Semiconductor device with improved field layer
View Patent ↗A semiconductor device constituted of: a semiconductor layer; and a field layer patterned on said semiconductor layer, said field layer constituted of material having characteristics which block diffusion of mobile ions and maintain structural integrity at activation temperatures of up to 1200 degrees centigrade.
1. A semiconductor device comprising:
a semiconductor layer having at least one doped well formed therein; and
a field layer patterned on said semiconductor layer, said field layer adjacent at least a portion of said at least one doped well, said field layer constituted of material having characteristics that:
block diffusion of mobile ions; and
maintain structural integrity at processing temperatures of up to 1200 degrees centigrade.
2. The semiconductor device of claim 1 , further comprising a metal layer deposited on at least a portion of said semiconductor layer, said field layer and said metal layer completely covering said at least one doped well.
3. The semiconductor device of claim 1 , wherein said patterned field layer material characteristics block said diffusion of mobile ions for at least 1 hour at a temperature of 450 degrees centigrade.
4. The semiconductor device of claim 1 , wherein said patterned field layer material characteristics block said diffusion of mobile ions for at least 1000 hours at a temperature of 200 degrees centigrade.
5. The semiconductor device of claim 1 , wherein said patterned field layer exhibits residual film stress of less than 1 giga-dyne per centimeter squared.
6. The semiconductor device of claim 1 , wherein said material is selected from the group consisting of: silicon oxynitride; phosphosilicate glass; borosilicate glass; and borophosphosilicate glass.
7. A semiconductor device comprising:
a semiconductor layer; and
a field layer patterned on said semiconductor layer, said field layer constituted of material having characteristics that:
exhibit residual film stress of less than 2 giga-dynes per centimeter squared;
block diffusion of mobile ions; and
maintain structural integrity at processing temperatures of up to 1200 degrees centigrade.
8. A semiconductor device comprising:
a semiconductor layer; and
a field layer patterned on said semiconductor layer, said field layer constituted of material having characteristics that:
exhibit a refractive index of 1.55-1.60 as determined by an ellipsometer with a 633 nm light source;
block diffusion of mobile ions; and
maintain structural integrity at processing temperatures of up to 1200 degrees centigrade.
9. A semiconductor device comprising:
a semiconductor layer; and
a field layer patterned on said semiconductor layer, said field layer having a first face and a second face opposing said first face, said field layer patterned on said semiconductor layer at said first face, and wherein the refractive index of said patterned field layer increases from said first face to said second face, said field layer constituted of material having characteristics that:
block diffusion of mobile ions and
maintain structural integrity at processing temperatures of up to 1200 degrees centigrade.
10. The semiconductor device of claim 9 , wherein said patterned field layer exhibits a refractive index of 1.47-1.49 at said first face, said refractive index at said first face determined by an ellipsometer with a 633 nm light source.
11. The semiconductor device of claim 10 , wherein said patterned field layer exhibits a refractive index of 1.71-1.72 at said second face, said refractive index at said second face determined by the ellipsometer with the 633 nm light source.
12. A semiconductor device fabrication method, the method comprising:
patterning a field layer on a first face of a semiconductor layer, the field layer constituted of material having characteristics which block diffusion of mobile ions;
depositing at least one doped well in the semiconductor layer; and activating said at least one doped well,
wherein said field layer material characteristics maintain structural integrity at processing temperatures of up to 1200 degrees centigrade.
13. The method of claim 12
wherein said patterned field layer is adjacent at least a portion of said at least one doped well, said method further comprising:
depositing a metal layer on at least a portion of the first face of the semiconductor layer, said patterned field layer and said deposited metal layer completely covering said at least one doped well; and
depositing a low contact resistance metal on a second face of the semiconductor layer, the second face opposing the first face thereof,
wherein said patterning of the field layer is performed after said at least one doped well activation.
14. The method of claim 12 ,
wherein said patterned field layer is adjacent at least a portion of said at least one doped well, said method further comprising:
forming a silicide layer on a second face of the semiconductor layer, the second face opposing the first face thereof; and
depositing a metal layer on at least a portion of the first face of the semiconductor layer, said patterned field layer and said deposited metal layer completely covering said at least one doped well,
wherein said patterning of the field layer is performed after said at least one doped well activation and said formation of the silicide layer.
15. The method of claim 12 , wherein said patterned field layer material characteristics block said diffusion of mobile ions for at least 1 hour at a temperature of 450 degrees centigrade.
16. The method of claim 12 , wherein said patterned field layer material characteristics block said diffusion of mobile ions for at least 1000 hours at a temperature of 200 degrees centigrade.
17. The method of claim 12 , wherein said patterned field layer exhibits residual film stress of less than 2 giga-dynes per centimeter squared.
18. The method of claim 12 , wherein said patterned field layer exhibits residual film stress of less than 1 giga-dyne per centimeter squared.
19. The method claim 12 , wherein said patterned field layer exhibits a refractive index of 1.55-1.60 as determined by an ellipsometer with a 633 nm light source.
20. The method of claim 12 , wherein said patterned field layer exhibits a first face and a second face, opposing the first face thereof, the first face of the field layer patterned on the first face of the semiconductor layer, and
wherein the refractive index of said patterned field layer increases from the first face of the field layer to the second face thereof.
21. The method of claim 20 , wherein said patterned field layer exhibits a refractive index of 1.47-1.49 at said first face, said refractive index at said first face determined by an ellipsometer with a 633 nm light source.
22. The method of claim 21 , wherein said patterned field layer exhibits a refractive index of 1.71-1.72 at said second face, said refractive index at said second face determined by the ellipsometer with the 633 nm light source.
23. The method of claim 12 , wherein the material is selected from the group consisting of: silicon oxynitride; phosphosilicate glass; borosilicate glass; and borophosphosilicate glass.