IP Library Granted Patent US 10,700,265
Granted Patent B2
US 10,700,265 · App. 15/956,885 · Granted Jun 30, 2020

Semiconductor device having circuitry positioned above a buried magnetic sensor

Inventors: Francois Hebert (San Mateo, CA); Seong Woo Lee (Cheongju-si, KR); Jong Yeul Jeong (Cheongju-si, KR); Hee Baeg An (Cheongju-si, KR); Kang Sup Shin (Cheongju-si, KR); Seong Min Choe (Seongnam-si, KR); Young Joon Kim (Seoul, KR)
Assignee: MagnaChip Semiconductor, Ltd.
H01L43/065G01R33/072
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Quick Facts
Patent No.
US 10,700,265
App. No.
15/956,885
Granted
Jun 30, 2020
Kind
B2
Abstract

A semiconductor device including a circuitry, a magnetic sensor, and a buried oxide. The circuitry is formed on a substrate. The magnetic sensor has a sensing area formed under the circuitry. The buried oxide is disposed between the circuitry and the magnetic sensor. The sensing area comprises an N-doped area and a P-doped area doped deeper than the N-doped area, and sensor contacts connect the sensing area with the circuitry through the buried oxide.

Claims (25)

1. A semiconductor device comprising:

a circuitry disposed on a silicon on insulator (SOI) substrate comprising a semiconductor substrate, a buried oxide, and an SOI layer; and

a magnetic sensor, disposed under the circuitry, comprising:

a sensing area formed in the semiconductor substrate; and

a sensor contact passing through the buried oxide to connect with the sensing area, wherein the circuitry is formed on the SOI layer.

2. The semiconductor device of claim 1 , wherein the sensing area comprises:

a N-doped area; and

a P-doped area doped deeper than the N-doped area.

3. The semiconductor device of claim 1 ,

wherein the sensor contact passes through the SOI layer.

4. The semiconductor device of claim 1 ,

wherein the sensor contact is connected by a wire with the circuitry.

5. The semiconductor device of claim 1 ,

wherein the magnetic sensor is formed under the buried oxide.

6. The semiconductor device of claim 1 , further comprising:

an isolation area formed around the sensor contact.

7. The semiconductor device of claim 1 , further comprising:

an intermetal dielectric formed on the SOI layer; and

an integrated magnetic concentrator (IMC) formed on the intermetal dielectric.

8. The semiconductor device of claim 7 ,

wherein the IMC comprises a non-planar surface.

9. The semiconductor device of claim 7 ,

wherein the IMC is in contact with the intermetal dielectric and is in contact with the buried oxide.

10. The semiconductor device of claim 1 , wherein an epitaxial layer is formed on a top surface of the SOI layer.

11. The semiconductor device of claim 10 , wherein the sensor contact connected to the sensing area is formed through the epitaxial layer.

Assignments (3)
CHANGE OF NAME Recorded Mar 12, 2024
From: KEY FOUNDRY CO., LTD.
To: SK KEYFOUNDRY INC.
Reel/Frame 066794/0290 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 23, 2024
From: HEBERT, FRANCOIS; LEE, SEONG WOO; JEONG, JONG YEUL; AN, HEE BAEG; SHIN, KANG SUP; CHOE, SEONG MIN; KIM, YOUNG JOON
To: MAGNACHIP SEMICONDUCTOR, LTD.
Reel/Frame 066544/0852 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 3, 2020
From: MAGNACHIP SEMICONDUCTOR, LTD.
To: KEY FOUNDRY CO., LTD.
Reel/Frame 053703/0227 →
Priority Claims (1)
KR 10-2014-0026765 · Mar 6, 2014 · national
Continuity (2)
Division 14471678 · Aug 28, 2014
Related Publication 20180240965A1 · Aug 23, 2018