Three-dimensional memory device including laterally constricted current paths and methods of manufacturing the same
View Patent ↗A vertically alternating sequence of insulating layers and sacrificial material layers is formed over a substrate. Line trenches extending along a first horizontal direction are formed through the vertically alternating sequence. The vertically alternating sequence is divided into vertically alternating stacks of insulating strips and sacrificial material strips. Laterally alternating sequences of memory opening fill structures and dielectric pillar structures are formed within the line trenches. Each of the memory opening fill structures includes a respective vertical bit line and memory material portion located between each laterally neighboring pair of the sacrificial material strip and the vertical bit line. A lateral extent of an overlap between the memory material portion and a most proximal one of the sacrificial material strips along the first horizontal direction is less than a lateral extent along the first horizontal direction of the memory opening fill structure containing the memory material portion. The sacrificial material strips are replaced with electrically conductive strips.
1. A three-dimensional memory device, comprising:
vertically alternating stacks of insulating strips and electrically conductive strips that overlie a substrate and are laterally spaced from each other by line trenches that laterally extend along a first horizontal direction; and
laterally alternating sequences of memory opening fill structures and dielectric pillar structures located within a respective one of the line trenches, each memory opening fill structure comprising a respective vertical bit line and a memory material portion, wherein the memory material portion is located between the vertical bit line and a respective electrically conductive strip;
wherein:
the insulating strips and the electrically conductive strips laterally extend along the first horizontal direction;
the vertically alternating stacks are laterally spaced apart along a second horizontal direction that is perpendicular to the first horizonal direction; and
a lateral extent of an overlap between the memory material portion and a most proximal one of the electrically conductive strips along the first horizontal direction is less than a lateral extent along the first horizontal direction of the memory opening fill structure containing the memory material portion.
2. The three-dimensional memory device of claim 1 , wherein:
the electrically conductive strips comprise serrated electrically conductive strips;
each of the serrated electrically conductive strips comprises a pair of laterally undulating sidewalls;
each undulating sidewall of the electrically conductive strips comprises a lateral repetition of recessed segments contacting a respective one of the dielectric pillar structures, and laterally protruding segments contacting a respective one of the memory opening fill structures; and
each laterally protruding segment has a lateral extend that is smaller than a lateral extent of the memory opening fill structure.
3. The three-dimensional memory device of claim 2 , wherein each of the dielectric pillar structures comprises:
a center portion extending from the substrate to a height of topmost electrically conductive strips of the vertically alternating stacks and contacting a respective subset of the insulating strips of the vertically alternating stacks; and
two vertical stacks of laterally protruding portions that contact a respective subset of the recessed segments of the undulating sidewalls of the electrically conductive strips.
4. The three-dimensional memory device of claim 3 , wherein:
the center portion has a first lengthwise lateral extent along the first horizontal direction; and
each laterally protruding portion within the two vertical stacks of laterally protruding portions has a second lengthwise lateral extent along the first horizontal direction that is greater than the first lengthwise lateral extent.
5. The three-dimensional memory device of claim 4 , wherein each of the dielectric pillar structures in the respective one of the line trenches has a greater lateral extent along the second horizontal direction than each memory opening fill structure in the same line trench at each level of the electrically conductive strips, and has a same lateral extent along the second horizontal direction as each memory opening fill structure in the same line trench.
6. The three-dimensional memory device of claim 5 , wherein each of the dielectric pillar structures comprises four vertically-extending convex surfaces at each level of the electrically conductive strips.
7. The three-dimensional memory device of claim 3 , wherein each recessed segment of the electrically conductive strips is adjoined to a respective one of the protruding segments of the electrically conductive strips via a concave sidewall of a respective one of the electrically conductive strips.
8. The three-dimensional memory device of claim 1 , wherein the memory material portion comprises a phase change memory material portion, and wherein the electrically conductive strips comprise word lines.
9. The three-dimensional memory device of claim 8 , wherein each of the memory opening fill structures further comprises a selector material layer that laterally surrounds the vertical bit line.
10. The three-dimensional memory device of claim 1 , wherein:
the vertical bit line in a respective one of the memory opening fill structures has a pair of first straight sidewalls extending along the first horizontal direction and a pair of second straight sidewalls extending along the second horizontal direction; and
a lateral extent of each vertical bit line along the first horizontal direction is greater than a lateral extent of any one of the memory material portions in the same memory opening fill structure.
11. The three-dimensional memory device of claim 10 , wherein each of the memory material portions in a respective one of the memory opening fill structures has a trapezoidal horizontal cross-sectional profile in which a width of a respective memory material portion decreases with a lateral distance from a most proximal one of the electrically conductive strips toward the vertical bit line in the same memory opening fill structure.
12. The three-dimensional memory device of claim 11 , wherein each of the memory opening fill structures further comprises a memory-side spacer layer that laterally surrounds the vertical bit line.
13. The three-dimensional memory device of claim 11 , each of the memory opening fill structures further comprises a selector material portion disposed between each laterally neighboring pair of the memory material portion and the vertical bit line.
14. The three-dimensional memory device of claim 13 , wherein the selector material portion comprises a portion of a selector material layer provided within a respective one of the memory opening fill structures.
15. The three-dimensional memory device of claim 13 , wherein the selector material portion encloses a respective one of the memory material portions.
16. A method of forming a three-dimensional memory device, comprising:
forming a vertically alternating sequence of insulating layers and sacrificial material layers over a substrate;
forming line trenches extending along a first horizontal direction through the vertically alternating sequence, wherein the vertically alternating sequence is divided into vertically alternating stacks of insulating strips and sacrificial material strips that are laterally spaced apart along a second horizontal direction;
forming laterally alternating sequences of memory opening fill structures and dielectric pillar structures within the line trenches, wherein each of the memory opening fill structures comprises a vertical bit line and a memory material portion located between each laterally neighboring pair of a sacrificial material strip and the vertical bit line, wherein a lateral extent of an overlap between the memory material portion and a most proximal one of the sacrificial material strips along the first horizontal direction is less than a lateral extent along the first horizontal direction of the memory opening fill structure containing the memory material portion; and
replacing the sacrificial material strips with electrically conductive strips.
17. The method of claim 16 , further comprising:
forming a row of sacrificial pillar structures and via cavities in each of the line trenches;
forming the dielectric pillar structures in the via cavities, wherein laterally alternating sequences of sacrificial pillar structures and dielectric pillar structures are formed within the line trenches; and
replacing the sacrificial pillar structures with the memory opening fill structures.
18. The method of claim 17 , further comprising:
forming rectangular memory openings by removing the sacrificial pillar structures selective to the dielectric pillar structures, the insulating strips, and the sacrificial material strips; and
forming lateral recesses by laterally recessing surface portions of the sacrificial material strips selective to the insulating strips and the dielectric pillar structures,
wherein the memory material portions are formed in the lateral recesses.
19. The method of claim 18 , further comprising forming a selector material portion between each laterally neighboring pair of the sacrificial material strip and the vertical bit line.
20. The method of claim 18 , wherein:
the electrically conductive strips comprise word lines;
each memory material portion is formed as a phase change memory material layer within a respective one of the rectangular memory openings; and
each vertical bit line is formed on a respective one of the memory material layers.