Methods used in forming an array of elevationally-extending strings of memory cells, methods of forming an array of elevationally-extending strings of memory cells, and methods of forming an array of vertical strings of memory cells
A method used in forming an array of elevationally-extending strings of memory cells comprises forming a lower stack comprising vertically-alternating insulative tiers and wordline tiers. Lower channel openings are in the lower stack. A bridge is epitaxially grown that covers individual of the lower channel openings. A lower void space is beneath individual of the bridges in the individual lower channel openings. An upper stack is formed above the lower stack. The upper stack comprises vertically-alternating insulative tiers and wordline tiers. Upper channel openings are formed into the upper stack to the individual bridges to form interconnected channel openings individually comprising one of the individual lower channel openings and individual of the upper channel openings. The interconnected channel openings individually have one of the individual bridges there-across. The individual bridges are penetrated through to uncover individual of the lower void spaces. Transistor channel material is formed in an upper portion of the interconnected channel openings elevationally along the vertically-alternating tiers in the upper stack.
1. A method used in forming an array of elevationally-extending strings of memory cells, comprising:
forming a lower stack comprising vertically-alternating insulative tiers and wordline tiers, lower channel openings being in the lower stack;
epitaxially growing a bridge that covers individual of the lower channel openings, a lower void space being beneath individual of the bridges in the individual lower channel openings;
forming an upper stack above the lower stack, the upper stack comprising vertically-alternating insulative tiers and wordline tiers;
forming upper channel openings into the upper stack to the individual bridges to form interconnected channel openings individually comprising one of the individual lower channel openings and individual of the upper channel openings, the interconnected channel openings individually having one of the individual bridges there-across;
penetrating through the individual bridges to uncover individual of the lower void spaces; and
forming transistor channel material in an upper portion of the interconnected channel openings elevationally along the vertically-alternating tiers in the upper stack.
2. The method of claim 1 wherein the bridge comprises elemental-form silicon.
3. The method of claim 1 wherein the bridge comprises SiGe.
4. The method of claim 1 wherein the epitaxial growing comprises heteroepitaxy.
5. The method of claim 1 wherein the epitaxial growing is conducted selectively from a sidewall surface of a seed material that surrounds the individual lower channel openings.
6. The method of claim 5 comprising masking material atop the seed material during the epitaxial growing, and further comprising removing all of the masking material before forming the upper stack.
7. The method of claim 5 comprising masking material atop the seed material during the epitaxial growing, and further comprising forming the upper stack atop the masking material.
8. The method of claim 1 wherein the epitaxial growing is conducted from a sidewall surface and from a top surface of a seed material that surrounds the individual lower channel openings.
9. The method of claim 1 wherein the epitaxial growing is conducted from a sidewall surface of a seed material that surrounds the individual lower channel openings, sidewalls of the individual lower channel openings being masked below the seed material during the epitaxial growing.
10. The method of claim 9 wherein the sidewalls of the individual lower channel openings below the seed material are masked with mask material during the epitaxial growing, and further comprising:
forming the mask material all over the sidewall surface of the seed material within the individual lower channel openings; and
elevationally recessing the mask material to below a top surface of the seed material prior to the epitaxial growing.
11. The method of claim 10 wherein the elevationally recessing is downward at least to a bottom surface of the seed material.
12. The method of claim 1 wherein the forming of the transistor channel material forms the transistor channel material concurrently in both the upper and lower channel openings of the interconnected channel openings.
13. A method used in forming an array of elevationally-extending strings of memory cells, comprising:
forming a lower stack comprising vertically-alternating insulative tiers and wordline tiers, lower channel openings being in the lower stack, lower-stack memory cell material being laterally across a base and along sidewalls of individual of the lower channel openings;
removing a portion of the lower-stack memory cell material that is laterally across individual of the bases in the individual lower channel openings;
epitaxially growing a bridge that covers individual of the lower channel openings, a lower void space being beneath individual of the bridges in the individual lower channel openings;
forming an upper stack above the lower stack, the upper stack comprising vertically-alternating insulative tiers and wordline tiers;
forming upper channel openings into the upper stack to the individual bridges to form interconnected channel openings individually comprising one of the individual lower channel openings and individual of the upper channel openings, the interconnected channel openings individually having one of the individual bridges there-across;
forming upper-stack memory cell material laterally across a base and along sidewalls of individual of the upper channel openings;
removing a portion of the upper-stack memory cell material that is laterally across individual of the bases in the individual upper channel openings;
penetrating through the individual bridges to uncover individual of the lower void spaces; and
forming transistor channel material in an upper portion of the interconnected channel openings elevationally along the vertically-alternating tiers in the upper stack.
14. The method of claim 13 wherein the epitaxial growing is conducted from a sidewall surface of a seed material that surrounds the individual lower channel openings, and further comprising elevationally recessing the lower-stack memory cell material to below a top surface of the seed material prior to the epitaxial growing.
15. The method of claim 13 comprising forming a sacrificial liner along sidewalls and the individual bases of the individual lower channel openings after removing the portion of the lower-stack memory cell material and before the epitaxially growing.
