Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures
Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process are disclosed. The methods may include: providing a substrate comprising a dielectric surface into a reaction chamber; depositing a nucleation film directly on the dielectric surface; and depositing a molybdenum metal film directly on the nucleation film, wherein depositing the molybdenum metal film includes: contacting the substrate with a first vapor phase reactant comprising a molybdenum halide precursor; and contacting the substrate with a second vapor phase reactant comprising a reducing agent precursor. Semiconductor device structures including a molybdenum metal film disposed over a surface of a dielectric material with an intermediate nucleation film are also disclosed.
1. A method for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process, the method comprising:
providing a substrate comprising a dielectric surface into a reaction chamber;
depositing a nucleation film comprising a molybdenum compound material directly on the dielectric surface, wherein depositing the nucleation film comprises repeating unit cycles of the cyclical deposition process to form the nucleation film having a thickness of less than 10 Angstroms, wherein at least one of the unit cycles comprises:
contacting the substrate with a first vapor phase reactant comprising a molybdenum precursor; and
contacting the substrate with a second vapor phase reactant comprising at least one of a nitrogen precursor, an oxygen precursor, or a carbon precursor, wherein the nitrogen precursor comprises at least one of ammonia, hydrazine, triazane, tertbutylhydrazine, methylhydrazine, dimethylhydrazine, or a nitrogen plasma, wherein the oxygen precursor comprises at least one of water, hydrogen peroxide, ozone, or an oxide of nitrogen comprising at least one of nitrogen monoxide, nitrous oxide, or nitrogen dioxide, and wherein the carbon precursor comprises a hydrocarbon; and
depositing a molybdenum metal film directly on the nucleation film, wherein depositing the molybdenum metal film comprises:
contacting the substrate with a first vapor phase reactant comprising a molybdenum halide precursor; and
contacting the substrate with a second vapor phase reactant comprising a reducing agent precursor.
2. The method of claim 1 , wherein the molybdenum compound material comprises a molybdenum binary compound material.
3. The method of claim 2 , wherein the molybdenum binary compound material comprises at least one of a molybdenum nitride, a molybdenum carbide, or a molybdenum oxide.
4. The method of claim 1 , wherein the molybdenum metal film has a r.m.s. surface roughness (R a ) of less than 5 percent of the total thickness of the molybdenum metal film.
5. The method of claim 1 , wherein depositing the molybdenum metal film further comprises heating the substrate to substrate temperature of between 400° C. and 700° C.
6. The method of claim 1 , wherein the molybdenum halide comprises a molybdenum chalcogenide halide.
7. The method of claim 6 , wherein the molybdenum chalcogenide halide comprises a molybdenum oxyhalide selected from the group comprising: a molybdenum oxychloride, a molybdenum oxyiodide, or a molybdenum oxybromide.
8. The method of claim 7 , wherein the molybdenum oxychloride comprises molybdenum (IV) dichloride dioxide (MoO 2 Cl 2 ).
9. The method of claim 1 , wherein the molybdenum metal film is a crystalline film.
10. The method of claim 1 , wherein the dielectric surface comprises a gap feature and the molybdenum metal film fills the gap feature without the formation of a seam.
11. The method of claim 1 , wherein the molybdenum precursor is selected from the group consisting of a molybdenum nitride precursor, a molybdenum carbide precursor, a molybdenum oxide precursor, and a molybdenum silicide precursor.
12. The method of claim 1 , wherein the molybdenum halide precursor is selected from the group consisting of a molybdenum chalcogenide halide and a molybdenum oxyhalide.
13. The method of claim 1 , wherein the nucleation film is a discontinuous film.
14. The method of claim 1 , wherein depositing molybdenum metal film comprises repeating unit cycles of the cyclical deposition process to form the molybdenum metal film having a thickness of between 50 Angstroms and 200 Angstroms.
15. The method of claim 1 , wherein providing the substrate comprises providing an engineered substrate, wherein the dielectric surface is disposed over a bulk support with an intervening buried oxide (BOX) layer disposed therebetween.
16. The method of claim 1 , wherein the thickness of the nucleation film is less than 5 Angstroms.
17. The method of claim 1 , wherein the thickness of the nucleation film is less than 3 Angstroms.