Hydrogen bleed gas for an ion source housing
A terminal system for an ion implantation system has an ion source with a housing and extraction electrode assembly having one or more aperture plates. A gas box is electrically coupled to the ion source. A gas source is within the gas box to provide a gas at substantially the same electrical potential as the ion source assembly. A bleed gas conduit introduces the gas to a region internal to the housing of the ion source and upstream of at least one of the aperture plates. The bleed gas conduit has one or more feed-throughs extending through a body of the ion source assembly, such as a hole in a mounting flange of the ion source. The mounting flange may be a tubular portion having a channel. The bleed gas conduit can further have a gas distribution apparatus defined as a gas distribution ring. The gas distribution ring can generally encircle the tubular portion of the mounting flange.
1. A terminal system for an ion implantation system, wherein the terminal system comprises:
an ion source housing;
an ion source assembly positioned within the ion source housing, wherein the ion source assembly comprises an extraction electrode assembly having one or more aperture plates;
a gas box electrically coupled to the ion source assembly;
a gas source disposed within the gas box, wherein the gas source is configured to provide a gas at the same electrical potential as the ion source assembly; and
a bleed gas conduit associated with the ion source assembly, wherein the bleed gas conduit is configured to introduce the gas to a region internal to the ion source housing, wherein the region is further external to the ion source assembly and upstream of one or more of the one or more aperture plates.
2. The terminal system of claim 1 , wherein the bleed gas conduit comprises one or more feed-throughs extending through a body of the ion source assembly.
3. The terminal system of claim 2 , wherein the one or more feed-throughs comprise a hole in a mounting flange of the ion source assembly.
4. The terminal system of claim 3 , wherein the mounting flange comprises a tubular portion having a channel defined therein.
5. The terminal system of claim 4 , wherein bleed gas conduit further comprises a gas distribution apparatus.
6. The terminal system of claim 5 , wherein the gas distribution apparatus comprises a gas distribution ring.
7. The terminal system of claim 6 , wherein the gas distribution ring generally encircles the tubular portion of the mounting flange.
8. The terminal system of claim 5 , wherein the gas distribution apparatus comprises a plurality of distribution holes located around a circumference thereof.
9. The terminal system of claim 1 , wherein the gas distribution apparatus is positioned external to the ion source assembly and upstream of a ground plate of the extraction electrode assembly.
10. The terminal system of claim 1 , wherein the gas source comprises a hydrogen generator configured to generate hydrogen gas.
11. The terminal system of claim 1 , wherein the ion source and gas box are electrically isolated from a remaining portion of the terminal system via a plurality of electrical insulators.
12. The terminal system of claim 1 , further comprising a plurality of insulating standoffs, whereby the plurality of insulating standoffs electrically isolate the terminal system from earth ground.
13. The terminal system of claim 1 , wherein the gas comprises one of a reactive gas and an inert gas.
14. The terminal system of claim 13 , wherein the reactive gas comprises hydrogen gas.
15. The terminal system of claim 13 , wherein the inert gas comprises xenon.
16. An ion source, comprising:
an ion source housing and an extraction electrode assembly disposed therein having one or more aperture plates;
a hydrogen gas source configured to provide hydrogen gas at the same electrical potential as the ion source; and
a bleed gas conduit associated with the ion source housing, wherein the bleed gas conduit comprises a gas distribution ring fluidly coupled to the hydrogen gas source, wherein the gas distribution ring generally encircles a tubular portion of the ion source housing, and wherein the bleed gas conduit is configured to introduce the hydrogen gas to a region generally internal to the ion source housing and upstream of one or more of the one or more aperture plates of the extraction electrode.
17. The ion source of claim 16 , wherein the gas distribution ring comprises a plurality of distribution holes located around a circumference thereof, and wherein the gas distribution ring is positioned internal to the ion source housing and upstream of a ground plate of the extraction electrode assembly.
18. The ion source of claim 16 , wherein the hydrogen gas source comprises a hydrogen generator.
19. An ion implantation system, comprising:
a terminal comprising:
a gas box having a hydrogen generator configured to produce hydrogen gas; and
an ion source assembly configured to form an ion beam, wherein the ion source assembly comprises an ion source housing comprising an arc chamber and an extraction electrode assembly, wherein the ion source assembly further comprises a bleed gas conduit configured to introduce gas to a region generally internal to the ion source housing and upstream of the extraction electrode assembly, wherein the region is further external to the arc chamber, and wherein the ion source assembly and the gas box are at the same electrical potential;
a beamline assembly configured to selectively transport the ion beam; and
an end station configured to accept the ion beam for implantation of ions into a workpiece.