IP Library Granted Patent US 10,872,831
Granted Patent B2
US 10,872,831 · App. 16/391,190 · Granted Dec 22, 2020

Method of forming a semiconductor package

Inventors: Ying-Shin Han (Hsinchu, TW); Yen-Miao Lin (Miaoli County, TW); Chung-Chih Chen (Hsinchu, TW); Hsien-Liang Meng (Hsinchu, TW)
Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
H01L23/10H01L21/4817H01L23/053H01L23/145H01L23/36H01L23/3675H01L23/42H01L24/13H01L24/16H01L24/32H01L24/73H01L24/81H01L24/92H01L2224/13111H01L2224/13116H01L2224/13139H01L2224/13147H01L2224/13155H01L2224/16145H01L2224/16227H01L2224/32145H01L2224/32225H01L2224/32245H01L2224/73204H01L2224/73253H01L2224/81815H01L2224/92125H01L2224/92225H01L2924/163H01L2924/16251H01L2924/3511H01L2924/3512H01L2924/35121
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Quick Facts
Patent No.
US 10,872,831
App. No.
16/391,190
Granted
Dec 22, 2020
Kind
B2
Abstract

A method of forming a semiconductor package includes dispensing an adhesive on a substrate that has an integrated circuit die attached thereon, placing a lid over the integrated circuit die such that a bottom surface of the lid caps at least a portion of the adhesive, and pressing the lid against the substrate such that a portion of the adhesive is squeezed from a space between the bottom surface of the lid and the substrate onto a sidewall of the lid.

Claims (33)

1. A method of forming a semiconductor package, comprising:

dispensing inner and an outer adhesive rings on a substrate having an integrated circuit die attached thereon, wherein the inner adhesive ring is between the integrated circuit die and the outer adhesive ring;

placing a lid over the integrated circuit die such that a bottom surface of the lid caps at least a portion of the inner adhesive ring and at least a portion of the outer adhesive ring; and

pressing the lid against the substrate such that the inner and outer adhesive rings are squeezed from a space between the bottom surface of the lid and the substrate onto an inner and an outer sidewall of the lid, respectively, wherein the inner adhesive ring on the inner sidewall of the lid is higher than the outer adhesive ring on the outer sidewall of the lid.

2. The method of claim 1 , wherein the inner and outer adhesive rings are dispensed at a distance short enough such that the inner and outer adhesive rings are squeezed to adjoin each other during pressing the lid against the substrate.

3. The method of claim 1 , wherein pressing the lid against the substrate is such that the inner adhesive ring on the inner sidewall of the lid is spaced apart from the integrated circuit die.

4. The method of claim 1 , further comprising:

dispensing an underfill between the integrated circuit die and the substrate, wherein pressing the lid against the substrate is such that the inner adhesive ring on the inner sidewall of the lid is spaced apart from the underfill.

5. The method of claim 1 , wherein pressing the lid against the substrate is performed such that the inner and outer adhesive rings between the bottom surface of the lid and the substrate are thicker than the inner and outer adhesive rings on the inner and outer sidewalls of the lid.

6. A method of forming a semiconductor package, comprising:

attaching an integrated circuit die on a substrate;

dispensing an inner adhesive portion and an outer adhesive portion on the substrate; and

pressing a foot portion of a lid against the inner adhesive portion and the outer adhesive portion such that the inner adhesive portion and the outer adhesive portion are merged together, a portion of the inner adhesive portion is squeezed onto an inner sidewall of the foot portion, and a portion of the outer adhesive portion is squeezed onto an outer sidewall of the foot portion, wherein the portion of the inner adhesive portion on the inner sidewall is higher than the portion of the outer adhesive portion on the outer sidewall.

7. The method of claim 6 , wherein the inner adhesive portion on the inner sidewall is spaced apart from the integrated circuit die.

8. The method of claim 6 , further comprising:

dispensing an underfill between the integrated circuit die and the substrate, wherein the inner adhesive portion on the inner sidewall is spaced apart from the underfill.

9. A method of forming a semiconductor package, comprising:

attaching an integrated circuit die on a substrate;

dispensing a first adhesive on the integrated circuit die;

dispensing a second adhesive on the substrate; and

pressing a foot portion of a lid against the first and second adhesives such that a first portion of the second adhesive on an inner sidewall of the foot portion is higher than a second portion of the second adhesive on an outer sidewall of the foot portion and is lower than the first adhesive.

10. The method of claim 9 , wherein the second adhesive has a better adhering ability than the first adhesive.

11. The method of claim 9 , wherein the first adhesive has a better thermal conductivity than the second adhesive.

12. The method of claim 9 , wherein the first portion of the second adhesive is spaced apart from the first adhesive.

13. The method of claim 9 , wherein the first portion of the second adhesive is spaced apart from the integrated circuit die.

14. The method of claim 9 , further comprising:

dispensing an underfill between the substrate and the integrated circuit die, wherein the first portion of the second adhesive is spaced apart from the underfill.

15. The method of claim 1 , wherein the inner adhesive ring on the inner sidewall of the lid is higher than a bottom surface of the integrated circuit die when pressing the lid against the substrate is complete.

16. The method of claim 1 , wherein the inner adhesive ring on the inner sidewall of the lid is lower than a top surface of the integrated circuit die when pressing the lid against the substrate is complete.

17. The method of claim 1 , wherein pressing the lid against the substrate is performed such that the inner adhesive ring on the inner sidewall of the lid is thicker than the outer adhesive ring on the outer sidewall of the lid measured in a direction along which a top surface of the substrate extends.

18. The method of claim 6 , wherein the portion of the inner adhesive portion on the inner sidewall of the foot portion is higher than a bottom surface of the integrated circuit die when pressing the foot portion of the lid against the substrate is complete.

19. The method of claim 6 , wherein the portion of the outer adhesive portion on the outer sidewall of the foot portion is lower than a bottom surface of the integrated circuit die when pressing the foot portion of the lid against the substrate is complete.

20. The method of claim 6 , wherein pressing the foot portion of the lid against the substrate is performed such that the portion of the inner adhesive portion on the inner sidewall of the foot portion is thicker than the portion of the outer adhesive portion on the outer sidewall of the foot portion measured in a direction along which a top surface of the substrate extends.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 25, 2019
From: HAN, YING-SHIN; LIN, YEN-MIAO; CHEN, CHUNG-CHIH; MENG, HSIEN-LIANG
To: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
Reel/Frame 049001/0469 →
Continuity (3)
Division 15616908 · Jun 7, 2017
Provisional Application 62434411 · Dec 14, 2016
Related Publication 20190252277A1 · Aug 15, 2019