface that exposes one or more pads of the plurality of pads;

a semiconductor die in the cavity of the cavity layer, the semiconductor die comprising a semiconductor die first surface, a semiconductor die second surface opposite the semiconductor die first surface, one or more semiconductor die sidewalls adjacent the semiconductor die first surface and the semiconductor die second surface, and a plurality of conductive structures along the semiconductor die second surface that are operatively coupled to integrated circuitry of the semiconductor die;

a trench that passes through a cavity layer sidewall from the one or more cavity layer sidewalls; and

an encapsulant layer that encapsulates the semiconductor die in the cavity of the cavity layer and that covers the one or more redistribution structure sidewalls, wherein the encapsulant layer further fills the trench.

2. The semiconductor package of claim 1 , wherein the redistribution structure lower surface comprises a plurality of external connection structures that are electrically connected to the plurality of pads.

3. The semiconductor package of claim 1 , further comprising an underfill material between the semiconductor die second surface the redistribution structure upper surface.

4. The semiconductor package of claim 1 , further comprising:

a second cavity substrate over the cavity substrate, the second cavity substrate includes an interposer and a second cavity layer having a second cavity; and

wherein the semiconductor die is further in the second cavity.

5. The semiconductor package of claim 1 , wherein the encapsulant layer fills a gap between the semiconductor die second surface and the redistribution structure upper surface.

6. The semiconductor package of claim 1 , further comprising a plurality of conductive interconnect structures that pass through the cavity layer and between the cavity layer upper surface and the cavity layer lower surface and that are physically and electrically connected to pads from the plurality of pads.

7. The semiconductor package of claim 6 , further comprising:

a semiconductor package comprising a semiconductor package upper surface, a semiconductor package lower surface opposite the semiconductor package upper surface, and a plurality of second external connection structures along the semiconductor package lower surface;

wherein the plurality of second external connection structures are physically and electrically connected to upper surfaces of the plurality of conductive interconnect structures.

8. The semiconductor package of claim 6 , further comprising an interposer on the cavity layer upper surface, the interposer comprising a plurality of second pads on an upper surface of the interposer.

9. The semiconductor package of claim 8 , further comprising:

a semiconductor package comprising a semiconductor package upper surface, a semiconductor package lower surface opposite the semiconductor package upper surface, and a plurality of second external connection structures along the semiconductor package lower surface;

wherein the plurality of second external connection structures are physically and electrically connected to the plurality of second pads.

10. A semiconductor package, comprising:

a cavity substrate including:

a redistribution structure comprising a redistribution structure upper surface having a plurality of pads, a redistribution structure lower surface opposite the redistribution structure upper surface, and one or more redistribution structure sidewalls adjacent the redistribution structure upper surface and the redistribution structure lower surface; and

a cavity layer on the redistribution structure upper surface, the cavity layer comprising a cavity layer upper surface, a cavity layer lower surface opposite the cavity layer upper surface, one or more cavity layer sidewalls adjacent the cavity layer upper surface and the cavity layer lower surface, a cavity in the cavity layer upper surface that exposes one or more pads from the plurality of pads, and a trench that passes through a cavity layer sidewall from the one or more cavity layer sidewalls;

a semiconductor die in the cavity of the cavity layer, the semiconductor die comprising a semiconductor die first surface, a semiconductor die second surface opposite the semiconductor die first surface, one or more semiconductor die sidewalls adjacent the semiconductor die first surface and the semiconductor die second surface, and a plurality of conductive structures along the semiconductor die second surface that are operatively coupled to integrated circuitry of the semiconductor die; and

an encapsulant that encapsulates the semiconductor die in the cavity of the cavity layer and fills the trench.

11. The semiconductor package of claim 10 , wherein the redistribution structure lower surface comprises a plurality of external connection structures that are electrically connected to the plurality of pads.

12. The semiconductor package of claim 10 , further comprising:

an underfill material between the semiconductor die second surface the redistribution structure upper surface;

wherein the encapsulant further encapsulates the underfill material.

13. The semiconductor package of claim 10 , wherein the encapsulant fills a gap between the semiconductor die second surface and the redistribution structure upper surface.

14. The semiconductor package of claim 10 , further comprising:

a plurality of conductive interconnect structures that pass through the cavity layer and between the cavity layer upper surface and the cavity layer lower surface and that are physically and electrically connected to pads from the plurality of pads; and

a semiconductor package comprising a plurality of second external connection structures that are physically and electrically connected to the plurality of conductive interconnect structures.

15. The semiconductor package of claim 10 , further comprising:

a plurality of conductive interconnect structures that pass through the cavity layer and between the cavity layer upper surface and the cavity layer lower surface and that are physically and electrically connected to pads from the plurality of pads;

an interposer on the cavity layer upper surface, the interposer comprising a plurality of second pads on an upper surface of the interposer; and

a semiconductor package comprising a plurality of second external connection structures that are physically and electrically connected to the plurality of second pads.

16. A method of fabricating a plurality of semiconductor packages, the method comprising:

placing a plurality of semiconductor dies in a plurality of cavity substrates, wherein:

each semiconductor die comprises a semiconductor die first surface, a semiconductor die second surface opposite the semiconductor die first surface, one or more semiconductor die sidewalls adjacent the semiconductor die first surface and the semiconductor die second surface, and a plurality of conductive structures along the semiconductor die second surface that are operatively coupled to integrated circuitry of the semiconductor die; and

each cavity substrate comprises a redistribution structure comprising a redistribution structure upper surface having a plurality of pads, a redistribution structure lower surface opposite the redistribution structure upper surface, and one or more redistribution structure sidewalls adjacent the redistribution structure upper surface and the redistribution structure lower surface; and

a cavity layer on the redistribution structure upper surface, the cavity layer comprising a cavity layer upper surface, a cavity layer lower surface opposite the cavity layer upper surface, one or more cavity layer sidewalls adjacent the cavity layer upper surface and the cavity layer lower surface, a cavity in the cavity layer upper surface that exposes one or more pads from the plurality of pads, and a trench that passes through a cavity layer sidewall from the one or more cavity layer sidewalls;

attaching attachment structures of each semiconductor die to the plurality of pads of the redistribution structure that are exposed by the cavity of each cavity substrate; and

encapsulating, via an encapsulating material, the plurality of semiconductor dies in the plurality of cavity substrates such that the trench of each cavity substrate is filled with the encapsulating material.

17. The method of claim 16 , wherein said encapsulating comprises covering a sidewall of the redistribution structure for each cavity substrate.

18. The method of claim 16 , further comprising:

stacking semiconductor package over the encapsulated semiconductor die; and

electrically connecting the semiconductor package to the redistribution structure of each cavity substrate.