Gap fill void and connection structures
The present disclosure relates to semiconductor structures and, more particularly, to gap fill void and connection structures and methods of manufacture. The structure includes: a gate structure comprising source and drain regions; a gate contact in direct contact and overlapping the gate structure; and source and drain contacts directly connecting to the source and drain regions, respectively.
1. A structure comprising:
a gate structure comprising source and drain regions;
a gate contact in direct contact with the gate structure and which extends to an underlying substrate on a side of the gate structure; and
source and drain contacts directly connecting to the source and drain regions, respectively,
wherein the gate contact comprises a metallization provided within an opening of a dielectric stack of material in alignment with the gate structure and extending into the underlying substrate on the side of the gate structure.
2. The structure of claim 1 , wherein the gate contact and the source and drain contacts are middle of line contacts.
3. The structure of claim 1 , wherein the gate contact and the source and drain contacts are lined with a same liner material.
4. The structure of claim 3 , wherein the same liner material is on vertical sidewalls of the gate contact and the source and drain contacts.
5. The structure of claim 4 , wherein the same liner material is one of SiN, oxide, nitride and tetraethoxysilane (TEOS).
6. The structure of claim 1 , wherein the opening is lined with an insulator material below the metallization and extending into the underlying substrate.
7. The structure of claim 6 , wherein the opening extends between the gate structure and the source and drain regions.
8. The structure of claim 7 , further comprising a void on a side of the gate structure, opposing the metallization that extends into the underlying substrate.
9. The structure of claim 8 , wherein the void is lined with the insulator material.
10. The structure of claim 9 , wherein the void is lined with the insulator material.
11. The structure of claim 1 , further comprising a void on a side of the gate structure, opposing the gate contact, wherein the void is lined with an insulator material.
12. The structure of claim 11 , wherein the insulator material lining the void contacts a side of the source and drain regions, the underlying substrate and a bottom surface of a middle of line (MOL) interlevel dielectric stack of material.
13. A structure comprising:
a gate structure comprising source and drain regions;
a gate contact in direct contact with the gate structure and which extends to an underlying substrate on a side of the gate structure; and
source and drain contacts directly connecting to the source and drain regions, respectively,
voids between the source and drain regions and the gate structure, and
wherein the gate contact and the source and drain contacts are lined with a same liner material.
14. The structure of claim 13 , wherein the voids electrically separate the gate contact and the source and drain contacts.
15. The structure of claim 14 , wherein the same liner material lines the voids.
16. The structure of claim 15 , wherein the same liner material is an insulator material.
17. A structure comprising:
a gate structure comprising source and drain regions on a substrate;
a gate contact in contact with the gate structure and the substrate;
source and drain contacts connecting to the source and drain regions, respectively;
a void on a side of the gate structure, the void being surrounded by the substrate, the gate structure and the source and drain regions, and a middle of the line dielectric stack of materials; and
an insulator liner on sidewalls of the gate contact, sidewalls of the source and drain contacts, and sides of the void.
18. The structure of claim 17 , wherein the insulator liner lining the void contacts a side of the source and drain regions, the substrate and a bottom surface of a middle of line (MOL) interlevel dielectric stack of material.