Hermetic package for power semiconductor
A hermetic high-current electronic package includes a package body and a base plate hermetically coupled to the package body. A semiconductor device is thermally mounted to the base plate and has a high-current output. A high-current input/output (I/O) terminal is bonded to the high-current output of the semiconductor device by a strap terminal that is an integral high current heatsink terminal. The high-current I/O terminal passes through a hole formed in a sidewall of the package body. A ceramic seal surrounds the high-current I/O terminal and has a first surface hermetically bonded to an outer surface of the sidewall of the package body. A metal hermetic seal washer surrounds the high-current I/O terminal and is bonded to a second surface of the ceramic seal and bonded to a portion of the high-current I/O terminal that passes through the metal hermetic seal washer.
1. A hermetic electronic package comprising:
a package body;
a package base plate hermetically coupled to a first end of the package body;
a lid seam welded onto the package body at a second end opposite the first end to form a hermetic seal with the package body;
a substrate thermally coupled to the base plate, the substrate having first, second, and third metalized regions;
a MOSFET semiconductor device having a drain, a source, and a gate, the drain electrically and thermally mounted to the first metalized region on the substrate, the source electrically bonded to the second metalized region on the substrate by a plurality of bonding wires, and the gate bonded to the third metalized region on the substrate by at least one bonding wire;
a drain high-current input/output (I/O) terminal electrically bonded to the first metalized region on the substrate by a first strap terminal that is an integral high current heatsink terminal, the drain high-current I/O terminal passing through a hole formed in the package body;
a source high-current I/O terminal electrically bonded to the second metalized region on the substrate by a second strap terminal that is an integral high current heatsink terminal, the source high-current I/O terminal passing through a hole formed in the package body;
a gate I/O terminal electrically bonded to the third metalized region on the substrate by a gate bonding wire;
each of the drain and source high-current I/O terminals and the gate I/O terminal surrounded by a ceramic seal having a first surface and a second surface, the first surface hermetically bonded to an outer surface of the package body and by a metal hermetic seal washer hermetically bonded to the second surface of each ceramic seal and hermetically bonded to one of the drain high-current I/O terminal, the source high-current I/O terminal, and the gate I/O terminal which it surrounds.
2. The hermetic electronic package of claim 1 wherein the package body is formed from one of Kovar, alloy 42, alloy 46 and alloy 52.
3. The hermetic electronic package of claim 1 wherein the ceramic seals are formed from one of alumina and silicon nitride and are brazed to the package body using a CuAg braze.
4. The hermetic electronic package of claim 1 wherein the high-current I/O terminals are formed from one of copper, copper zirconium, and beryllium copper (BeCu).
5. The hermetic electronic package of claim 1 wherein the metal hermetic seal washer is formed from one of one of Kovar, alloy 42, alloy 46 and alloy 52.
6. The hermetic electronic package of claim 1 wherein the metal hermetic seal washers are each hermetically bonded to the second surface of the respective ceramic seal and to a portion of the respective drain high-current I/O terminal, source high-current I/O terminal and gate I/O terminal using a CuAg braze.