Metal plating compositions
View Patent ↗Reaction products of primary and secondary diamines and bisanhydrides are included as additives in metal electroplating baths. The metal electroplating baths have good throwing power and deposit metal layers having substantially planar surfaces. The metal plating baths may be used to deposit metal on substrates with surface features such as through-holes and vias.
1. A method comprising:
a) contacting a substrate to be metal plated with a composition comprising: one or more sources of metal ions, wherein the one or more sources of metal ions are chosen from copper salts and tin salts, an electrolyte and a reaction product of one or more reaction products of one or more diamines, wherein the one or more diamines has a formula:
wherein R′ is a linking group and R 13 and R 14 may be the same or different and comprise hydrogen, linear or branched (C 1 -C 12 )alkyl, alkyleneoxy or substituted or unsubstituted (C 6 -C 18 )aryl, wherein R′ has a moiety:
a substituted or unsubstituted (C 6 -C 18 )aryl; R 15 -R 22 may be the same or different and comprise hydrogen, linear or branched (C 1 -C 5 )alkyl, linear or branched hydroxy(C 1 -C 5 )alkyl or linear or branched (C 1 -C 5 )alkoxy, and Z is a carbon atom or nitrogen atom; and p and s may be the same or different and are independently integers of one or greater, e is an integer of 0 to 3, and a, b, c and d may be the same or different and are numbers from 1 or greater; or wherein the one or more diamines has a formula:
wherein R 23 and R 24 may be the same or different and are hydrogen or amino(C 1 -C 10 )alkyl, preferably R 23 and R 24 are hydrogen or amino(C 1 -C 3 )alkyl, and one or more compounds having formula:
wherein R is a linking group having a moiety:
wherein R 1 , R 2 , R 3 and R 4 may be the same or different and comprise hydrogen, linear or branched (C 1 -C 4 )alkyl, hydroxyl, hydroxy(C 1 -C 3 )alkyl, carboxyl, carboxy(C 1 -C 3 )alkyl or (C 1 -C 3 )alkoxy, R 5 and R 6 may be the same or different and comprise hydrogen, carboxyl and carboxy(C 1 -C 3 )alkyl, R 7 , R 8 , R 9 and R 10 may be the same or different and comprise hydrogen, linear or branched (C 1 -C 5 )alkyl, linear or branched hydroxy(C 1 -C 5 )alkyl, carboxy(C 1 -C 3 )alkyl, linear or branched(C 1 -C 5 )alkoxy, R 11 and R 12 may be the same or different and comprise hydrogen or linear or branched (C 1 -C 5 )alkyl, Ar is an aryl group having 5 to 6 carbon atoms; n and m may be the same or different and are integers of 1 to 15; and q, r and t may be the same or different are integers of 1 to 10;
b) contacting the substrate with the composition;
c) applying a current to the substrate; and
d) plating copper, tin or tin-copper alloy on the substrate.
2. The method of claim 1 , wherein the substrate comprises a plurality of through-holes and vias.