IP Library Granted Patent US 10,953,593
Granted Patent B2
US 10,953,593 · App. 15/954,328 · Granted Mar 23, 2021

Molding compound including a carbon nano-tube dispersion

Inventors: Myung Jin Yim (San Jose, CA); Jason M. Brand (Placerville, CA)
Assignee: Micron Technology, Inc.
B29C59/16B29C59/005B82Y30/00H01L23/295H01L23/544B29K2507/04B29L2031/712H01L23/3128H01L24/45H01L24/48H01L24/73H01L2223/54406H01L2223/54433H01L2223/54486H01L2224/05599H01L2224/32225H01L2224/45144H01L2224/48091H01L2224/48227H01L2224/48465H01L2224/73265H01L2924/00014H01L2924/12042H01L2924/15183H01L2924/15311H01L2924/181H01L2924/1815
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Quick Facts
Patent No.
US 10,953,593
App. No.
15/954,328
Granted
Mar 23, 2021
Kind
B2
Abstract

Various embodiments disclose a molding compound comprising a resin, a filler, and a carbon nano-tube dispersion and methods of forming a package using the molding compound are disclosed. The carbon non-tube dispersion has a number of carbon nano-tubes with surfaces that are chemically modified by a functional group to chemically bridge the surfaces of the carbon nano-tubes and the resin, improving adhesion between the carbon nano-tubes and the resin and reducing agglomeration between various ones of the carbon nano-tubes. The carbon nano-tube dispersion achieves a low average agglomeration size in the molding compound thereby providing desirable electro-mechanical properties and laser marking compatibility. A shallow laser mark may be formed in a mold cap with a maximum depth of less than about 10 microns. Other apparatuses and methods are disclosed.

Claims (31)

1. A semiconductor package, comprising:

a molding compound, including:

a resin; and

a number of carbon nano-tubes having surfaces that are chemically modified by a functional group, with reference to non-chemically modified carbon nano-tubes, the number of carbon nano-tubes with surfaces that are chemically modified by the functional group chemically bridge surfaces of the carbon nano-tubes and the resin to improve adhesion therebetween and reduce agglomeration between various ones of the number of carbon nano-tubes to an agglomeration size of less than about one micron, thereby increasing heat absorption of the molding compound.

2. The semiconductor package of claim 1 , wherein the chemical modification includes a silane coupling agent anchored at one end to surfaces of the number of carbon nano-tubes and an opposing end of the silane coupling agent being bonded to the functional group.

3. The semiconductor package of claim 1 , wherein the functional group is an epoxide group.

4. The semiconductor package of claim 1 , further comprising a filler material comprising silica.

5. The semiconductor package of claim 1 , wherein the resin comprises an epoxy.

6. The semiconductor package of claim 1 , wherein the resin comprises an organic polymer resin reinforced with glass fibers.

7. The semiconductor package of claim 1 , wherein the filler comprises between about 60 percent by weight to about 89 percent by weight of the molding compound.

8. The semiconductor package of claim 1 , wherein the number of carbon nano-tubes comprises about 0.001 percent by weight to about 0.05 percent by weight of the molding compound.

9. The semiconductor package of claim 1 , wherein a portion of the molding compound includes a mark on a surface of the semiconductor package, the mark having a depth of less than about 10 microns.

10. The semiconductor package of claim 1 , wherein the agglomeration size of the carbon nano-tubes of less than about one micron is an average agglomeration size.

11. The semiconductor package of claim 1 , wherein the molding compound comprises:

the resin being about 10 percent by weight to about 30 percent by weight;

the number of carbon nano-tubes being about 0.001 percent by weight to about 0.05 percent by weight; and

the filler being about 60 percent by weight to about 90 percent by weight.

12. The semiconductor package of claim 1 , further comprising at least one integrated circuit chip.

13. The semiconductor package of claim 12 , wherein the molding compound is formed as a mold cap over at least one surface of the integrated circuit chip.

14. The semiconductor package of claim 1 , wherein the number of carbon nano-tubes each have a diameter of about 1 nm to about 10 nm and a length of less than about 100 nm.

15. A package, comprising:

an integrated circuit chip; and

a mold cap covering the integrated circuit chip, the mold cap including a resin, a filler, and a carbon nano-tube dispersion having a number of carbon nano-tubes with surfaces that are chemically modified by a functional group, with reference to non-chemically modified carbon nano-tubes, the carbon nano-tubes with surfaces that are chemically modified by the functional group chemically bridge surfaces of the carbon nano-tubes and the resin to improve adhesion therebetween and reduce agglomeration between various ones of the number of carbon nano-tubes to an agglomeration size of less about than one micron, thereby increasing heat absorption of the molding compound, the number of carbon nano-tubes each having a diameter of about 1 nm to about 10 nm and a length of less than about 100 nm.

16. The package of claim 15 , wherein the chemical modification includes a silane coupling agent anchored at one end to surfaces of the number of carbon nano-tubes to result in C—O—Si covalent bonding at the surfaces of the carbon nano-tubes, an opposing end of the silane coupling agent being bonded to the functional group.

17. The package of claim 16 , wherein the chemical modification further includes 3-glycidoxypropyltlimethoxysilane.

18. The package of claim 15 , wherein a height of the mold cap over the integrated circuit chip is from about 50 microns to about 150 microns.

19. A molding compound, comprising:

a resin;

a filler; and

a carbon nano-tube dispersion having a number of carbon nano-tubes having surfaces that are chemically modified by a functional group, with reference to non-chemically modified carbon nano-tubes, the number of carbon nano-tubes with surfaces that are chemically modified by the functional group chemically bridge surfaces of the carbon nano-tubes and the resin to improve adhesion between the carbon nano-tubes and the resin and reduce agglomeration between various ones of the number of carbon nano-tubes to an average agglomeration size of less than about one micron, thereby increasing electrical resistance in the molding compound as compared with a number of agglomerated carbon nano-tubes, the number of carbon nano-tubes each having a diameter of about 1 nm to about 10 nm and a length of less than about 100 nm.

20. The molding compound of claim 18 , wherein the number of carbon nano-tubes is about 0.001 percent by weight to about 0.05 percent by weight.

Assignments (4)
RELEASE OF SECURITY INTEREST Recorded Nov 12, 2019
From: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
Reel/Frame 051028/0001 →
RELEASE OF SECURITY INTEREST Recorded Oct 11, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 050713/0001 →
SUPPLEMENT NO. 9 TO PATENT SECURITY AGREEMENT Recorded Aug 9, 2018
From: MICRON TECHNOLOGY, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
Reel/Frame 047282/0463 →
SECURITY INTEREST Recorded Jul 13, 2018
From: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 047540/0001 →
Continuity (3)
Continuation 14713881 · May 15, 2015
Division 12343398 · Dec 23, 2008
Related Publication 20180229421A1 · Aug 16, 2018