Package-on-package semiconductor assemblies and methods of manufacturing the same
Package-on-package systems for packaging semiconductor devices. In one embodiment, a package-on-package system comprises a first semiconductor package device and a second semiconductor package device. The first package device includes a base substrate including a first side having a die-attach region and a peripheral region, a first semiconductor die attached to the base substrate at the die-attach region, wherein the first semiconductor die has a front side facing the first side of the base substrate and a backside spaced apart from the first side of the base substrate by a first distance, and a high density interconnect array in the perimeter region of the base substrate outside of the die-attach region. The interconnect array has a plurality of interconnects that extend from the first side of the base substrate by a second distance greater than the first distance. The second semiconductor device package is electrically coupled corresponding individual interconnects.
1. A method of forming a package-on-package semiconductor assembly, comprising:
providing a base substrate having a first side with a die-attach region and an interconnect region, a second side, and an interconnect assembly having a plurality of conductive interconnects that extend from the interconnect region of the first side, wherein the interconnect assembly comprises first and second interconnect structures, and wherein the first interconnect structure has a first stratum of matrix material and a plurality of first interconnect segments arranged in an interconnect pattern, and wherein the second interconnect structure is on the first interconnect structure, and wherein the second interconnect structure has a second stratum of matrix material and a plurality of second interconnect segments arranged in the interconnect pattern such that individual second interconnect segments are aligned with corresponding individual first interconnect segments;
mounting a first semiconductor die to the base substrate at the die-attach region such that the first semiconductor die is electrically coupled to the base substrate, wherein the interconnects are at the interconnect region of the base substrate before the first semiconductor die is mounted to the die-attach region of the base substrate; and
electrically coupling a second semiconductor device package to the conductive interconnects, wherein the second semiconductor device package has at least one second semiconductor die electrically coupled to an interposer substrate.
2. The method of claim 1 wherein:
the conductive interconnects are arranged in the interconnect pattern in the peripheral region of the base substrate;
and
the method comprises forming the first interconnect structure on the first side of the base substrate and then forming the second interconnect structure on the first interconnect structure.
3. The method of claim 2 , further comprising forming an opening through the first stratum of matrix material to expose the die-attach region of the base substrate and then forming another opening through the second stratum of matrix material such that the opening through the second stratum of matrix material is aligned with the opening through the first stratum of matrix material.
4. The method of claim 2 further comprising forming an opening through the first and second stratums of matrix material in a single step such that the die-attach region is accessible via the opening.
5. The method of claim 2 , further comprising forming additional interconnect structures sequentially to build up the interconnect assembly to a desired height relative to the front side of the base substrate.
6. The method of claim 2 wherein the first and second stratums of matrix material comprise a build-up material that is deposited in a flowable condition and then cured on the base substrate.
7. The method of claim 1 wherein:
the conductive interconnects are arranged in the interconnect pattern in the peripheral region of the base substrate;
and
the method comprises forming the first interconnect structure apart from the base substrate and then attaching the first interconnect structure to the first side of the base substrate and forming the second interconnect structure apart from the base substrate and then attaching the second interconnect structure to the first interconnect structure.
8. The method of claim 1 wherein:
the conductive interconnects are arranged in the interconnect pattern in the peripheral region of the base substrate;
and
the method comprises forming the first and second interconnect structures apart from the base substrate, attaching the first and second interconnect structures together apart from the base substrate, and then attaching the first interconnect structure to the first side of the base substrate.
9. A method of forming a base substrate for a package-on-package semiconductor assembly, comprising:
forming a plurality of conductive interconnects in an interconnect region at a first side of a base substrate such that the interconnects extend from the first side of the base substrate, wherein the interconnects comprise first and second interconnect structures, and wherein the first interconnect structure has a first stratum of matrix material and a plurality of first interconnect segments arranged in an interconnect pattern, and wherein the second interconnect structure is on the first interconnect structure, and wherein the second interconnect structure has a second stratum of matrix material and a plurality of second interconnect segments arranged in the interconnect pattern such that individual second interconnect segments are aligned with corresponding individual first interconnect segments; and
leaving a die-attach region at the first side of the base substrate exposed for subsequent mounting of a semiconductor die to the die-attach region, wherein the interconnect region is spaced laterally with respect to the die-attach region.
10. The method of claim 9 wherein forming the plurality of interconnects comprises:
forming the first interconnect structure on the first side of the base substrate in the interconnect region
forming the second interconnect structure after the first interconnect structure is formed.
11. The method of claim 9 wherein forming the plurality of interconnects comprises:
forming the first interconnect structure apart from the base substrate;
forming the second interconnect structure apart from the base substrate;
attaching the first interconnect structure to the first side of the base substrate in the interconnect region; and
attaching the second interconnect structure to the first interconnect structure such that individual second interconnect segments are aligned with corresponding individual first interconnect segments.
12. The method of claim 9 wherein forming the plurality of interconnects comprises:
forming the first interconnect structure apart from the base substrate;
forming the second interconnect structure apart from the base substrate;
attaching the first and second interconnect structures together while they are apart from the base substrate such that individual second interconnect segments are aligned with corresponding individual first interconnect segments; and
attaching the first interconnect structure to the first side of the base substrate after the first and second interconnect structure have been attached to each other.