Gate-all-around fin device
A gate-all around fin double diffused metal oxide semiconductor (DMOS) devices and methods of manufacture are disclosed. The method includes forming a plurality of fin structures from a substrate. The method further includes forming a well of a first conductivity type and a second conductivity type within the substrate and corresponding fin structures of the plurality of fin structures. The method further includes forming a source contact on an exposed portion of a first fin structure. The method further comprises forming drain contacts on exposed portions of adjacent fin structures to the first fin structure. The method further includes forming a gate structure in a dielectric fill material about the first fin structure and extending over the well of the first conductivity type.
1. A method comprising:
forming a first doped well located in a substrate of a first conductivity type;
forming a second doped well of a second conductivity type located in the substrate adjacent to the first doped well;
forming a first doped fin of the first conductivity type located over a first portion of the second doped well;
forming a second doped fin of the second conductivity type located over a second portion of the second doped well;
forming a gate structure located adjacent to the first doped fin over the second doped well; and
forming a source contact located over the first doped fin,
wherein the first doped fin includes alternating p regions and n regions.
2. The method of claim 1 , wherein the gate structure is formed in a dielectric fill material.
3. The method of claim 1 , wherein the first doped well is of the first conductivity type.
4. The method of claim 3 , wherein:
the second doped well is formed as a continuous shallow N-well and the first doped well is formed as a P-well; and
the gate structure is formed completely over the continuous shallow N-well.
5. The method of claim 4 , wherein the first doped fin is formed as a floating P-fin.
6. The method of claim 5 , further comprising forming a drain contact over the second doped fin.
7. The method of claim 6 , wherein the drain contact is formed as an N-doped region.
8. The method of claim 6 , wherein the source and drain contacts and the gate structure are formed completely over the continuous shallow N-well.
9. The method of claim 8 , wherein the first doped well is formed to surround the second doped well.
10. The method of claim 9 , wherein the gate structure is formed between the first doped fin and the second doped fin.
11. The method of claim 6 , wherein the source contact is formed on an n+ region of the first doped fin and the drain contact is formed on an n+ region of the second doped fin.
12. The method of claim 1 , wherein the gate structure is formed as a wraparound gate structure which wraps around the first doped fin.