IP Library Granted Patent US 10,388,866
Granted Patent B2
US 10,388,866 · App. 16/184,314 · Granted Aug 20, 2019

Methods, apparatuses, and circuits for programming a memory device

Inventors: Andrea Redaelli (Calolziocorte, IT); Agostino Pirovano (Milan, IT); Umberto M. Meotto (Rivoli, IT)
Assignee: Micron Technology, Inc.
H01L45/1286G11C13/003G11C13/0004G11C13/0069H01L27/2436H01L27/2463H01L45/06H01L45/126H01L45/1233H01L45/141H01L45/144H01L45/1608G11C13/04G11C2013/008G11C2213/56G11C2213/76
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Quick Facts
Patent No.
US 10,388,866
App. No.
16/184,314
Granted
Aug 20, 2019
Kind
B2
Abstract

Subject matter described pertains to methods, apparatuses, and circuits for programming a memory device.

Claims (44)

1. An apparatus, comprising:

a memory material having a first edge and a second edge that is laterally offset from the first edge in a first direction;

a separation material positioned over the memory material and having a first edge and a second edge that is laterally offset from the first edge in the first direction; and

a conductive material positioned over the separation material and having a first edge and a second edge that is laterally offset from the first edge in the first direction, wherein the second edge of the separation material and the second edge of the memory material extend farther in the first direction than the second edge of the conductive material.

2. The apparatus of claim 1 , wherein the memory material comprises a programmable portion, and wherein the second edge of the conductive material is laterally offset from a center of the programmable portion of the memory material in a second direction by a distance that is greater than or equal to a height of the separation material, the second direction being different than the first direction.

3. The apparatus of claim 1 , wherein the first edge of the separation material and the first edge of the conductive material are aligned, and wherein the second edge of the conductive material is laterally offset from the second edge of the separation material in a second direction that is different than the first direction.

4. The apparatus of claim 1 , wherein the first edge of the memory material is aligned with the first edge of the conductive material and the second edge of the memory material is aligned with the second edge of the separation material.

5. The apparatus of claim 1 , wherein:

the memory material comprises a programmable portion,

the conductive material is non-overlapping with the programmable portion of the memory material in the first direction, and

the separation material is overlapping with at least a portion the programmable portion in the first direction.

6. The apparatus of claim 1 , further comprising:

a dielectric material positioned below the memory material, the dielectric material comprising a resistive material that is positioned below and in contact with a programmable portion of the memory material.

7. The apparatus of claim 6 , wherein:

the resistive material comprises titanium, titanium nitride, tungsten, tungsten nitride, chromium, or tantalum, or any combination thereof,

the separation material comprises titanium, titanium nitride, tungsten, chromium, tantalum, or any combination thereof, and

the conductive material comprises copper, or aluminum, or any combination thereof.

8. The apparatus of claim 1 , further comprising:

a conductive plug positioned below the memory material; and

a switching device positioned below the conductive plug and coupled with a ground reference.

9. A method of forming an apparatus, comprising:

forming a memory material having a first edge and a second edge that is laterally offset form the first edge in a first direction;

forming, over the memory material, a separation material having a first edge and a second edge that is laterally offset from the first edge in the first direction; and

forming, over the separation material, a conductive material having a first edge and a second edge that is laterally offset from the first edge in the first direction, wherein the second edge of the separation material and the second edge of the memory material extend farther in the first direction than the second edge of the conductive material.

10. The method of claim 9 , further comprising:

forming a resistive material, wherein the memory material is formed over the resistive material; and

forming a dielectric material that at least partially surrounds the resistive material.

11. The method of claim 9 , wherein forming the conductive material comprises removing a portion of the conductive material that lies above a programmable portion of the memory material.

12. The method of claim 9 , further comprising:

forming a conductive path across the memory material, the separation material, and the conductive material.

13. The method of claim 10 , further comprising:

forming a conductive plug, wherein the resistive material is formed over the conductive plug; and

forming a switching device, wherein the conductive plug is formed over the switching device.

14. The method of claim 10 , wherein:

the resistive material comprises titanium, titanium nitride, tungsten, tungsten nitride, chromium, or tantalum, or any combination thereof,

the separation material comprises titanium, titanium nitride, tungsten, chromium, tantalum, or any combination thereof, and

the conductive material comprises copper, or aluminum, or any combination thereof.

15. The method of claim 9 , wherein the memory material comprises a programmable portion, and wherein the second edge of the conductive material is laterally offset from a center of the programmable portion of the memory material in a second direction by a distance that is greater than or equal to a height of the separation material, the second direction being different than the first direction.

16. The method of claim 9 , wherein the first edge of the separation material and the first edge of the conductive material are aligned, and wherein the second edge of the conductive material is laterally offset from the second edge of the separation material in a second direction that is different than the first direction.

17. The method of claim 9 , wherein the first edge of the memory material is aligned with the first edge of the conductive material and the second edge of the memory material is aligned with the second edge of the separation material.

18. The method of claim 9 , wherein:

the memory material comprises a programmable portion,

the conductive material is non-overlapping with the programmable portion of the memory material in the first direction, and

the separation material is overlapping with at least a portion the programmable portion in the first direction.

Assignments (4)
RELEASE OF SECURITY INTEREST Recorded Nov 15, 2019
From: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 051026/0568 →
RELEASE OF SECURITY INTEREST Recorded Oct 14, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 050718/0764 →
SUPPLEMENT NO. 11 TO PATENT SECURITY AGREEMENT Recorded Jan 16, 2019
From: MICRON TECHNOLOGY, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
Reel/Frame 048082/0860 →
SUPPLEMENT NO. 2 TO PATENT SECURITY AGREEMENT Recorded Jan 16, 2019
From: MICRON TECHNOLOGY, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 048082/0889 →
Continuity (5)
Continuation 15858780 · Dec 29, 2017
Continuation 15438499 · Feb 21, 2017
Division 14477680 · Sep 4, 2014
Division 13218374 · Aug 25, 2011
Related Publication 20190140174A1 · May 9, 2019