Method to co-integrate SiGe and Si channels for finFET devices
A method for co-integrating finFETs of two semiconductor material types, e.g., Si and SiGe, on a bulk substrate is described. Fins for finFETs may be formed in an epitaxial layer of a first semiconductor type, and covered with an insulator. A portion of the fins may be removed to form voids in the insulator, and the voids may be filled by epitaxially growing a semiconductor material of a second type in the voids. The co-integrated finFETs may be formed at a same device level.
1. A device, comprising:
a silicon substrate having a surface;
a pFET fin whose semiconductor portions consist of a first portion extending outward from the surface of the substrate to a first height and a second portion extending outward from the first portion to a second height, the first portion consisting silicon and the second portion consisting of SiGe; and
an nFET fin extending outward from the surface of the substrate to a third height that is greater than the first height, semiconductor portions of the nFET fin consisting of silicon;
at least one gate on the pFET and nFET fins.
2. The device of claim 1 , wherein the second portion has a length and a width the same as the first portion.
3. The device of claim 1 , wherein the pFET fin has a top surface coplanar with a top surface of the nFET fin.
4. The device of claim 1 , further comprising an insulator over the surface of the substrate and between the pFET fin and the nFET fin.
5. The device of claim 4 , wherein the insulator includes an oxide or a spin-on glass.
6. A device, comprising:
a substrate having a surface;
a pFET fin whose semiconductor portions consist of a first portion extending from the surface of the substrate and a second portion extending from the first portion, the first portion of the pFET fin consisting of silicon and the second portion of the pFET fin consisting of SiGe; and
an nFET fin whose semiconductor portions consist of a first portion extending from the surface of the substrate and a second portion extending from the first portion, the first portion of the nFET fin consisting silicon and the second portion of the nFET fin consisting of silicon epitaxially grown over the first portion of the nFET fin.
7. The device of claim 6 , wherein the substrate consists of silicon.
8. The device of claim 6 , wherein the pFET fin and the nFET fin have a same height.
9. The device of claim 6 , further comprising at least one gate overlying the pFET fin and the nFET fin, the at least one gate being transverse to the pFET fin and the nFET fin.
10. The device of claim 6 , wherein the second, SiGe portion of the pFET fin is epitaxially grown over the first portion of the pFET fin.
11. The device of claim 6 , wherein the second, SiGe portion of the pFET fin is doped to provide p-type conductivity.
12. The device of claim 6 , wherein the second, silicon portion of the nFET fin is doped to provide n-type conductivity.
13. The device of claim 6 , further comprising at least one gate overlying the pFET fin and the nFET fin, the at least one gate being transverse to the pFET fin and the nFET fin, wherein:
the substrate consists of silicon;
the pFET fin and the nFET fin have a same height;
the second, SiGe portion of the pFET fin is epitaxially grown over the first portion of the pFET fin;
the second, SiGe portion of the pFET fin is doped to provide p-type conductivity; and
the second, silicon portion of the nFET fin is doped to provide n-type conductivity.
14. The device of claim 1 , wherein the second, SiGe portion of the pFET fin is epitaxially grown over the first portion of the pFET fin.
15. The device of claim 1 , wherein an upper portion of silicon of the nFET fin is epitaxially grown over a lower portion of the nFET fin.
16. The device of claim 1 , wherein the second, SiGe portion of the pFET fin is doped to provide p-type conductivity.
17. The device of claim 1 , wherein the silicon of the nFET fin is doped to provide n-type conductivity.
18. The device of claim 1 , further comprising an insulator over the surface of the substrate and between the pFET fin and the nFET fin, wherein:
the second portion has a length and a width the same as the first portion;
the pFET fin has a top surface coplanar with a top surface of the nFET fin;
the insulator includes an oxide or a spin-on glass;
the second, SiGe portion of the pFET fin is epitaxially grown over the first portion of the pFET fin;
an upper portion of silicon of the nFET fin is epitaxially grown over a lower portion of the nFET fin;
the second, SiGe portion of the pFET fin is doped to provide p-type conductivity; and
the silicon of the nFET fin is doped to provide n-type conductivity.