16. The method of claim 15 comprising removing all of the sacrificial liner after the penetrating through.
17. The method of claim 15 wherein the sacrificial liner less-than-fills the individual lower channel openings, and further comprising plugging all remaining volume of the individual lower channel openings with sacrificial fill material after forming the sacrificial liner.
18. The method of claim 17 wherein the sacrificial liner comprises polysilicon.
19. The method of claim 18 wherein the sacrificial liner comprises silicon dioxide radially inward of the polysilicon.
20. The method of claim 17 wherein the epitaxial growing is conducted from a sidewall surface of a seed material that surrounds the individual lower channel openings, and further comprising elevationally recessing the sacrificial liner and the sacrificial fill material to below a top surface of the seed material prior to the epitaxial growing.
21. The method of claim 20 comprising elevationally recessing the sacrificial fill material before elevationally recessing the sacrificial liner.
22. The method of claim 20 wherein the sacrificial fill material is recessed elevationally inward to a bottom surface of the seed material.
23. The method of claim 13 comprising forming a sacrificial liner along sidewalls and the individual bases of the individual upper channel openings after removing the portion of the upper-stack memory cell material and before the penetrating.
24. A method of forming an array of vertical strings of memory cells, comprising:
forming a lower stack comprising vertically-alternating insulative tiers and wordline tiers, lower channel openings being in the lower stack;
epitaxially growing a bridge that covers individual of the lower channel openings, a lower void space being beneath individual of the bridges in the individual lower channel openings;
forming an upper stack above the lower stack, the upper stack comprising vertically-alternating insulative tiers and wordline tiers;
forming upper channel openings into the upper stack to the individual bridges to form interconnected channel openings individually comprising one of the individual lower channel openings and individual of the upper channel openings, the interconnected channel openings individually having one of the individual bridges there-across;
penetrating through the individual bridges to uncover individual of the lower void spaces;
forming transistor channel material in individual of the interconnected channel openings vertically along the vertically-alternating tiers in the upper and lower stacks; and
forming the wordline tiers to comprise control-gate material having terminal ends corresponding to control-gate regions of individual memory cells, charge-storage material between the transistor channel material and the control-gate regions, insulative charge-passage material between the transistor channel material and the charge-storage material, and a charge-blocking region between the charge-storage material and individual of the control-gate regions.
25. The method of claim 24 wherein the forming of the wordline tiers to comprise control-gate material occurs after forming the transistor channel material.
26. The method of claim 24 wherein the forming of the wordline tiers to comprise control-gate material occurs before forming the transistor channel material.
27. A method of forming an array of elevationally-extending strings of memory cells, comprising:
forming a lower stack comprising vertically-alternating insulative tiers and wordline tiers, the lower-stack insulative tiers comprising insulative lower-stack first material, the lower-stack wordline tiers comprising lower-stack second material that is of different composition from that of the lower-stack first material, lower channel openings being in the lower stack;
forming at least one of (a): lower-stack charge-blocking material in individual of the lower channel openings and laterally across a base of the individual lower channel openings, or (b): lower-stack charge-storage material in the individual lower channel openings and laterally across the base of the individual lower channel openings;
removing a portion of the at least one of (a) and (b) that is laterally across individual of the bases in the individual lower channel openings;
epitaxially growing a bridge that covers the individual lower channel openings, a lower void space being beneath individual of the bridges in the individual lower channel openings;
forming an upper stack above the lower stack, the upper stack comprising vertically-alternating insulative tiers and wordline tiers, the upper-stack insulative tiers comprising insulative upper-stack first material, the upper-stack wordline tiers comprising upper-stack second material that is of different composition from that of the upper-stack first material;
forming upper channel openings into the upper stack to the individual bridges to form interconnected channel openings individually comprising one of the individual lower channel openings and individual of the upper channel openings, the interconnected channel openings individually having one of the individual bridges there-across;
forming at least one of (c): upper-stack charge-blocking material in individual of the upper channel openings and laterally across a base of the individual upper channel openings, or (d): upper-stack charge-storage material in the individual upper channel openings and laterally across the base of the individual upper channel openings;
removing a portion of the at least one of (c) and (d) that is laterally across individual of the bases in the individual upper channel openings;
penetrating through the individual bridges to uncover individual of the lower void spaces;
forming transistor channel material in an upper portion of the interconnected channel openings elevationally along the vertically-alternating tiers in the upper stack;
forming horizontally-elongated trenches into the upper and lower stacks;
etching the upper-stack second material and the lower-stack second material of the wordline tiers selectively relative to the insulative upper-stack first material and to the insulative lower-stack first material;
forming control-gate material into the wordline tiers through the trenches to be elevationally between the insulative upper-stack first material of the upper-stack alternating tiers and to be elevationally between the insulative lower-stack first material of the lower-stack alternating tiers, the control-gate material having terminal ends corresponding to control-gate regions of individual memory cells;
removing the control-gate material from the individual trenches; and
forming the wordline tiers to comprise the charge-storage material between the transistor channel material and the control-gate regions, insulative charge-passage material between the transistor channel material and the charge-storage material, and a charge-blocking region between the charge-storage material and individual of the control-gate regions.